EELS mapping step-by-step

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14. Enter the Energy Loss of the lowest energy edge (e.g. N: 401eV); check that the Energy range [eV] encompasses all elements of interest NB. you can change the range by changing the dispersion; y may have to adjust the y g g y g g p you y j ZLP again
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31. To map an element, click on the Energy Window Tool 32. Select a window for background: typically, larger than signal window and about 5eV before the edge
EELS Map step-by-step
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1. Load FEG Register 2. Look for a suitable area
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3. Adjust magnification and focus / stigmate STEM image 3. In Filter CP switch to Spectroscopy p py
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53. In Quantify tab, click on Quantify 54. Select parent spectrum-image; click OK; click OK
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55. Select Window > Floating Windows > Color Mix
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55. Select Window > Floating Windows > Color Mix
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5b. Alternatively to step 5, you may enter the energy corresponding to the ZLP position, enter it in AutoFilter CP > Energy Shift, p gy press Enter, and Align ZLP g
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40. For other elements, you can simply shift the background window in front of another edge and the signal window on the other edge, and repeat previous steps (first edge / element)
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3b. you can use the focus window so that the beam does not damage or contaminate the specimen too q p quickly; also Blank the beam when not observing y g
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41. Rearrange the display
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42. Run SerViewer.exe; find the .emi file containing the spectrum image
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43. Export as .txt + .dat
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44. In DM, select TIA SI > Import TIA Spectrum Image
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13. Enlarge ZLP, place a marker tool on the ZLP, read the Energy on the Annotation Info, enter it PEELS > Flapout > Energy Loss, and p p gy press Align ZLP g
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26. In periodic table, select ROI tab and double click on all the elements of interest (e.g. Zn, O, C) )
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27. Close the periodic table 28. Click on a spectrum and on TIA top tool bar, click on Copy KLM setup p p py p
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20. In Experiments > Settings, define the experiment’s conditions
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21. press 'Add markers' and position the map box (orange) and the drift correction box (y (yellow) )
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22. Press Acquire
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23. You can monitor the drift by clicking on Show hide Output window
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24. Go to TIA full mode 25. In TIA menu, go to View > Periodic Table g
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56. Select images and select color
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15. Decrease the CL to minimum
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16. Check Cinema Mode and Start Search 17. Use Diffraction alignment to maximize the intensity on the View window g y
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45. Load .txt file
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46. Select Spectrum > Convert Data to > EELS; confirm pressing ‘OK’
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47. Select the ‘Spectrum Picker Tool’
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48. Click on the image: a spectrum should come out corresponding to the clicked pixel 49. Select EELS > Quantification…
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6. In DM, check cinema mode, and Start View
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7. Adjust FX, FY, SX, SY: double-click on the corresponding adjustment in FilterControl and move the mouse left and right to make the ZLP as thin and vertical as possible; click again to accept the change or press Esc to cancel
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29. Click on Image selection Tool 30. Select the STEM map
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31. In SumSpectra component shortcut, click on Integrate 32. Click on spectrum and click on Copy KLM Setup
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33. Right-click on spetrum, and select Edit Background
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34. Select the energy window and press OK
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35. Move the background window left and right and make sure the background subtraction does not change significantly; also check that the edge signal decays back to zero
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50. In EELS Quantification window, select elements of interest within the energy range 51. Click on ‘Label’
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50. Select ‘Edge Setup’ tab in EELS Quantification dialog window 51. Input the experimental conditions (the collection angle is found in Titan UI help (F1) > Operation > EELS Analysis > EELS Acceptance Angles 52. For each edge, adjust the position of the background and signal window
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8. Stop View 9. In AutoFilter, press search, magnify the spectrum on the zero loss peak, and use Auto Filter to maximize intensity and minimize FWHM (you may need to do this at smallest y (y y dispersion)
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18. Stop View, uncheck Cinema mode 19. Start STEM > Preview and keep scanning until step 22; If mapping an interface, adjust the STEM rotation so that the interface is either horizontal or vertical
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10. Set Preview to 0.1 and press Preview
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11. In DM, go to EELS > Compute Thickness > Log-ratio (relative); thickness < 1 mfp is recommended
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12. in PEELS CP, set search time to 0.1 (same as in Autofilter > Preview)
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4. Adjust Search time to 0.05s and press Search; lift flu screen (be careful not to saturate the GIF CCD!) 5. In Filter Control, set Slit Width to 0 eV, double click on Adjust and move the mouse left j and right to shift the ZLP to 0eV
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39. Click on the map and press CTRL+C to copy; right-click on the map and select Paste Down; double-click on the new map, select Display tab, and check Show Legend
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36.Select the signal with the energy window tool
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37. In Unary processes, click on Extract Map/Profile
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38. Double click on the map and in the Image/Display Properties dialog window change Name and Style as wished