TiAl过渡层对电弧离子镀沉积TiAlN膜层的影响

第33卷第3期 人　工　晶　体　学　报 V ol.33　N o.3　2004年6月 JOURNA L OF SY NTHETIC CRY ST A LS June,2004 TiAl过渡层对电弧离子镀沉积TiAl N膜层的影响

宋贵宏1,郑静地2,刘　越2,孙　超2

(1.沈阳工业大学材料科学与工程学院,沈阳110023;2.中国科学院金属研究所,沈阳110015)

摘要:利用电弧离子镀,在不锈钢和S iC p增强2024铝基复合材料基底上沉积T iAlN薄膜。结果表明:T iAlN膜层直接沉积在不锈钢基底上,膜层呈[111]择优取向;然而,T iAlN膜层沉积在不锈钢基底的T iAl过渡层上,膜层呈[220]方向择优取向;并且随着过渡层从零开始增厚,T iAlN膜层的织构系数T(111)逐渐减小,而T(200)逐渐增大,但膜层一直以[220]方向择优取向,内应力的存在可能是膜层产生[220]方向择优取向的原因。在复合材料基底T iAl过渡层上沉积,随着负脉冲偏压的增加,T iAlN膜层的择优取向由[111]向[200]转变。在不锈钢基底上,没有T iAl过渡层时,膜层表面相对光滑,大颗粒较少;有了T iAl过渡层,表面大颗粒较多;T iAl过渡层不同沉积时间对膜层表面影响不大,颗粒尺寸相差无几。没有T iAl过渡层时,膜层结合强度很差,有了T iAl过渡层,结合强度明显增加,但结合强度的大小随过渡层沉积时间(厚度)变化。

关键词:电弧离子镀;T iAlN膜层;织构;T iAl过渡层;结合强度;内应力

中图分类号:O484.1 文献标识码:A 文章编号:10002985X(2004)0320422206

I nfluence of the TiAl I nterlayer on TiAl N Coating

Deposited by Arc Ion Plating

SONG Gui2hong1,ZHENG Jing2di2,LIU Yue2,SUN Chao2

(1.School of M aterials Science and Engineering,Shenyang University of T echnology,Shenyang110023,China;

2.Institute of M etal Research,Chinese Academy of Sciences,Shenyang110015,China)

(Received17October2003,accepted5March2004)

Abstract:The T iAlN coatings were deposited on stainless steel and20242SiC p com posite substrate by arc ion plating.Results show that the T iAlN coatings directly deposited on stainless steel substrate have a markedly preferred orientation of[111].H owever,on the T iAl interlayer deposited on stainless steel substrate,the texture coefficient T(111)of the T iAlN coating gradually decreases and T(200)gradually increases with the thickness of T iAl interlayer increasing,but the preferred orientation of coatings keeps[220]regardless of the thickness of the T iAl interlayer on stainless steel substrate.The[220]preferred orientation of coatings may be due to the internal stress in coatings.On the T iAlN coatings deposited on20242SiC p com posite,the preferred orientation of coatings gradually trans forms from[111]into[200]with negative pulse bias increasing.The surface m orphology of coatings without interlayer is very sm ooth with little micro2particles,whereas the coatings with interlayer is rough with m ore and big micro2particles.The thickness of interlayer has little in fluence on the surface m orphology of coatings and the size of micro2particles.The T iAl interlayer substantially increases the adhesive strength of T iAlN coatings,but the adhesive strength varis with the thickness of T iAl interlayer.

K ey w ords:arc ion plating;T iAlN coating;texture;T iAl interlayer;adhesive strength;internal stress

收稿日期:2003210217;修订日期:2004203205

作者简介:宋贵宏(19652),男,辽宁省人,博士,副教授。E2mail:ghs ong@