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Vibration and Noise Design of Advanced Technology Facilities
Ahmad Bayat, P.E. J. Byron Davis Vibro-Acoustic Consultants
29 June 2004
1
Vibration and Noise Design of Advanced Technology Facilities I. II. Brief background on VACC Vibration Design of Facilities
IBM (Burlington, East Fishkill); Dominion Semiconductor; Lucent (Orlando); Seagate (Pitts.); Nat’l Security Agency (Ft. Meade)
Western U.S.:
Intel Fabs LCE, C6, 11, 12, 22, 23; Sandia Nat’l Labs; HP Fort Collins; Motorola COM1, MOS12, and Flat Panel; Micron Lehi, Boise, and Mask Shop; Atmel; Vitesse; Philips Fab 25; Microchip (Phoenix); NCR
5
Projects – Southeast Asia
Taiwan, R.O.C.:
TSMC Fabs 3, 6, and 7; WaferTech; Quanta TFT; Arima; Formosa; Nan Ya Fabs 1 and 3; Winbond; Formosa; Macronix; OPTO Fab; AMAT Taiwan; Eagle TFT Fab; UMC; Powerchip Fab 2; Acer; Chunghwa Picture Tube; NanYa / Inotera
18
Vibration Design of Advanced Technology Facilities
Problem Definition: Structures – FPD FPD Panel Size Driving Vibration Design
100.0 100.0
10.0 10.0
1.0 1.0
0.1 0.1 1 1 10 10 Frequency [ Hz ] Frequency [ Hz ] 100 100
16
Vibration Design of Advanced Technology Facilities
Importance of Tones
Projects – United States
Texas:
Atmel; Motorola ULSI/MOS13; TI DMOS5, DMOS6, Kilby Center; AMD Fab 25; Samsung; Methodist Heart Center (Lubbock)
East Coast:
Problem Definition: Structures
Mega fabs (usually 10,000+ m2 CR) Sub-fabs (one- & two-level), stacked fabs Mostly concrete, mostly cast-in-place Structural isolation breaks (SIBs) Access floors from ~150mm to 1.7m secondary structures for sensitive tools Soil Dynamics
California:
Intel Fabs D2, SC1, SC2, and IMO; Stanford University; AMAT Bldg.s 2, 3, 92, Arques Center, Scott Campus; IBM San Jose; IDT; LAM Research; Vishay / Siliconix; National Semiconductor; Linear Technology; AT&T; UC Campuses at Berkeley,Davis, and San Francisco; Lawrence Berkeley National Labs; Lawrence Livermore Nat’l Labs / National Ignition Facility; Cal Poly San Luis Obispo; International Rectifier; UC Irvine; ST Microelectronics
4
Projects – US West Coast
Pacific Northwest:
Intel Fabs D1B, D1C, RB1, 15, and Pathfinder; Hyundai; WaferTech Camus; Fujitsu Gresham; LSI Logic; IDT MASCA; Maxim; Seattle Ferry Terminal; University of Washington
China: Motorola Tianjin MOS17, MOS17-X Korea: CTIS Korea; AMAT Korea Singapore: ST Microelectronics AMK8 Thailand: SMT Malaysia: WTM/Silterra
6
Projects – Europe
1.0
0.1 1 10 Frequency [ Hz ] 100
15
Vibration Design of Advanced Technology Facilities
Importance of Tones
Typical Floor Vibration Data Narrowband (Bandwidth = 0.46875) 1000.0 1000.0 RMS Velocity [ micro-in/s ] RMS Velocity [ micro-in/s ]
Problem Definition Two Design Fundamentals
III. Noise Design of Facilities IV. Tool Hook-Up V. Structural Evaluation
2
Background on VACC
Our background
3
Dominated by 30Hz ‘tone’
VC-D VC-E
100.0
10.0
Dominated by 60Hz ‘tone’
1.0 1 10 Frequency [ Hz ] 100
14
Vibration Design of Advanced Technology Facilities
1/3 Octave Band vs. Narrowband Data
8
Vibration Design of Advanced Technology Facilities
Problem Definition: Why Vibration? Submicron manufacturing / R&D … … usually in a super-clean environment Sensitivity vs. power: 100/100 rule Marriage of “Beauty” and “Beast”
Corporate R&D
• • • •
Mature Processes
•Baidu Nhomakorabea
Manufacturing
• • •
Microelectronics, Flat Panel Displays Pharmaceuticals, Biotechnology Tools Nanotechnology (coming soon)
Typical Floor Vibration Data Narrowband, Resulting 1/3 Octave Band Data Overlay 1000.0 RMS Velocity [ micro-in/s ]
100.0
10.0 Narrowband 1/3 Octave Band
9
Vibration Design of Advanced Technology Facilities
Problem Definition: Sources
Rotating machinery (tones/BB) – unknown Piping/ductwork turbulence (BB) – unknown Movement of people/materials (BB) – known Environmental sources – usually known
10
Local & Environmental Sources
11
Vibration Design of Advanced Technology Facilities
Tones vs. Broadband
Narrowband 1000.0 RMS Velocity [ micro-in/s ] Typical Floor Vibration Data Narrowband (Bandwidth = 0.46875)
1 10 Frequency [ Hz ] 100
0.1
13
Vibration Design of Advanced Technology Facilities
1/3 Octave Band Data
1/3 Octave Band 1000.0 RMS Velocity [ micro-in/s ] Typical Floor Vibration Data Summed 1/3 Octave Band
Narrowband 1000.0 RMS Velocity [ micro-in/s ] Typical Floor Vibration Data Narrowband (Bandwidth = 0.46875)
100.0
t
10.0
1.0
t
Deterministic Sine Wave (tone) Frequency at Shaft Speed Amplitude ∝ Unbalanced Force
Problem Definition: Processes
• •
Basic Research
•
Developing Developing Processes Processes
Universities, National Labs Semiconductors, Devices Flat Panel Display Technologies Pharmaceuticals, Biotechnology Nanotechnology
Scotland: Motorola East Killbride Ireland: Intel Fabs 10, 24 France: ST Microelectronics Rousset Italy: ST Microelectronics Catania M6
7
Vibration Design of Advanced Technology Facilities
100.0
10.0
1.0
“Broadband Random Excitation” “Tones”
0.1 1 10 Frequency [ Hz ] 100
12
Vibration Design of Advanced Technology Facilities
Tones vs. Broadband
Typical Floor Vibration Data Summed 1/3 Octave Band 1000.0 RMS Velocity [ micro-in/s ]
VC-D
100.0
VC-E
10.0
1.0 1 10 Frequency [ Hz ] 100
17
Vibration Design of Advanced Technology Facilities
Ahmad Bayat, P.E. J. Byron Davis Vibro-Acoustic Consultants
29 June 2004
1
Vibration and Noise Design of Advanced Technology Facilities I. II. Brief background on VACC Vibration Design of Facilities
IBM (Burlington, East Fishkill); Dominion Semiconductor; Lucent (Orlando); Seagate (Pitts.); Nat’l Security Agency (Ft. Meade)
Western U.S.:
Intel Fabs LCE, C6, 11, 12, 22, 23; Sandia Nat’l Labs; HP Fort Collins; Motorola COM1, MOS12, and Flat Panel; Micron Lehi, Boise, and Mask Shop; Atmel; Vitesse; Philips Fab 25; Microchip (Phoenix); NCR
5
Projects – Southeast Asia
Taiwan, R.O.C.:
TSMC Fabs 3, 6, and 7; WaferTech; Quanta TFT; Arima; Formosa; Nan Ya Fabs 1 and 3; Winbond; Formosa; Macronix; OPTO Fab; AMAT Taiwan; Eagle TFT Fab; UMC; Powerchip Fab 2; Acer; Chunghwa Picture Tube; NanYa / Inotera
18
Vibration Design of Advanced Technology Facilities
Problem Definition: Structures – FPD FPD Panel Size Driving Vibration Design
100.0 100.0
10.0 10.0
1.0 1.0
0.1 0.1 1 1 10 10 Frequency [ Hz ] Frequency [ Hz ] 100 100
16
Vibration Design of Advanced Technology Facilities
Importance of Tones
Projects – United States
Texas:
Atmel; Motorola ULSI/MOS13; TI DMOS5, DMOS6, Kilby Center; AMD Fab 25; Samsung; Methodist Heart Center (Lubbock)
East Coast:
Problem Definition: Structures
Mega fabs (usually 10,000+ m2 CR) Sub-fabs (one- & two-level), stacked fabs Mostly concrete, mostly cast-in-place Structural isolation breaks (SIBs) Access floors from ~150mm to 1.7m secondary structures for sensitive tools Soil Dynamics
California:
Intel Fabs D2, SC1, SC2, and IMO; Stanford University; AMAT Bldg.s 2, 3, 92, Arques Center, Scott Campus; IBM San Jose; IDT; LAM Research; Vishay / Siliconix; National Semiconductor; Linear Technology; AT&T; UC Campuses at Berkeley,Davis, and San Francisco; Lawrence Berkeley National Labs; Lawrence Livermore Nat’l Labs / National Ignition Facility; Cal Poly San Luis Obispo; International Rectifier; UC Irvine; ST Microelectronics
4
Projects – US West Coast
Pacific Northwest:
Intel Fabs D1B, D1C, RB1, 15, and Pathfinder; Hyundai; WaferTech Camus; Fujitsu Gresham; LSI Logic; IDT MASCA; Maxim; Seattle Ferry Terminal; University of Washington
China: Motorola Tianjin MOS17, MOS17-X Korea: CTIS Korea; AMAT Korea Singapore: ST Microelectronics AMK8 Thailand: SMT Malaysia: WTM/Silterra
6
Projects – Europe
1.0
0.1 1 10 Frequency [ Hz ] 100
15
Vibration Design of Advanced Technology Facilities
Importance of Tones
Typical Floor Vibration Data Narrowband (Bandwidth = 0.46875) 1000.0 1000.0 RMS Velocity [ micro-in/s ] RMS Velocity [ micro-in/s ]
Problem Definition Two Design Fundamentals
III. Noise Design of Facilities IV. Tool Hook-Up V. Structural Evaluation
2
Background on VACC
Our background
3
Dominated by 30Hz ‘tone’
VC-D VC-E
100.0
10.0
Dominated by 60Hz ‘tone’
1.0 1 10 Frequency [ Hz ] 100
14
Vibration Design of Advanced Technology Facilities
1/3 Octave Band vs. Narrowband Data
8
Vibration Design of Advanced Technology Facilities
Problem Definition: Why Vibration? Submicron manufacturing / R&D … … usually in a super-clean environment Sensitivity vs. power: 100/100 rule Marriage of “Beauty” and “Beast”
Corporate R&D
• • • •
Mature Processes
•Baidu Nhomakorabea
Manufacturing
• • •
Microelectronics, Flat Panel Displays Pharmaceuticals, Biotechnology Tools Nanotechnology (coming soon)
Typical Floor Vibration Data Narrowband, Resulting 1/3 Octave Band Data Overlay 1000.0 RMS Velocity [ micro-in/s ]
100.0
10.0 Narrowband 1/3 Octave Band
9
Vibration Design of Advanced Technology Facilities
Problem Definition: Sources
Rotating machinery (tones/BB) – unknown Piping/ductwork turbulence (BB) – unknown Movement of people/materials (BB) – known Environmental sources – usually known
10
Local & Environmental Sources
11
Vibration Design of Advanced Technology Facilities
Tones vs. Broadband
Narrowband 1000.0 RMS Velocity [ micro-in/s ] Typical Floor Vibration Data Narrowband (Bandwidth = 0.46875)
1 10 Frequency [ Hz ] 100
0.1
13
Vibration Design of Advanced Technology Facilities
1/3 Octave Band Data
1/3 Octave Band 1000.0 RMS Velocity [ micro-in/s ] Typical Floor Vibration Data Summed 1/3 Octave Band
Narrowband 1000.0 RMS Velocity [ micro-in/s ] Typical Floor Vibration Data Narrowband (Bandwidth = 0.46875)
100.0
t
10.0
1.0
t
Deterministic Sine Wave (tone) Frequency at Shaft Speed Amplitude ∝ Unbalanced Force
Problem Definition: Processes
• •
Basic Research
•
Developing Developing Processes Processes
Universities, National Labs Semiconductors, Devices Flat Panel Display Technologies Pharmaceuticals, Biotechnology Nanotechnology
Scotland: Motorola East Killbride Ireland: Intel Fabs 10, 24 France: ST Microelectronics Rousset Italy: ST Microelectronics Catania M6
7
Vibration Design of Advanced Technology Facilities
100.0
10.0
1.0
“Broadband Random Excitation” “Tones”
0.1 1 10 Frequency [ Hz ] 100
12
Vibration Design of Advanced Technology Facilities
Tones vs. Broadband
Typical Floor Vibration Data Summed 1/3 Octave Band 1000.0 RMS Velocity [ micro-in/s ]
VC-D
100.0
VC-E
10.0
1.0 1 10 Frequency [ Hz ] 100
17
Vibration Design of Advanced Technology Facilities