SILICON CARBIDE-BORIDE HEATING ELEMENT AND MANUFAC
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专利名称：SILICON CARBIDE-BORIDE HEATING
ELEMENT AND MANUFACTURE THEREOF 发明人：SUGITA RYUICHI,TSUMURA
SHUNICHI,JINBO RYUTARO,SUZUKI
YASUTAKA
申请号：JP27802189
申请日：19891025
公开号：JPH03138885A
公开日：
19910613
专利内容由知识产权出版社提供
摘要：PURPOSE:To suppress the increase of electric resistance and use a heating element at a high temperature for a long period by providing a protective layer made of borosilicate glass on the surface of a conducting layer. CONSTITUTION:A heating element is constituted of a conducting layer 1 made of SiC-ZrB2, an insulating layer 2 made of AlN-BN, a heating section 3, and a terminal section 4, and a protective layer 5 made of borosilicate glass is provided on the surface of the conducting layer 1. The protective layer 5 made of borosilicate glass and generated on the surface of the heating section 3 covers the boride scattered on the surface of the heating section 3, thus the oxidation of the boride can be suppressed. The increase of electric resistance can be suppressed, and the heating element can be used at a high temperature for a long period.
申请人：BABCOCK HITACHI KK
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