Michaelquirk半导体制造技术附录图解读

Figure A.1
Definitions of Exposure Limits
(Refer to p. 602 for details) • TLV-TWA: Threshold limit values – time weighted average. • TLV-STEL: Threshold limit values – short term exposure limit. • IDLH: Immediately dangerous to life and health.
Carcinogen
Corrosive
Do not breathe vapors and avoid contact with skin, eyes and clothing. Use suitable protective equipment. Do not allow contact with skin, eyes, or clothing. Considered dangerous chemicals. There are serious hazards associated with these chemicals. Avoid shock (dropping), friction, sparks and heat. Isolate from other chemicals that are hazardous when spilled. Keep chemicals away from heat, sparks, flames and other sources of ignition.
Examples of Hazards in Semiconductor Manufacturing
• Process chemicals • Highly flammable gases • Solvents • Mechanical hazards
• Pyrophoric gases
• Corrosive gases
Flammable: Any liquid or gas that is capable of igniting into fire. Pyrophoric: Any material that ignites spontaneously in air below 55C (130F). An example is silane.
• Wear the appropriate glove type for the job. Chemicals absorbed through the pores of the skin can enter the body and cause damage to vital organs.
• Use full face shield when pouring or mixing chemicals.
3 2
Blue
Health Hazard 0 Normal, no hazard 1 Slight hazard 2 Hazardous 3 Extremely hazardous 4 Deadly
W
White
3
Yellow
Specific Hazard OXY Oxidizer ACI Acid ALK Alkali COR Corrosive W Use no water Radiation hazard
Common Information in MSDS
• Chemical name • Date prepared • Physical/Chemical characteristics • Fire/Explosion data • Reactivity hazard data • Health hazard dta
• PEL & TLV
• Health effects
Common Terms Used in an MSDS
Terminology
Avoid Contact
Definition
General rule for all chemicals, even if they are considered nonhazardous. Substances that are suspected or known to cause cancer. Some may have threshold limits of exposure. Multiple exposure to suspected carcinogenic materials for even a low dose may be worse than a single massive exposure. Living tissue as well as equipment is destroyed on contact with these chemicals. A notation on the MSDS for substances that can be absorbed sufficiently through the skin as to cause toxic effects. Substances that can have serious harmful effects. Substances known to explode under some conditions. Substances that give off vapors that can readily ignite under usual working conditions.
How Chemicals Enter the Body
2. Ingestion (swallowing).
• Certain toxic chemicals can be fatal when even a minute amount in ingested.
• Never bring food or drink into areas where chemicals are being used. It is good practice to wash hands with soap and water when leaving the workplace.
Semiconductor Manufacturing Technology
Michael Quirk & Julian Serda © October 2001 by Prentice Hall Appendix A
Chemicals and Safety
Definitions of Safety Terms
• High temperatures
• Radiation
– UV – Laser – X-ray
• Toxic or caustic liquids
• High voltages
• Freezing temperatures
Hazard Warning Sign
Fire Hazard 0 Nonflammable 1 Above 200º F 2 Below 200º F 3 Below 100º F 4 Below 73º F Red Reactivity 0 Stable, nonreactive 1 Unstable if heated 2 Violently reactive 3 May detonate with heat or shock 4 May detonate
• PEL: Permissible exposure limit.
How Chemicals Enter the Body
1. Contact with skin or eyes.
• Wear safety glasses and no contact lens. • Use goggles to protect normal eyewear.
Hazardous: Toxic: Any chemical or substance that has adverse effects on the health or safety of people. Any chemical or substance that seriously damages biological tissue. Examples are phosphine and arsine.
Skin
Danger
Explosive Flammable or Combustible
Table A.1
Common Terms Used in an MSDS
Terminology
Irritant
Definition
Substances that have an irritant effect on skin, eyes, etc. Substances that have an irritant or burning effect on skin, eyes or respiratory tract. These are dangerous in very small quantities. Chemical or physical agents that cause genetic alterations. Substances that form peroxides or hydroperoxides upon standing or when in contact in air. Substances that have very serious and often irreversible effects on the body. These substances are hazardous when breathed, swallowed, or in contact with the skin. Substances that have or generate odors. Substances that cause the production of physical defects in a developing fetus or embryo. Substances that are hazardous to health when breathed, swallowed, or are in contact with the skin. There is danger of serious damage to health by short or prolonged exposure.
How Chemicals Enter thБайду номын сангаас Body
3. Inhalation.
• Breathing toxic gases may result in burns or damage to lung tissue and can pass into the bloodstream, damaging other organs. • The workplace must be well-ventilated. If unusual odors are detected, notify someone in charge and leave the area. Sound an alarm if appropriate.
Precautionary Action
Do not breathe vapors and avoid contact with skin, eyes and clothing for all chemicals. Exercise extreme care when handling. Do not breathe vapors and avoid all contact with skin, eyes and clothing by wearing suitable protective equipment.