微陀螺仪的设计与制造过程

微陀螺仪的设计与制造

学校：华中科技大学

专业：机械设计制造及其自动化

姓名：**

班级：1104班

学号：U*********

指导老师：

廖广兰

来五星

中文摘要

随着科学技术的发展以及科研技术的逐渐成熟。陀螺仪也逐渐进入了各个领域。现如今陀螺仪在航海导航、航天航空、研究动力学、兵器、汽车、生物医学、环境监控等方面有了广泛的应用。而各种陀螺仪也因其原理的不同而有不同的分类，诸如哥氏加速度效应微振动陀螺、流体陀螺、固体微陀螺、悬浮转子式微陀螺、微集成光学式陀螺以及原子陀螺。而其中随着MEMS技术的不断发展，以其为基础的微陀螺因尺寸小、精度高、重量轻、易于数字化、智能化而越来越受到大家青睐。其在汽车导航、消费电子和移动应用等民用领域以及现代和可预见的未来高科技战场上拥有广阔的发展和市场前景。

文章首先对陀螺仪做了简单的原理和功能介绍，阐述了当前微陀螺仪是非常具有前景的研究防线，并简单介绍了几种常见的微陀螺仪，然后对微陀螺仪的结构进行了简单的分析并且分析了微机械陀螺仪的设计及制造过程和工艺方法并对其中的技术难点进行了分析，也对加工陀螺仪必须的MEMS工艺进行了概述，然后对微陀螺仪的前景及应用进行了进一步的探讨。

关键词：

微机械陀螺仪，MEMS工艺，制作过程，关键技术

Abstract

With the development of science and technology as well as scientific research and technology matures.Gyroscope is gradually coming into the fields.Now gyroscope has broad application in marine navigation, aerospace, research dynamics, weapons, cars, bio-medicine, environmental monitoring, etc.And also because of the various gyroscope different principles and have different classifications, such as the Coriolis acceleration effect of micro-vibration gyro, gyro fluid, solid

micro-gyroscope, suspended gyroscope rotor micro, micro-gyroscope integrated optical and atomic gyroscope. With the continuous development of which MEMS technology, with its micro-gyroscope-based due to the small size, high precision, light weight, easy-to-digital, intelligent and increasingly being favored. It has a broad development and market prospects in the car navigation, consumer electronics and mobile applications and other civilian areas as well as modern and high-tech battlefield for the foreseeable future.

The article first gyroscope do a simple principle and function description, describes the current micro-gyroscope is a very promising line of research, and a brief introduction to some common micro-gyroscope, then the structure of the micro-gyroscope simple analysis and analysis of the micromachined gyroscope design and manufacturing process and process methods and technical difficulties which were analyzed, but also on the processing of MEMS gyroscope must be an overview of the process, then the prospects for and application of micro-gyroscopes were further discussion.

Keywords：

Micromechanical gyroscopes, MEMS technology, production process, key technologies

目录

1 微机械陀螺仪研究背景 (1)

1.1 概念简介 (1)

1.2 MEMS陀螺仪研究历史及发展现状 (1)

1.3 研究目的 (1)

1.4 研究方法 (2)

2 微机械陀螺仪原理与结构 (5)

2.1 MEMS陀螺仪基本原理 (5)

2.2 MEMS陀螺仪分类及结构 (6)

3 微机械陀螺仪设计及制造 (6)

3.1 MEMS陀螺仪设计流程 (6)

3.2 MEMS陀螺仪工艺方法 (7)

3.3 MEMS陀螺仪技术难点 (8)

4 微机械陀螺仪测试及应用 (8)

4.1 MEMS陀螺仪测试内容及手段 (8)

4.2 MEMS陀螺仪应用 (10)