32×32甚长波红外HgCdTe焦平面器件

收稿日期：2016-09-05；修订日期：2016-10-12

基金项目：重点实验室基金(9140C1030302150C03011)；广州市珠江科技新星专项(2014J2200086)；国家自然科学基金(61204116)作者简介：郝立超(1986-)，男，博士，主要从事读出电路设计及其焦平面可靠性方面的研究。Email:hao li chao@https://www.360docs.net/doc/1e17017182.html, 通讯作者：黄爱波(1984-)，男，工程师，主要从事红外焦平面设计、测试及筛选等方面的研究。Email:hab-888@https://www.360docs.net/doc/1e17017182.html, 0504001-132×32very long wave infrared HgCdTe FPAs

Hao Lichao 1,2,Huang Aibo 2,Xie Xiaohui 2,Li Hui 2,Lai Canxiong 1,Chen Honglei 2,

Wei Yanfeng 2,Ding Ruijun 2

(https://www.360docs.net/doc/1e17017182.html,boratory of Science and Technology on Reliability Physics and Application of Electronic Component,The Fifth Research

Institute of Ministry of Industry and Information Technology,Guangzhou 510610,China;

2.Key Laboratory of Infrared Imaging Materials and Detectors,Shanghai Institute of Technical Physics,Chinese Academy

of Sciences,Shanghai 200083,China)

Abstract:Very long wave infrared (VLWIR)band is widely used for the remote atmosphere sounding applications,particularly for humidity,CO 2levels,cloud structure and temperature distribution.A 32×32VLWIR HgCdTe focal plane array (FPA)was designed.The photosensitive component was fabricated by B+ion implanting As-doped p-type material of liquid phase epitaxial growth on ZnCdTe substrate.The readout integrated circuit (ROIC)used a buffered direct injection (BDI)structure with an improved background suppression.The VLWIR focal plane array (FPA)was achieved by combining the HgCdTe detector with ROIC in terms of indium bump bonds,the cutoff wavelength of which was over 14μm.The pixel occupied an area of 60μm ×60μm.It could be operated at the temperatures of 50K.The test results show that the peak detectivity and blackbody responsivity of PFAs are 2.57×1010cmHz 1/2/W and

1.35×107V/W,respectively.The nonuniformity of responsivity is about 45%,and dead pixels ratio is less than 12%.

Key words:HgCdTe;

VLW;IRFPA;ROIC;background suppression CLC number:TN215Document code:A

DOI ：10.3788/IRLA201746.050400132×32甚长波红外HgCdTe 焦平面器件

郝立超1,2，黄爱波2，解晓辉2，李辉2，赖灿雄1，陈洪雷2，魏彦锋2，丁瑞军2

(1.工业和信息化部电子第五研究所电子元器件可靠性物理及其应用技术重点实验室，

广东广州510610；2.中国科学院上海技术物理研究所红外材料与器件重点实验室，上海200083)摘要：甚长波红外波段富含大气湿度、CO 2

含量及云层结构和温度轮廓等大量信息，是大气遥感的重要组成部分。设计了一种32×32甚长波红外焦平面阵列，采用在ZnCdTe 衬底上液相外延生长的As 掺杂p 型材料上进行B+离子注入形成光敏元，通过铟柱倒焊技术和带有改进型背景抑制结构的读出电路互联，制成截止波长达到14μm 的焦平面器件。该红外焦平面器件像元面积为60μm ×60μm ，工作温度在50K 温度下。测试结果显示：读出电路性能良好，焦平面黑体响应率达到1.35×107V/W ，峰值探测率为2.57×1010cmHz 1/2/W ，响应率非均匀性约为45%，盲元率小于12%。关键词：碲镉汞；甚长波；红外焦平面；读出电路；背景抑制

第46卷第5期

红外与激光工程2017年5月Vol.46No.5Infrared and Laser Engineering May 2017

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