高纯气体隔膜阀
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Low Pressure Diaphragm Valve Low Pressure Manual Diaphragm Valve NEW STD TYPE
Features
■Reduced inner capacity.
■Electropolished, D.I. water cleaned, assembled, tested and packaged in a
certified clean room.
■Minimal contributions of Moisture, Oxygen and Hydrocarbon.
■Permanently heat code laser marked; material traceable to original mill
certificate of test.
■Hastelloy® C-22TM and custom configurations available upon request.
Size1/4″3/8″, 1/2″3/4″
Cv Value0.30.70.7
Orifice Size 4.5mm7.8mm7.8mm Max. Working Pressure (G.)1MPa
Max. Working Temp.PCTFE : -10℃~ 80℃/ PI,PFA : -10℃~ 150℃Internal Leakage Allowance (He)
1x10-10Pa · ㎥/s
Test Pressure ≤ 1×10-2 Torr
Holding Time ≥ 30 sec.
External Leakage Allowance (He)
1x10-10Pa · ㎥/s
Test Pressure ≤ 1×10-2 Torr
Holding Time ≥ 1 min.
Particle Inspection (EP only)
No count
Pressure : 60~80psi N2 Gas
Sample Volume : 1CFM
0.1㎛ and Larger
Major Specifications
Product Grade
GRADE AP BA EP
Inner
Surface
Roughness
Ry ≤ 25㎛
Cut off Length : 2.5mm
Measuring Length : 12.5mm
Ry ≤ 3.0㎛
10 μinch Ra(Avg.)
Cut off Length : 0.8mm
Measuring Length : 4mm
Ry ≤ 0.7㎛
5 μinch Ra(Avg.)
Cut off Length : 0.25mm
Measuring Length : 1.25mm Polishing Machining Finish Machining Finish Electro Polishing Finish
Low Pressure Diaphragm Valve
Low Pressure Diaphragm Valve Low Pressure Pneumatic Diaphragm Valve STD TYPE
Features
■ Reduced inner capacity.
■ Electropolished, D.I. water cleaned, assembled, tested and packaged in
a certified clean room.
■ Minimal contributions of Moisture, Oxygen and Hydrocarbon.
■ Permanently heat code laser marked; material traceable to original mill
certificate of test.
■Hastelloy® C-22TM and custom configurations available upon request.
Size1/4″3/8″, 1/2″3/4″
Cv Value0.30.70.7
Orifice Size 4.5mm7.8mm7.8mm Max. Working Pressure (G.)1MPa
Operating Pressure (G.)0.4~0.7MPa
Max. Working Temp.PCTFE : -10℃~ 65℃/ PFA : -10℃~ 120℃ / PI : -10℃~ 150℃Internal Leakage Allowance (He)
1x10-10Pa · ㎥/s
Test Pressure ≤ 1×10-2 Torr
Holding Time ≥ 15 sec.
External Leakage Allowance (He)
1x10-10Pa · ㎥/s
Test Pressure ≤ 1×10-2 Torr
Holding Time ≥ 1 min.
Particle Inspection (EP only)
No count
Pressure : 60~80psi N2 Gas
Sample Volume : 1CFM
0.1㎛ and Larger
Major Specifications
Product Grade
GRADE AP BA EP
Inner
Surface
Roughness
Ry ≤ 25㎛
Cut off Length : 2.5mm
Measuring Length : 12.5mm
Ry ≤ 3.0㎛
10 μinch Ra(Avg.)
Cut off Length : 0.8mm
Measuring Length : 4mm
Ry ≤ 0.7㎛
5 μinch Ra(Avg.)
Cut off Length : 0.25mm
Measuring Length : 1.25mm Polishing Machining Finish Machining Finish Electro Polishing Finish