ITO的回收再生及新型透明导电膜材料的近况发展

2,800 2007 11% 200 IMD 186 1.68 Sony Sharp TFT 2008 3.5 2007 103 2008
TFT-LCD
Array
207
2.
12 (LTPS) 640×480 5 Sony Mobil Display Player Video Camera
PDA
UMPC 360
(P-3m1)
Mg(OH)2-C (OH)2 C C X Mg(OH)2
Mg
1.0E-03
Resistivity (ohm·cm)
ρ30nm = 4.4×10-4Ωcm
(a)
Mg(OH)2-C
Ga: 4 wt.%
10-1Ωcm 400nm
ITO Network 83% 330°C 100°C
10-4Ωcm 650nm Mg MgO
3.
(ZnO)
Zn ITO ZnO 150°C 8×10 cm
20 2 -3
Ion-plating GZO Ga 2×10-4Ωcm (Hole) 90% 170nm/min (a) 2×10 Ωcm
-4
4 wt% (Mobility) GZO
In Hf 500°C ZnO Ga2O3 Tosoh ZnO ITO ZnO
15~19
/Tablet PC
PC 7.8cm WVGA Digital 19 31 2900 2007 7 8.4 PC 40% 22 8000 2007 Microsoft OS Windows Vista 3~4 (LG Electronics) 2008 (Nokia) Electronics) (HP) (Dell) PC DS 2007 (Samsung (Sony Ericsson) PC (Motorola) (Nissha Printing Co.) TFT (a-Si) TFT 7 1.8mm 17.7cm 480x800 (LTPS) 3.1
Indium Prices-Metal Bulletin ($US)
1,250
Suppy/Demand mt
Avg. Price
1,000 800 600
1,000 750 500 250 Supply Demand
Uses
928 1114 1281 210 -12 49 245 -39 10 274 -43 -33
85~91%
92%
92%
90%
DC ITO
DC
Nissha, PED, Gunze, Fujitsu, Young Fast, J Touch IEK (2007)
3M Touch System
ELO, Fujitsu
eIT, IRTouch
WACOM
95% ATM NB iPhone 50~250
201
New Applications and Development of Touch Panel and Transparent Conductive Film Materials
S. C. Liu1 C. H. Chang2
(Editing Group)1 (MCL/ITRI)
2
2007 Notebook
-4
2 (In2O3) ITO 80~90% Virgin 2005
30 Cycle Time
2008 15
(SnO2)
ITO 2006 500 ppm 50 ppm FPD
(Reclaim)
CIGS 2007
2002~2003 2005 900 750 ITO 30% 70% ITO / 90% / 70%
iPhone Multi-touch 2007 1 2007 1290 4 3310 10 20% 2012 4 Component Film ITO ITO Film PET
Upstream
Materials Components ITO Glass
Glass Substrate
PET Film
ITO Target
Touch Window
(b) Display
1. (All-in-One)
(Cover)
(a) Nissha Printing Co.
(c)
Epson Imaging Device
2007
10
(a) (c) Nissha Touch Window
(b)
Industrial Materials Magazine
1.
2002 2007 UMPC 2 ITO 4 PDA GPS 4 5 6 8 1000 4
Industrial Materials Magazine
204
Apple Web iPhone (Projected) PDA MP3
4
(a)
iPod Motorola (c) iPhone 2.4~3.2 LG PRADA 2007 Prada ITO ROKR E6
DS
4.
/ Automation; FA)
POS
(Factory
2006 DS 11
7 1000 2007 DS 6500 2050 5
2150 2300 70
3.
/
/
FA
OK
DS Lite
Industrial Materials Magazine
百度文库
206
(Matrix) (All-in-One)
5.
Al
Al
3+
Zn ZnO Al
2+
(%, at 550nm) (R/Ro; 90°C, 1000H) (R/Ro; 60°C, 95%RH, 1000H)
Al
3+
(Scattering Center) Al (Sputtering) 2~3 wt%
AZO IZO OLED GZO Ga IZO 5 Process Merit ITO Al Zn2+ Ga3+ Ga3+ Zn2+ Al Process Window AZO
Al Al
B
Ga
Ti ZnO
Zr
27cm /Vsec GZO
(Al2O3) AZO (ZnO:Al2O3) GZO(ZnO:Ga2O3)
200 nm 100 nm (b) FE-SEM TEM c15~25 nm GZO
International 2007 (190µΩcm) FPD
GZO
Industrial Materials Magazine
ρ560nm = 1.8×10-4Ωcm
I 1.0E-04 0
II 100 200 300 400 500 Film Thickness (nm) c-axis 600
90% (OH)2 H2O
(b)
GZO
GZO Glass Substrate Polycrystalline Columnar Structure Lateral Grian Size ~15-25nm / High Level of Orientation along the c-axis
1. ITO
Sharp 3.5
Color Filter LC
Opening
Black Matrix
Photo TFT
Readout TFT
TFT Array
Industrial Materials Magazine
208
(Shutter) 60~65%
ITO Cycle Time
(Patterning) ITO 3~10 wt% ~10 Ωcm
2. IZO
IZO (Indium Zinc Oxide) 7-10 wt% ZnO ISEM (Idemitsu) IZO TFT OLED TFT IZO In2O3
Umicore Indium Products Alfa Aesar Belmont Metals Inc. MCP Metalspecialities Inc. Mining&Chemical Products Omodeo A&S Metalleghe S.r.l. Whitmetaal BV. Korea Zinc
(a)
X C
211
1. Mg(OH)2-C
Mg-C RF Sputtering 2007 10 Mg-C Couple Mg(OH)2 15
Mg
Mg(OH)2-C Mg(OH)2 Network
3.5µm Mg(OH)2
(b)
(Hexagonal Structure) Mg(OH)2-C c
RF Magnetron Sputtering (0.5Pa) Mg80-C20
400 200
0 0 19941995 19961997 19981999 20002001 20022003 20042005 2006 2007 Indium Corporation
*Annual Net = Sources and Uses Balance for that Year **Cumulative = Annual Net Plus Prior Year-end Balance Indium Corporation
ITO Film
3M
Glue TAB Material
Controller IC
Midstream
Panels Modules
LCD Panel Makers
Touch Panel Makers System Integrators
Downstream
End-Products
Consumer Products PDA, PDAphone iPhone, iPod, PMP ... IEK (2007)
LTPS TFT (Mobility) (a-Si)TFT LTPS (Aspect Ratio)
Film
TFT SOG) Sharp 2007 8 9 2008 (TMD) LTPS 2.8
(System on Glass; WQVGA
3.5 VGA
1mm
320×480 Half-
(400×240)
Automotive Products Car Display PND/GPS ...
IT Products UMPC Tablet ...
Industrial Applications Kiosk ATM Industrial
Industrial Materials Magazine
203
/
85%
Metal
/
Industrial Materials Magazine
210
(Ω/ ) (Å) (Ω/cm)
IZO
IZO®/Glass 22 1,400 3×10-4 86 1.0 1.0 (Idemitsu Co.) IZO®/PET 10 4,000 4×10-4 77 1.0 1.0
ITO
AZO AZO AZO
8
1000
2012 1000
(IEK)
58% IEK
12% 2007
Industrial Materials Magazine
202
50% 7
4 (CMC) Technology) 4
4
8000 (Transtouch 2.
2010 IT 35 Single-touch 2010 5 10 25% 8
Apple PDA
iPhone MP3 GPS POS
KIOSK
ATM ITO
(In)
ITO
2012 iSuppli Japan 7 2006 2012 2006 10 6 1.8 8000 9000 24 2000 44 2011 2012 1.6 30% 14% 60% 2007 1.8 6
2.7 GPS
(In)
Industrial Materials Magazine
209
10%
ITO 1g
15
Sharp
2006
1
DOWA Metal Mine
Asahipretec
2005 Rare Metal 2~3 11 150 2007 30 50 2005 19 11 12
Teck Cominco Xstrata plc IBFalconbridge) ( Umicore S.A. The Chelyabinsk Zinc Works PPM Pure Metals GmbH Fremat GmbH&Co. Indium Corp. Xstrata
12 mm Phone 3 (b)
2.
/GPS/
1
2
(a)
(b)
(c)
(a) Apple
iPhone
(b) LG
Prada Phone
(c) Motorola
ROKR E6
Industrial Materials Magazine
205
GPS GPS 7
(Nintendo)
DS (Dual Screen) 2
200
2009
2006 50% 70% ITO
(Shielding)
Indium (Metric Tons) 2005 2006 2007 2008 2009 Sources Virgin 429 Reclaim 357 FPD 595 Other 181 Annual Net* Cumulative** 10 23 497 503 774 188 38 61 476 650 518 802 551 961