半导体制造流程与IC产业链简介

POLY
LDD
TiSi2
Poly
Gate Oxide
Spacer
Source
Channel Length
Drain
UMC.Fab8B. Generic 0.25um logic Ti-Salicide Process
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3. How’s the transistor working ?
Transistor Working
2. What’s the Transistor structure ?
3. How’s the transistor working ?
3.1 How’s the clock running in the transistor ring? 3.2 How’s the information broadcasting in a system ?
Vcc
On Off
PMOS
State 0 1 State
Input
State 1 0 State
Output NMOS
Off On
NOT Gate GND
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3.2 How’s the information broadcasting in a system ?
Generally, there’s a few people could understood the information broadcasting in a chip, especially on the system debug, the product engineer hard to detect the defect in system level. The liquid-nitrogen-cooled infrared Camera could detect the hot spot emission which generated by the electron-hole pair combination. The defect could be detected once the signal flow to the defect node, the system will be hold and hot spot frozen on the defect node.
Introduction on Fab flow and semiconductor industry
-- for IT related employee
Morris L. Yeh
Outline
1. Fab flow and Transistor working 2. IC manufacturing chain
3. Drain Bias again ( Gate floating, Capacitor Recharge ) : The charge storage again.
Drain Bias (charge) Gate Bias (discharge) Drain Bias (recharge)
Level (V)
Mask & DUV Stepper Exposure
PHOTO
ETCH
Photo Resist Development
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Etching (Wet/Dry)
In the Digital application, the transistor behaviors more likes a Capacitor : 1. Drain Bias ( Capacitor Charge ) : The charge storage on the Drain side. 2. Gate Bias ( Capacitor Discharge ) : The storage charge flow from Drain to Source
Fab Process flow
l l l l l Lithography concept Device operation Front-end process Backend process Integration
. .
Design : l CAD for Design support l CAD for synthesis l CAD for layout l IP management l Simulation Fab and Backend : l MES related, SCM related, ERP related, CRM related l Process simualtion, Device simulation, Metrology and characteristics management, Yield Management, Testing capability l Universal Automation l Inter/Intra.net comunication
Level (V)
=
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Times
Times
Level (V)
Times
State 1
State 0
State 1
Voltage on the Drain terminal (output)
3.1 How’s the clock running in the transistor ring?
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4.1 The Transistor revolution
The First Transistor
1947 Bell labs.
The UMC 0.25um Transistor
1999, UMC
The worldwide leadship
2001 Bell labs. Lucent
TiSi2
IT role play Field Application
volatile Memory : SRAM, DRAM non-volatile Memory :
mROM,EPROM, E2PROM, Flash, SmartCard... ASIC : Logic, m-Controller, MPU, CPU, ChipSet, STB, Graphic, consumer, LCD module, mDisplay, CIS, ... Mix-signal : RF Rx/Tx, Cellular, BlueTooth, wireless, GPS...
Backend Flow
l l l l l l Wafer sorting (C/P test) back gride / Die saw wire bond / bumping Assembly Final test burn-in
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1.1 Transistor Working 1. What’s the Transistor ?
3. Filed application
4. The Trend
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The Roadmap
Design Flow
l l l l l Market positioning System design System synthesis System simulation Layout / mask tooling
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Lithography concept - physical cycle
ThinFilm-PHOTO-ETCH Physical layer formation cycle
Thin Film PHOTO
Fab Flow
Raw material
Film Deposition
Photo Resist Coating
FIG. 2. The UMC post generation 0.25um standard transistor ( UMC )
FIG. 3. The worldwide smallest transistor Gate length 0.061 um. (Bell Labs, Lucent)
wk.baidu.comPage 10
State 1
State 0
But we deployed the Solid-State and Quantum physics to realize the solid-state switch - Transistor in silicon industry, it’s more size shrinkage, high speed, high performance and lower energy required than the prior arts.
Device Integration and Technology drive
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1.2 Fab flow
1. Lithography concept and cycle 2. Module definition 3. Module composition and integration 4. Transistor Layer (Front-end) definition 5. Routing Layer (Back-end) definition
4. Transistor and System revolution
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1. What’s the Transistor ?
Transistor Working
In Digital application, the transistor play the role of switch in the system just like a mechanical switch , it means that the key component to storage the 0 and 1
Poly
Spacer
Gate Oxide Channel Length
Source
Drain
FIG. 1. The first transistor. Brattain and Bardeen's pnp point-contact germanium transistor operated as a speech amplifier with a power gain of 18 on December 23, 1947. (Bell Labs, Lucent)
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State 1
State 0
2. What’s the Transistor structure ?
Transistor Working
The transistor included 3 terminal which likes the switch : 1. Poly Gate play the role of control or input terminal, the Drain play the role of output terminal and the Source play the role of reference or ground.
The video shown the 49 stages NOT gate series which constructed the ring oscillator, In the left NOT gate diagram, if the input terminal become state 0, the PMOS was turn ON, and NMOS turned off, it means that the Vcc flow into Output terminal, the Output state become 1, and according quantum physics, the current flow the channel means that electron-hole pair recombination, and the light emission will be detected by the cooled infrared camera. The Ring Oscillator was the tool to measure the system clock and speed.