垂直式甩干机

Advanced Spin System Inc.

SV-702、802 /M1/M2、300 (M1 only) SPIN RINSE DRYER

SV-702、802、300皆採垂直式放置晶圓，並搭載單一晶舟Array設計。可乾燥於12英吋以下晶圓；適用於生產條件要求較高

之廠商，如二極體、光電、積體電路元件及晶圓級封裝等產業。

其為金屬本體架構、聚丙稀外殼；金屬部分皆採不銹鋼材質，

並經電解拋光處理。承載晶舟之轉子皆依客戶提供使用的晶舟

及基板材質設計，並經動力平衡校正，以確保穩定性；且其小

型化的設計，所佔的面積相對縮小，可更加有效的運用於晶圓

等級之無塵室生產。

SV-702、802、300 其使用特殊的密封設計及架構設計，使

其潔淨度達到最高要求；其微塵產生率嚴格控制在每一運轉產

生於8”晶片面積0.2µm的微粒控制範圍，製程條件可設定

One-Rinse、Three-Dry (Dry 1 & Dry 2 & Dry 3)，時間為0~9999

sec。馬達轉速最高強制控制於SV-7/802 2,000~2,800 rpm；

SV-300: 1,600~2,000 rpm的精確控制；在Rinse過程中，會先

噴灑DI Water至反應槽內，以確保乾燥前阻抗值或清洗晶圓

殘酸；之後為Dry 1 過程，利用高速旋轉高離心力方式去除水份，

於Dry 2時，使用低轉速，利用噴入反應槽之熱氮氣(50~60)

℃及

桶壁加熱，使晶圓烘乾；Dry 3 屬因應客戶增加步驟選擇，並透過時間及轉數等參數設定，可避免晶圓發生Water Mark現象。

SV-702、802、300提供新一代晶圓級材料及製程使用設計，軟體設計具有可擴編的I/O預留，Auto-Run

製程參數及Recycle設定，較薄晶片旋乾程式選擇，故障及錯誤碼記錄備檔，蜂鳴警報器警示選擇,Dry1~3 Function 選擇加熱器啟動等功能選擇，硬體設計具有N2壓力偵測器、加熱器保護開關、門關安全保護以及

馬達轉速偵測等檢知器，以確保機台安全性及穩定性。機台另外附加(Option) Anti-Static，及Resistivity 裝置

，加強機台功能。其特殊之加熱方式及靜電消除設計，使機台徹底改善因正離子及氧化而造成Particle 增加

產生率。控制器部分採模組化設計，不論在使用操作或維護保養上，皆相當便利；控制方式均採用觸控式人

機介面、易整合擴充之PLC可程式控制器，並可依客戶使用要求選擇。其配置方式可分為Bench Top (SV-702、802、300)，Single Chamber (SV-702、802、300-M1)，Double Chamber (SV-702、802-M2)，可依客戶放置

需求作多樣搭配；另外可依實際需要作尺寸設計。SV-702、802、300 其高性能及高潔淨度設計，搭配人性化

考量，加上可客制化提供高經濟性，相信其必定為客戶最佳之選擇。

Mission Statement

♦Advanced Spin System Inc. strives to be a leading designer

and manufacturing of SRD (Spin, Rinse, & Dryer) systems.

♦ The best provider and services of second hand etch

systems use in development and production of semiconductor

devices.

Company Background

Company was founded in April 2001 and by May 2001 Tran

Semiconductor System Inc. was able to deliver the first SRD

system to our customer. And company was technical change

to ASSi at 2005 and by As today ASSi is recognized as the

leading manufacturing of SRD systems for Asia Pacific market.

Since its inception, ASSi is consisted of the team of expert in

development and design SRD systems.

For supporting customer ASSi has a highly trained and

experienced technical and support staffs provide on-going

training, service and support at the corporate facility and

installation and on-site training at customer’s facility.

Since March 2002 ASSi also started to provide the used

etching

equipment to our customers including installation and after

sale support. ASSi staffs have combined of more than 20 years

of experience in Etch systems both designs and service.

Advanced Spin System Inc. is located in Jubei, Hsinchu Hsien,

Taiwan with over 300 pin office and manufacturing area, and

a branch office in Shanghai.

ASSi has the best service team and proud tradition of Customer Service and dedication towards growth with the same high standards that were necessary for our success in the past.