Silicon micromachined accelerometerseismometer an
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专利名称：Silicon micromachined
accelerometer/seismometer and method of
making the same
发明人：Richard D. Martin,W. Thomas Pike
申请号：US09072793
申请日：19980505
公开号：US06196067B1
公开日：
20010306
专利内容由知识产权出版社提供
专利附图：
摘要：A silicon-based microaccelerometer for seismic application is provided using a low-resonant frequency (10 Hz), large proof mass (1 gram), and high Q suspension to
achieve high sensitivity of less than 1 ng with a bandwidth a 0.05 to 50 Hz. The proof mass is cut away from a planar substrate in the form of a disk using abrasive cutting, which disk closely fits but does not touch a surrounding angular frame. The spring of the microaccelerometer between the angular frame and the proof mass is provided from two continuous, 3 microns thick membranes. The fixed capacitive electrodes are provided on separate, subsequently bonded substrates, and movable capacitive plates are provided on the membranes. By fabricating capacitive plates on the separate substrates, the gap between the fixed and movable capacitive plates in the differential capacitive sensor is closely controlled. The use of continuous membranes for the spring produces a shock resistant, robust sensor.
申请人：CALIFORNIA INSTITUTE OF TECHNOLOGY
代理人：Daniel L. Dawes
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