nEXT300D涡轮分子泵
Edwards nEXT涡流式瓶颈泵产品说明书
nEXT TURBOMOLECULAR PUMPSINNOVATION AND RELIABILITYEdwards nEXT is the ultimate experience in turbomolecular pumps. nEXT turbomolecular pumps are built on decades of experience and are drawing from our tried and trusted EXT and STP ranges. nEXT pumps offer superior performance, reliability and end user serviceability, setting the benchmark for scientific turbomolecular pumps.nEXT has been designed to combine all the latest technological advances in turbomolecular pumps with some new thinking in design for manufacture, delivering a truly class leading product.The nEXT platform brings a high level of modularity to offer maximum flexibility for customer application and requirements. Each pump is available in different internal configurations to offer differing functionality and performance.Our nEXT pumps come in different variants "D" Duplex comes with both turbomolecular and drag stages for improved tolerance to higher backing line pressures. The “D” variants offer superior pumping speed and compression across all gas species. Triplex “T” variants feature turbomolecular, drag and Edwards unique regenerative pumping stages for the ultimate in compression ratio and boost technology for unique vacuum system rationalisation.The "H" variant has been physically tuned to offer an improvement where an application has focus on light gas compression.Exceptional pumping speeds and compression ratios Huge install base of turbo pumps Bespoke design service available Integrated intelligent controls Fully end user serviceable Enhanced customer choiceADVANCED TECHNOLOGY Superior performance Proven reliability for peace of mind Flexible solutionsEase of useExtended lifetime and low cost of ownershipLarge variety of standard variantsApplicationsResearch & DevelopmentChamber evacuation, coating systems, turbomolecular pump systemsHigh Energy PhysicsBeam lines, accelerators, mobile pump carts, turbomolecular pump backing, laser evacuation, medical systemsMass SpectrometryGCMS, LCMS, ICPMS, MALDI, inorganic MS, RGA, surface science, leak detectorsElectron MicroscopyTEM, SEM, EPMA, SPM sample prep benchesIndustrialGlove boxes, coating systems, XRD/XRF systems, leak testing, energy, furnaces, medical technologiesYou can be assured Edwards has the application expertise and vacuum solution to meet your needs.Inlet flange sizesnEXT55D x*x x x*nEXT85D nEXT85H x x x xnEXT240D nEXT240T x xnEXT300D nEXT300T x xnEXT400D nEXT400T x xnEXT730D x x x xnEXT930D x xnEXT1230H x x x *Available by special orderPERFORMANCE YOU CAN RELY ONFor higher compression ratios and greater backing pressure toleranceEnables wider operating envelope (nEXT55-nEXT85)Enables boost port options and higher compression (nEXT240, 300, 400)Minimises noise and vibration transmitted to vacuum (nEXT240, 300, 400)For a speedy interim service and bearing cartridge for a quick low cost scheduled overhaul (nEXT55-400)For safe operation of pump with specialised gasesFor a hydrocarbon free vacuum, reduced vibration and minimum wear Derived rotor design to give better speed and compression performanceWith automatic valve accessories for rapid venting and quick cycle timesFor flexible system tuningOr more sophisticated serial control in both RS232 and RS485 protocolsFrom 24V to 48V d.c. for versatility in system integration (nEXT730-1230 48V)For high efficiency and compactness with reduced stray magnetic fields1 - Multiple drag stages2 - Direct temperature measurements within the pump3 - Third regenerative stage4 - Patented bearing suspension system5 - User replaceable oil cartridge6 - Purge port7 - Permanent magnet upper bearing 8 - Advanced simulation tool9 - Manual vent port10 - Manual as well as serial setting of standby speed11 - Simple parallel operation12 - Automatic wide operating voltage range13 - Sensorless drivenEXT55 AND nEXT85The most compact pumps of the nEXT range with a significantly reduced height and improved performance in a smaller package.These pumps offer pumping speeds of 55 l/s and 85 l/s for nitrogen, they provide a high pumping density, greater than other pumps in its class, with almost double the pumping speed of similar sized turbo pumps.As with all the pumps in the nEXT range field maintenance is only required every 4 years of operation, and this including replacement of the bearing can be performed by the end user.nEXT55 and nEXT85 bring with them the benefits in flexibility with comprehensive communication and control options available, as well as a full set of accessories, the ideal choice in deployable instruments or portable applications where a compact footprint or lower weight are key factors.The rotor has been designed to optimise pump performance and achieve both higher speeds and higher compression while maintaining high levels of reliability and low risk to adoptors.nEXT240, nEXT300 & nEXT400The innovative pumps, designed to provide high vacuum performance in a compact size.Giving OEMs and end users a greater choice and theflexibility to tailor the most appropriate vacuum solution to meet their individual needs.- the D-Type combines turbo and drag stages;- the T-Type adds Edwards unique fluid dynamic stages and the option of additional booster ports for increased system rationalisation.See Boost technology custom interface splitflow variants are also available in three sizes for further vacuum system optimisation.The pumps feature a field replaceable oil cartridge and bearing assembly and the user is notified as to when service intervention is required.This enables easy maintenance as users can carry out servicing in-house, which reduces the cost of ownership.The efficient pumps have low power consumption and also feature a standby mode, which allow users to make further energy savings.nEXT240-300-400 pumps have extra low vibration and low magnetic field signature variants for sensitive electron microscope applications.The compact design means the pumps fit together neatly in high product density applications.They are easy to configure and have an intelligent control interface accepting a 24 to 48Vdc input power supply voltage range and can be controlled using a simple parallel control or serial communications in both RS232 or RS485 formats.A wide variety of sizesEach is available in two variantsField replaceable oil cartridge and bearing assembly Low power consumption and standby modeCompact designThe examples below shows how boost can be used to either reduce the size of the primarypump or increase the gas flow into the instrument on a differentially pumped system.It also illustrates how the number of turbo pumps required can be reduced from two discrete pumps to a single splitflow pump with two inlets to achieve the same vacuum performance.Customers in general laboratory and R&Dapplications will also benefit from the improved compression achieved with the "T" variant.To take maximum advantage of boost technology,please contact Edwards.Regenerative StageBOOST TECHNOLOGYA much simplified vacuum solution with greatly improved pumping speeds and system powerreductionOriginal SystemBoost Option 1Boost Option 2Screenshot taken from TransCalc HSMnEXT730, nEXT930 & nEXT1230Larger pumps offering nitrogen pumping speeds of 730, 925 and 1250 l/s respectively.As well as addressing the general R&D market, where high pumping speeds are often required, these pumps are also designed to meet the requirements of the coating market and other diffuse market sectors such as: - Heat treatment- Furnace applications- E-beam welding- Etch- Ion implant- Degassing- Cylinder evacuationFor our OEM customers, derivative versions of these products including split flow variants can be developed to match specific applications.These compact pumps are able to operate in any orientation, and are supported by a full range of accessories for cooling, venting, powering and control.When required, a bearing replacement can be undertaken by the customer themselves or they can take advantage of our other service support options.Designed to meet a wide range of requirementsWe match the specific applications of OEM Operate in any orientationThe pumps feature bearings with a typical life time of at least 4 years with no maintenance.At Edwards, it all starts with a vacuum expert gathering your application details!We want to understand what pressures you wish to achieve, what gas flows you have, how much space is available etc.Our expert then uses a number of in-house and publicly available modelling tools at his disposal to optimise your vacuum system. Developed by our Analytical Services group, these tools are used to model complete vacuum systems fromatmosphere down to ultra-high vacuum (UHV).This software has been developed to give rapid simulation of the behaviour of the proposedvacuum solution to ensure that it perfectly meets your requirements.Accurate computer modelling offers you the chance to streamline your development cycle,avoiding a costly iterative approach and delivering a quicker time to market. Please contact Edwards to take advantage of this service.A partnership approach to system designWhen an off the shelf pump will not meet your requirements for space or performance, our Bespoke Product Development (BPD) team will develop a customised vacuum solution to turn your requirement into reality.Automatically recognises and supports oneturbomolecular pump from the nEXT range, one backing pump (nXDS or diaphragm) plus three Edwards active gauges on top of that cooling and vent valve support is provided directly from the controller. Backing pump power is provided for a compact 24V diaphragm pump (on 200W versions only), or where greater pumping speeds are required, nXDS and large XDS pumps can be controlled directly via the backing pumpconnector on a TIC 200 mains backing pumps (up to RV12) may be controlled via an optional relay box.The relay box can also be used to control a mains heater band and backing line isolation valve. Time delays and normal speed signals may be used to control events such as turbo start and there is a comprehensive selection of protection and safety interlock features. The TIC turbo controller may be either rack or bench mounted and provides a useful hub for the flexible operation of a wide range of vacuum system configurations.TICTurbo and Instrument ControllerA small, compact, low cost pumping system controller, which is suitable for a wide range of vacuum applications. It is a 24V controller that is compatible with all Edwards nEXT turbomolecular pumps. In addition to a turbomolecular pump it can control a backing pump, a vent valve, an air cooler and an Edwards active gauge. The TAG is controlled by an easy to use interface. A large clear LED display shows the pump speed or vacuum pressure. The compact size of thecontroller is ideal for use on benchtops or suitable mobile platforms.TAGTurbo and Active GaugeAn oil lubrication cartridge change can beperformed where fitted, typically in less than 5minutes. A full bearing change can also beperformed by the end user in around 10 minutes on all nEXT pumps. Both with the minimum of specialist tooling. These simple interventions will,in many cases, mean that the pump never requires a full return to base service during its lifetime.nEXT turbomolecular pumps will advise the user when a service is due and what level of intervention is required.The user is alerted to a service request by a simple flashing LED sequence on the pumps and by serial comms notification.Flexibility is again key as these simple services can be performed either by the end user, on site by an Edwards field service technician, or the pump can be returned to an Edwards service hub.Using remote diagnostics, a user can interrogate the pump to determine how long it is to the next service so that a proactive approach to preventative maintenance can be planned.End user serviceabilityNew technologies employed in nEXT have enabled the pumps to be serviced by the enduser in the field.Should a fault occur as a result of a manufacturing defect, equipment is expressly repaired or replaced.Cover is available on many of our products allowing the original factory warranty to beextended from 12 months to 2 years and beyond.Prolonged peace of mindExtending the new equipment warranty gives you a simple opportunity to add peace of mind to your purchase of new equipmentEdwards has a number of major service facilities located throughout the world, each location is supported by an extensive team of engineers and technicians to provide local, rapid response and great value service.All our service operations are conducted at the highest international standards in accordance with ISO9001 (Quality), ISO14001 (Environmental), and OHSAS18001 (Workplace safety).Your global partnerWe understand the importance of local support.Inlet flange DN63 ISO-K or DN63 CF NW40DN63 ISO-K or DN63 CF DN100 ISO-KInlet pumping speed ls-1N255478486Ar55448084He41617880/78 (D/H) H22749/44 (D/H)60/54 (D/H)60/54 (D/H)Compression ratio (D)N2/Ar>1 x 1011He 6.9 x 1058 x 106 H2 2.9 x 104 2 x 105Compression ratio (T/H)N2/Ar NA>1 x 1011 He NA 2 x 107 H2NA 5 x 105Backing/interstage/boost ports NW16Vent/purge port1/8” BSPPCritical backing pressure (D/H)mbar18Critical backing pressure (T)mbar NABake out water cooled/forced air cooled max.°C120/115°Recommended backing pump*nXDS6iNormal rotational speed (rpm)90,000Start time to 90% speed (sec) D/H (T)90Mass (kg) D/H (T)ISO 2.47 2.9 3.0 3.2CF 3.5 4.4*A smaller backing pump may be used depending on application.nEXT55, nEXT85Inlet flange DN100 ISO-K or DN100 CF DN100 ISO-K or DN100 CF DN160 ISO-K or DN160 CFInlet pumping speed ls-1N2240300400 Ar230280380 He230340390 H2165280325Compression ratio (D)N2/Ar>1 x 1011>1 x 1011>1 x 1011 He 3 x 105 1 x 106 1 x 108 H2 1 x 104 5 x 104 5 x 105Compression ratio (T/H)N2/Ar>1 x 1011>1 x 1011>1 x 1011 He 1 x 106 3 x 106>1 x 108 H2 1.5 x 104 1 x 105 1 x 106Backing/interstage/boost ports NW25NW25NW25Vent/purge port1/8” BSPP1/8” BSPP1/8” BSPPCritical backing pressure (D/H)mbar9.59.510Critical backing pressure (T)mbar202020Bake out water cooled/forced air cooled max.°C120/115°120/115°120/115°Recommended backing pump*RV12/nXDS10i RV12/nXDS10i RV12/nXDS10i Normal rotational speed (rpm)60,00060,00060,000Start time to 90% speed (sec) D/H (T)115 (150)145 (190)180 (210)Mass (kg) D/H (T)ISO 5.7 (6) 5.7 (6) 6.5 (6.8)CF8.8 (9.1)8.5 (8.8)9.5 (9.8)* A smaller backing pump may be used depending on application.Inlet flange DN 160 ISO-K DN 160 CF DN 200 ISO-K DN 200 CF DN 200 CF DN 200 ISO-F DN 200 ISO-KInlet pumping speed ls-1N27309251250 Ar6658651150 He8209051350 H27157351150Gas throughput mbar ls-1N2141412 nEXT730, nEXT930, nEXT1230Gas throughput mbar ls-1Ar 3.5 3.54 He2121>20 H2>>14>>14>20Compression ratio N2>1 x 1011Ar>1 x 1011He 1.2 x 108 1.2 x 108 4 x 10+8 H2 4 x 106 4 x 106 1 x 10+7Ultimate pressure with 2-stage oil sealed rotary vane pump ISO-K/CF mbar<3.5 x 10-9<6 x 10-10<3.5 x 10-9<6 x 10-10<5 x 10-10<5 x 10-9 Backing/interstage/boost ports NW40Normal rotational speed rpm49 20049 20042 000Start time to 90% speed (sec) D/H (T)min 2.5 2.53Cooling water consumption l/h60Critical backing pressure mbar15Mass (kg) D/H (T)kg14.619.615.421.732.624.923.7 Recommended backing pump*nXRi, XDS35i, E2M28*Bake out water cooled/forced air cooled max.°C n/a100n/a100100n/a n/a Vent/purge port G1/8”*Please contact your local representative to discuss the correct option for your application.PumpsnEXT55D NW40 NW16 80W B8E210A01 nEXT55D CF63 NW16 80W B8E210C01 nEXT55D ISO63 NW16 80W B8E210B01 nEXT55D ISO100 NW16 80W B8E210101 nEXT85D ISO63 NW16 80W B8G210B01 nEXT85D CF63 NW16 80W B8G210C01 nEXT85D ISO100 NW16 80W B8G210101 nEXT85D NW40 NW16 80W B8G210A01 nEXT85D ISO100 NW25 80W B8G240101 nEXT85iD ISO63 NW16/16 80W B8G211B01 nEXT85iD ISO63 NW16/25 80W B8G214B01 nEXT85H ISO63 NW16 80W B8G410B01 nEXT85H CF63 NW16 80W B8G410C01 nEXT85H NW40 NW16 80W B8G410A01 nEXT85iH CF63 NW16/16 80W B8G411C01 nEXT85H ISO100 NW16 80W B8G410101 nEXT240D ISO-K100 160W B81200100 nEXT240D CF100 160W B81200200 nEXT240T ISO-K100 160W B81300100 nEXT240T CF100 160W B81300200 nEXT300D ISO-K100 160W B82200100 nEXT300D CF100 160W B82200200 nEXT300T ISO-K100 160W B82300100 nEXT300T CF100 160W B82300200 nEXT400D ISO-K160 160W B83200300 nEXT400D CF160 160W B83200400 nEXT400T ISO-K160 160W B83300300nEXT400T CF160 160W B83300400nEXT730D ISO-K160 NW25B8J200300nEXT730D CF160 NW25B8J200400nEXT930D ISO-K200 NW25B8K200D00nEXT930D CF200 NW25B8K200F00nEXT1230H CF200 NW40B8N4A0F00nEXT1230H ISO-F200 NW40B8N4A0E00nEXT1230H ISO-K200 NW40B8N4A0D00nEXT1230H CF200 NW40 INV B8N4A0FU0nEXT1230H ISO-F200 NW40 INV B8N4A0EU0nEXT1230H ISO-K200 NW40 INVB8N4A0DU0Other insterstage port positions available upon requestController (-1)TAG controllerD3*******TAG power supplyD3*******TIC 200 turbo and instrument controller D3*******CoolingWCX85 water cooling kit (4 position)B8G200833ACX85 air cooler connector fitted B8G200820VentingN/O TAV5 vent valve connector fittedB8G200834N/C TAV5 vent valve connector fittedB8G200835BakeoutCF63 flange heater 110 VB8G200823CF63 flange heater 240 VB8G200824ServiceOil cartridge kitB8G200828Bearing and oil cartridge kit B8G200811Bearing replacement tool kitB8G200845MiscellaneousAccessory Y adaptorB8G200837Accessory cable 90 degree/extensionB8G200836Accessory connector bare wired B8G200839nEXT85/EXT75DX base mounting adaptorB8G200838(1) Denotes need second annotation nEXT730 and bigger pumps need their own power supply required accessory. Others optional depending on application.PumpsAccessories and spares nEXT55/85Controller(-1)TAG controller D3*******TAG power supply D3******* TIC100 turbo and instrument controller D3*******Cooling nEXT radial air cooler B58053175 nEXT axial air cooler B58053185 nEXT water cooler B80000815Bakeout CF100 flange heater 100-120 V B58052773 CF100 flange heater 200-240 V B58052774 CF160 flange heater 100-120 V B58052775 CF160 flange heater 200-240 V B58052776Venting TAV5 solenoid operated vent valve B58066010ServiceOil cartridge tool kit B80000812 Bearing tool kit B80000805 Oil cartridge B80000811 Bearing and oil cartridge B80000810(1) Denotes need second annotation nEXT730 and bigger pumps need their own power supply required accessory. Others optional depending on application.ControllersTAG controller D3*******TAG power supply D3******* TIC100 turbo and instrument controller D3*******CoolingAir cooling radial nEXT730/930B8J200800 Air cooling radial nEXT1230B8J200801 Water cooling nEXT730/930, 1/4 inch B8J200820Venting N/O TAV5 vent valve connector fitted B8G200834 N/C TAV5 vent valve connector fitted B8G200835 Vent port adaptor B58066011Inlet screens Center ring w. prot. screen DN200 ISO-K coarse B8J200807 Center ring w. prot. screen DN200 ISO-K fine B8J200808 Coarse inlet screen DN 200 CF B8J200809 Fine inlet screen DN 200 CF B8J200810Accessories and spares nEXT730/930/123031Inlet screens CF160 coarse inlet screen B80000823 CF160 fine inlet screen B80000824 ISO160 coarse inlet screen B80000825 ISO160 fine inlet screen B80000826ServiceBearing replacement kit B8J200827Bearing replacement tooling B8J200845Mains input cable Mains input cable 3m EU B8J200812 Mains input cable 3m US B8J200813 Mains input cable 3m UK B8J200814Power supply to pumpnEXT 3m open end cable B8J200816nEXT 5m open end cable B8J200817EPS 800B8J200819 nEXT 3m extension cable for EPS 800B8J200824nEXT 5m extension cable for the EPS 800B8J2008252.5m EU EPS 800, IP54 protected B8J2008292.5m US NEMA 6-15P 250V EPS 800, IP54 protected B8J2008302.5m UK EPS 800, IP54 protected B8J200831 EPS 800 mount kit to place the power supply directly on the pump B8J200832Miscellaneous Accessory cable 90 degree/extension B8G200836 Accessory Y adaptor B8G200837 Accessory connector bare wired B8G200839(1) Denotes need second annotation nEXT730 and bigger pumps need their own power supply required accessory. Others optional depending on application.Extension cables 1 m pump to controller cable D3******* 3 m pump to controller cable D3******* 5 m pump to controller cable D3*******Power cables(-1)2 m electrical supply cable UK plug D4******* 2 m electrical supply cable EU plug D4******* 2 m electrical supply cable US plug D4*******Miscellaneous Vent port adaptor B58066011 Accessories and sparesnEXT TURBOMOLECULAR PUMPS (3601 0091 01)Accessories and sparesPRX10 purge restrictor B58065001MiscellaneousTIC relay D3*******(1) Denotes need second annotation nEXT730 and bigger pumps need their own power supply required accessory. Others optional depending on application.33 3601 0091 01 - November 2021. All rights reserved.Edwards and the Edwards logo are trademarks ofEdwards Limited. Whilst we make every effort to ensurethat we accurately describe our products and services,we give no guarantee as to the accuracy orcompleteness of any information. Edwards Ltd,registered in England and Wales No. 6124750,registered office: Innovation Drive, Burgess Hill, WestSussex, RH15 9TW, UK.Part of the Atlas Copco Group。
亚特兰蒂斯公司水下泵产品介绍说明书
1Atlas Copco Dewatering pumps product rangeS u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e s P a r t s a n d S e r v i c e Othe r I nf o r m a t i o n Index Surface pumps• Dry prime pumps (PAS range)• Wet prime pumps (VAR range)• Wellpoint centrifugal pumps (WEL range)Submersible pumps• Drainage pumps (WEDA D range)• Sludge pumps (WEDA S range)• Slurry pumps (WEDA L range)Terminology• Self primingAccessoriesParts and Service• Service packs• Pump parts• Seal kits, Instant Service pack, Wear part kit and Gasket kit,• Fluids and Lubricants• FleetLinkOther information• Friction losses• Utilities table• Hydraulic characteristicsAtlas CopcoDewatering pumps product rangeDry prime pumps (PAS range)Dewatering | Sewage bypass | Ballasting5S u b m e r s i b l e p u m p s S u r f a c e p u m pT e r m i n o l o g yAc c es s o r i e s P a r t s a n d S e r v i c e O t h e r I n f o r m a t i o n Wellpoint pumps (WEL range)Dewatering to build. Construction | Pipeline on shorePolluted soil remediation | TunnelingWet prime pumps (VAR range)Groundlevel process before excavation for footingsDry prime pumpsPAS range68The PAS range of fully automatic self-priming centrifugal pumps are considered the ideal solution for transporting or raising water with abrasive solids in suspension. They are used across multiple industries including construction and mine site dewatering, floodwater, stream diversions, sewage bypass and municipal64128PAS Performance curveAtlas Copco Dewatering pumps product rangePerformance Curves accor. to UNI 9906 Features :Atlas Copco Dewatering pumps product rangeS u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nmaintenance.• High capacity diaphragm pump.• Mechanical seal oil bath.• PW 750 controller• Stackable (canopy version)S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nmaintenance.• High capacity diaphragm pump.• Mechanical seal oil bath.• PW 750 controller.• Stackable (canopy version) .S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o n• High capacity diaphragm pump.• Easy serviceability.• Mechanical seal oil bath • PW 750 controllerS u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o n• Hinge kit for pump maintenance.• High capacity diaphragm pump.• Mechanical seal oil bath.• PW 250 controller.• Stackable.S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o n• Hinge kit for pump maintenance.• High capacity diaphragm pump.• Mechanical seal oil bath.• PW 250 controller.• Stackable.S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o n• Hinge kit for pump maintenance.• High capacity diaphragm pump.• Mechanical seal oil bath.• PW 250 controller.• Stackable.S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o n• Hinge kit for pump maintenance.• High capacity diaphragm pump.• Mechanical seal oil bath.• PW 500 controller.• Stackable.S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o n• High capacity vacuum pump.• Mechanical seal oil bath.• PW 750 controller.• Stackable.S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nThe VAR range consists on centrifugal pumps, where the key is to have a simplesystem for first prime. The machine can, with a first water fill up, quickly evacuate the air from the suction and allow to flow the fluid with solid handlings in suspension. The equipment suits perfectly in medium construction application,bentonite pumping and portable emergency floods control.Great for construction, general dewatering, drainage and emergency applications.These self-priming centrifugal pumps are for applications where the main challenge is the difficulty to start the unit in tough conditions and difficult accessible areas.SOLIDS76 mmUP TOHANDLINGFLUSHINGmin1MAX. FLOWUP TO1400m /h24 OF CONTINUOUSOPERATIONHOURSS u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e s P a r t s a n d S e r v i c ee r I nf o r m a t i o nH• Light weight and portable.• Wet prime system.• Easy clean up.S u b m e r s i b l e p u m p s S u r f a c e p u T e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o n• Light weight and portable.• Wet prime system.• Easy clean up.S u b m e r s i b l e p u m p s S u r f a c e p u T e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nPerformance Curves accor. to UNI 9906 Features :• Light weight and portable.S u b m e r s i b l e p u m p s S u r f a c e p u T e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nPerformance Curves accor. to UNI 9906 Features :0200S u b m e r s i b l e p u m p s S u r f a c e p u T e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nPerformance Curves accor. to UNI 9906 Features :S u b m e r s i b l e p u m p s S u r f a c e p u T e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nPerformance Curves accor. to UNI 9906S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nPerformance Curves accor. to UNI 9906 Features :S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nPerformance Curves accor. to UNI 9906S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nPerformance Curves accor. to UNI 9906S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nQ[l/min] 020*******S u b m e r s i b l e p u m p s S u r f a c e p u m p sT e r m i n o l o g y A c c e s s o r i e sP a r t s a n d S e r v i c ee r I nf o r m a t i o nQ[l/min] 04008001200。
安捷伦涡轮分子泵结构
安捷伦涡轮分子泵结构引言：涡轮分子泵是一种常用的高真空泵，广泛应用于科研、半导体制造、光学薄膜镀膜等领域。
本文将介绍安捷伦涡轮分子泵的结构，包括主要组成部分和工作原理。
一、主要组成部分1. 泵体：安捷伦涡轮分子泵的泵体通常由不锈钢制成，具有良好的密封性和耐腐蚀性。
泵体内部有多个叶轮和固定板，形成泵腔。
2. 叶轮：叶轮是涡轮分子泵的核心部件，也是实现气体抽取的关键。
安捷伦涡轮分子泵通常采用多叶片叶轮结构，叶片之间间距均匀，叶片表面光滑，可以减小气体在泵内的粘附和压缩效应。
3. 电机：电机是驱动涡轮分子泵叶轮旋转的动力源。
安捷伦涡轮分子泵通常采用无刷直流电机，具有高效、低噪音、长寿命等优点。
4. 控制器：涡轮分子泵的控制器用于控制泵的启停、转速调节和保护等功能。
安捷伦涡轮分子泵的控制器智能化程度较高，可以实现远程控制和数据采集。
5. 磁轴密封：为了防止气体泄漏，涡轮分子泵通常采用磁轴密封技术。
安捷伦涡轮分子泵的磁轴密封具有良好的密封性能，可以保证高真空工作环境的稳定性。
二、工作原理安捷伦涡轮分子泵的工作原理基于分子碰撞和扩散效应。
具体过程如下：1. 启动：当涡轮分子泵启动时，电机驱动叶轮高速旋转。
叶轮的旋转会产生离心力，将气体分子从进气口吸入泵腔。
2. 压缩：在泵腔内，气体分子受到叶轮的压缩作用，分子之间的平均自由程缩小，气体的压力逐渐增大。
3. 扩散：在叶轮和固定板之间，设有一系列的间隙，称为扩散板。
气体分子在扩散板上发生多次碰撞和扩散，使气体的压力进一步升高。
4. 抽取：当气体分子的平均自由程小于泵腔的间隙时，气体分子会在叶轮和固定板之间发生多次碰撞，从而被抽取出来。
抽取的气体经过排气口排出系统。
5. 控制：安捷伦涡轮分子泵的控制器可以根据需要调节叶轮的转速，以实现不同真空环境下的抽取效果。
结论：安捷伦涡轮分子泵是一种结构简单、工作效率高的高真空泵。
其主要由泵体、叶轮、电机、控制器和磁轴密封等组成。
涡轮分子泵使用注意事项
涡轮分子泵使用注意事项涡轮分子泵是现代高科技制造中的一种高精度、高效率的真空泵，广泛应用于半导体、光电、化工、医药等领域。
但是，在使用涡轮分子泵的过程中，需要注意一些事项，以确保其正常运行和延长使用寿命。
1. 清洁和维护涡轮分子泵的运行需要高度洁净的环境，因此在使用前和使用后，应该对泵进行清洁和维护。
清洁时，应使用专业的清洗剂和工具，避免使用硬质刷子或金属工具，以免损坏泵的表面和部件。
维护时，应按照泵的说明书进行操作，检查泵的密封性、泵叶、轴承、电机等部件的磨损程度和工作情况，及时更换和维修。
2. 安装和调试涡轮分子泵的安装和调试需要专业技术人员进行，以确保其正确安装和正常运行。
在安装时，应根据泵的说明书进行操作，选择合适的安装位置和固定方式，并进行密封性测试。
在调试时，应根据泵的工作特性和使用要求，进行参数设置和调整，以达到最佳工作状态。
3. 保护和维护电源涡轮分子泵的电源需要稳定、可靠，应保证电源电压、电流和频率的稳定性和正常运行。
在使用时应注意防雷、防潮、防过流等措施，避免电源故障和电机损坏。
在长期不使用时，应断开电源，以免电子元件老化和损坏。
4. 注意使用环境涡轮分子泵的使用环境需要干燥、清洁、无尘、无油烟和无腐蚀性气体，应尽量避免在恶劣环境下使用。
在使用时应注意周围温度和湿度，避免过高或过低的温度和湿度对泵的影响。
在使用过程中，应及时清理泵的周围环境，保持干净整洁。
5. 注意控制气体流量涡轮分子泵的使用需要控制气体流量，以避免泵的过载和损坏。
在使用前需要计算和控制气体流量，避免过大的气体流量导致泵的过载或损坏。
在使用过程中，应根据泵的工作特性和使用要求，调整气体流量和泵的工作状态。
涡轮分子泵的使用需要注意清洁和维护、安装和调试、保护和维护电源、注意使用环境和控制气体流量等事项。
只有在遵循这些注意事项的前提下，才能保证涡轮分子泵的正常运行和延长使用寿命。
中科科仪分子泵说明书
企业通过ISO 9001质量管理体系认证分子泵全系列 使用说明书¾分子泵安全使用说明在安装与使用分子泵前，泵的安装与操作人员都应仔细阅读本使用说明书，并按照说明书中规定的条款安装与操作，以免造成人员伤害与设备损坏。
¾安全警示说明危险：表示为了防止危及人身安全，需要引起高度注意且必须遵守的事项；警告：表示为了防止损伤或损坏泵，需要引起中度注意且必须遵守的事项；小心：表示为了使泵的使用效果最佳，需要引起轻度注意且需要遵守的事项。
¾保修说明凡购买我公司生产的分子泵，从发货之日起，用户凭保修单可保修一年。
凡属下列情况之一的，不予保修：1)用户未经授权对产品私自拆卸；2)用户保管或使用不当（如撞击、强放射性环境、强磁场环境等）；3)属于用户其他原因造成的损坏。
¾免责声明当用户严格遵照本说明书中的规定安装和使用时，KYKY分子泵是安全、方便和有效的。
泵的操作人员必须仔细阅读并严格遵守本说明书中的条款。
由于用户没有仔细阅读说明书、或未按照使用说明书的要求操作而造成的任何伤害和损失，KYKY将不负担任何责任。
本说明书仅作为信息使用，如遇改版，恕不另行通知。
如本说明书与实际产品有所出入，本公司拥有最终解释权。
由本说明书引起、产生和包含的知识产权均属KYKY所有。
1概述1.1 分类与特点本说明书所列分子泵，按口径不同，从100mm到400mm（对应抽速从110l/s到3500l/s）共5个系列，12种泵。
分子泵一般有两种结构形式，一种是由动静叶列组成的涡轮分子泵，一种是由涡轮级加牵引级构成的复合型分子泵。
复合型分子泵的特点是使得分子泵高压强区的抽速有所提高，另一特点是使得出口耐压得到提高，因此可以适当减小前级泵的规格，可使用户节省投资。
根据分子泵轴承润滑方式不同，分子泵有油润滑、脂润滑两种。
一般情况下，油润滑分子泵需竖直安装（F-100/110可以水平安装），脂润滑分子泵可以任意角度安装。
涡轮分子泵的用途
涡轮分子泵的用途1. 涡轮分子泵的定义涡轮分子泵是一种重要的真空抽气设备，可以将气体抽至极高的真空度。
它主要通过旋转装置作用于气体，通过离心力将气体从低真空区域抽至高真空区域。
2. 涡轮分子泵的工作原理涡轮分子泵的工作原理是利用离心力和分子碰撞的作用，将气体抽出真空系统。
具体工作过程如下：2.1 转子叶轮涡轮分子泵包含一个转子和一个固定的壳体。
转子上有多个叶轮，旋转时产生高速气体流动。
2.2 离心力作用转子高速旋转时，气体被离心力投射到壳体内壁，并形成螺旋形气流。
离心力越大，气体流动速度越高。
2.3 分子碰撞气体分子在高速气流中相互碰撞，产生压力差，使气体被推向泵的出口。
2.4 出口压力调节为了保持泵的稳定工作，涡轮分子泵通常配备出口压力调节装置，用于调节出口压力，使真空系统在适当的压力范围内运行。
3. 涡轮分子泵的主要用途涡轮分子泵在科研、工业生产、航空航天等领域有着广泛的应用。
下面将详细介绍涡轮分子泵的主要用途：3.1 真空技术研究涡轮分子泵是研究真空技术的重要工具，可以在实验室中制造高真空环境，用于材料表征、电子显微镜、物理实验等科研领域。
其高真空度和快速抽气能力，可以有效提高实验的准确性和可靠性。
3.2 半导体制造在半导体制造过程中，需要维持超高真空环境，以避免污染对产品品质的负面影响。
涡轮分子泵广泛应用于半导体制造设备中的各个工艺步骤，如薄膜沉积、离子注入、刻蚀等。
其高真空抽气能力和可靠性，对保证产品质量和制造效率起到关键作用。
3.3 光学薄膜镀膜在光学薄膜镀膜工艺中，需要在真空环境下进行，以保证薄膜的质量和附着力。
涡轮分子泵通过抽出空腔内的气体，形成高真空度，有效地减少气体对薄膜生长的干扰，提高薄膜质量和光学性能。
3.4 航空航天涡轮分子泵被广泛应用于航空航天领域，用于燃料推进系统、真空测试系统、火箭发动机测试等。
在航空航天中，对真空度和抽气速度要求较高，涡轮分子泵凭借其高速旋转和优秀的抽气能力，成为航天器的关键装备。
涡轮分子泵的用途
涡轮分子泵的用途涡轮分子泵是一种高效的真空泵，它的主要作用是将气体从一个区域抽出，以达到真空的目的。
涡轮分子泵的用途非常广泛，它被广泛应用于各种领域，包括半导体制造、真空冶金、航空航天、医疗设备、光学仪器等等。
本文将详细介绍涡轮分子泵的用途。
一、半导体制造在半导体制造过程中，需要将气体从反应室中抽出，以保持反应室内的真空度。
涡轮分子泵是半导体制造中最常用的真空泵之一。
它可以将气体从反应室中抽出，以达到所需的真空度。
涡轮分子泵的高效性和低噪音使其成为半导体制造中不可或缺的设备。
二、真空冶金在真空冶金过程中，需要将气体从熔融金属中抽出，以保持金属的纯度。
涡轮分子泵是真空冶金中最常用的真空泵之一。
它可以将气体从熔融金属中抽出，以达到所需的真空度。
涡轮分子泵的高效性和低噪音使其成为真空冶金中不可或缺的设备。
三、航空航天在航空航天领域中，需要将气体从航天器中抽出，以保持航天器内的真空度。
涡轮分子泵是航空航天中最常用的真空泵之一。
它可以将气体从航天器中抽出，以达到所需的真空度。
涡轮分子泵的高效性和低噪音使其成为航空航天中不可或缺的设备。
四、医疗设备在医疗设备中，需要将气体从各种设备中抽出，以保持设备内的真空度。
涡轮分子泵是医疗设备中最常用的真空泵之一。
它可以将气体从各种设备中抽出，以达到所需的真空度。
涡轮分子泵的高效性和低噪音使其成为医疗设备中不可或缺的设备。
五、光学仪器在光学仪器中，需要将气体从各种设备中抽出，以保持设备内的真空度。
涡轮分子泵是光学仪器中最常用的真空泵之一。
它可以将气体从各种设备中抽出，以达到所需的真空度。
涡轮分子泵的高效性和低噪音使其成为光学仪器中不可或缺的设备。
涡轮分子泵是一种高效的真空泵，它的用途非常广泛。
它被广泛应用于各种领域，包括半导体制造、真空冶金、航空航天、医疗设备、光学仪器等等。
涡轮分子泵的高效性和低噪音使其成为这些领域中不可或缺的设备。
英塞尔斯·兰德双膜空气驱动泵操作手册说明书
OPERATOR’S MANUAL PX01X-XXX-XXX-AXXXINCLUDING: OPERATION, INSTALLATION & MAINTENANCERELEASED: 3-7-13REVISED: 5-13-16(REV: H)1/4" DIAPHRAGM PUMPINGERSOLL RAND COMPANY LTD209 NORTH MAIN STREET – BRYAN, OHIO 43506✆ (800) 495-0276 • FAX (800) 892-6276 © 2016CCN 80448053PUMP DATAModels . . . . . . see Model Description Chart on page 2 for “-XXX” optionsPump Type . . Non-Metallic Air Operated Double Diaphragm Material . . . . . see Model Description ChartWeight . . . . . . Polypropylene . . . . . . . . 2 .86 lbs (1 .30 kgs) PVDF . . . . . . . . . . . . . . . . . 3 .88 lbs (1 .76 kgs) Acetal . . . . . . . . . . . . . . . . 3 .52 lbs (1 .60 kgs)Maximum Air Inlet Pressure . . . . . . . . 125 psig (8 .6 bar)Minimum Air Inlet Pressure . . . . . . . . . 10 psig (0 .69 bar)Maximum Outlet Pressure . . . . . . . . . . 125 psig (8 .6 bar)Maximum Flow Rate . . . . . . . . . . . . . . . . 5 .3 gpm (20 lpm)Maximum Material Inlet Pressure . . . . 10 psig (0 .69 bar)Displacement / Cycle @ 125 psig . . . . 0 .019 gal / 0 .072 ltrs Maximum Particle Size . . . . . . . . . . . . . 1/16” dia . (1 .6 mm)Maximum Temperature Limits (diaphragm / ball / seat material)Acetal . . . . . . . . . . . . . . . . . . . . 10° to 180° F (-12° to 82° C)E .P .R . / EPDM . . . . . . . . . . . . . . -60° to 280° F (-51° to 138° C)Kynar® PVDF . . . . . . . . . . . . . . 10° to 200° F (-12° to 93° C)Hytrel® . . . . . . . . . . . . . . . . . . . -20° to 150° F (-29° to 66° C)Neoprene . . . . . . . . . . . . . . . . 0° to 200° F (-18° to 93° C)Nitrile® . . . . . . . . . . . . . . . . . . . 10° to 180° F (-12° to 82° C)Polypropylene . . . . . . . . . . . . 35° to 175° F (2° to 79° C)Viton® . . . . . . . . . . . . . . . . . . . . -40° to 350° F (-40° to 177° C)Santoprene® . . . . . . . . . . . . . . -40° to 225° F (-40° to 107° C)PTFE . . . . . . . . . . . . . . . . . . . . . . 40° to 225° F (4° to 107° C)Dimensional Data . . . . . . . . . . . . . . . . . . . see page 10Noise Level @ 70 psig, 60 cpm . . . . . . . . 62 .3 dB(A)①① The pump sound pressure levels published here have been updated to an Equivalent Continuous Sound Level (LA eq ) to meet the intent of ANSI S1 .13-2005, CAGI-PNEUROP S5 .1 .Mounting Adapter Plate Optional Accessory Kit (24123879) available . Please contact your nearest ARO / Ingersoll Rand customer service or distributor for details .Model PD01XModel PE01XFigure 1Page 2 of 12 PX01X-XXX-XXX-AXXX (en)MODEL DESCRIPTION CHARTModel Code ExplanationExample:PX01X-XXX-XXX-AXXXModel SeriesPD01-Standard Pump PE01-Electronic Interface Center Body Material P -Polypropylene E-Groundable Polypropylene ConnectionH-Hybrid 1/4” NPT / BSP Fluid Caps / Manifold Material D-Groundable AcetalE-Groundable Acetal (Multiple port)K-Kynar PVDFL-P-Kynar PVDF (Multiple port)PolypropyleneHardware Material S-Stainless SteelSeat / Spacer MaterialD-AcetalK-Kynar PVDF P-Polypropylene0-Polypropylene (Flex Check Spacer)1-Acetal (Flex Check Spacer)2-PVDF (Flex Check Spacer)Check MaterialA-Santropene C-Hytrel G-NitrileT-PTFE J-Nitrile ( ex check only)K-EPR ( ex check only)N-Neoprene ( ex check only)L-Viton ( ex check only)Diaphragm / O-Ring MaterialA-Santoprene C-Hytrel G-Nitrile T-PTFE RevisionA-RevisionSpecialty Code 1 (Blank if no Speciality Code)B-Solenoid 12VDC, 24VAC and 22VAC D-Solenoid 24VDC, 48VAC and 44VAC A-Solenoid 120VAC,110VAC AND 60VDC C-Solenoid 240VAC, 220VAC AND 120VDC G-Solenoid 12VDC ATEX / IECex H-Solenoid 24VDC ATEX / IECex K-Solenoid 220VAC ATEX / IECex N-Solenoid with no Coil0-Standard Valve Block (No Solenoid)Specialty Code 2 (Blank if no Speciality Code)NOTICE: All possible options are shown in the chart, however, certain combinations may not be recommended. Consult a representative or the factory if you have questions concerning availability.G-End of Stroke ATEX / IECex / NEC / CECF-End of Stroke feedback / cycle sensing ( with M12 Circular Connector)R-End of Stroke NECE-End of Stroke feedback / cycle sensing (with M12 Circular Connector) + Leak Detection T-End of Stroke NEC / Leak Detection NEC 0-No optionSpecial TestingFor Special Testing options, please contact your nearest Ingersoll Rand Customer Service Representative or Distributor.R-Polypropylene (Multiple port) H-End of Stroke + Leak Detection ATEX / IECex / NEC / CEC L-Leak DetectionM-Leak Detection ATEX / IECex / NEC / CEC E-Solenoid 12VDC NEC / CEC F-Solenoid 24VDC NEC / CEC J-Solenoid 120VAC NEC / CECEXCESSIVE AIR PRESSURESTATIC SPARKWARNING EXCESSIVE AIR PRESSURE. Can cause per- sonal injury, pump damage or property damage.y Do not exceed the maximum inlet air pressure as stated on the pump model plate.y Be sure material hoses and other components are able to withstand fluid pressures developed by this pump. Check all hoses for damage or wear. Be certain dispens-ing device is clean and in proper working condition. WARNING STATIC SPARK. Can cause explosion resulting in severe injury or death. Ground pump and pumping system.y PX01X-HDS-XXX are Groundable Acetal pumps: Use the pump ground lug provided. Connect to a 12 ga. (minimum) wire (kit 66885-1 is included) to a good earth ground source.y Sparks can ignite flammable material and vapors.y The pumping system and object being sprayed must be grounded when it is pumping, flushing, recirculating or spraying flammable materials such as paints, solvents, lacquers, etc. or used in a location where surrounding atmosphere is conducive to spontaneous combustion. Ground the dispensing valve or device, containers, hos-es and any object to which material is being pumped. y Secure pump, connections and all contact points to avoid vibration and generation of contact or static spark.y Consult local building codes and electrical codes for specific grounding requirements.y After grounding, periodically verify continuity of electrical path to ground. Test with an ohmmeter from each component (e.g., hoses, pump, clamps, con-tainer, spray gun, etc.) to ground to insure continuity. Ohmmeter should show 0.1 ohms or less.y Submerse the outlet hose end, dispensing valve or device in the material being dispensed if possible. (Avoid free streaming of material being dispensed.) y Use hoses incorporating a static wire.y Use proper ventilation.y Keep inflammables away from heat, open flames and sparks. y Keep containers closed when not in use. WARNING Pump exhaust may contain contaminants. Can cause severe injury. Pipe exhaust away from work area and personnel.y In the event of a diaphragm rupture, material can be forced out of the air exhaust muffler.y Pipe the exhaust to a safe remote location when pumping hazardous or inflammable materials.y Use a grounded 1/4” minimum i.d. hose between the pump and the muffler.WARNING HAZARDOUS PRESSURE. Can result in serious injury or property damage. Do not serviceor clean pump, hoses or dispensing valve while the system is pressurized.y Disconnect air supply line and relieve pressure from the system by opening dispensing valve or device and / or carefully and slowly loosening and removing outlet hose or piping from pump.WARNING HAZARDOUS MATERIALS. Can cause serious injury or property damage. Do not attempt to returna pump to the factory or service center that contains hazardous material. Safe handling practices must comply with local and national laws and safety code requirements.y Obtain Material Safety Data Sheets on all materials from the supplier for proper handling instructions.CAUTIONpump wetted parts and the substance being pumped, flushed or recirculated. Chemical compatibility may change with temperature and concentration of the chemical(s) within the substances being pumped, flushed or circulated. For specific fluid compatibility, consult the chemical manufacturer.CAUTIONon mechanical stress only. Certain chemicals will significantly reduce maximum safe operating temperature. Consult the chemical manufacturer for chemical compatibility and temperature limits. Refer to PUMP DATA on page 1 of this manual.CAUTIONhave been trained for safe working practices, understand it’s limitations, and wear safety goggles / equipment when required.CAUTIONsupport of the piping system. Be certain the system components are properly supported to prevent stress on the pump parts.y Suction and discharge connections should be flexible connections (such as hose), not rigid piped, and should be compatible with the substance being pumped.CAUTIONpump. Do not allow pump to operate when out of material for long periods of time.y Disconnect air line from pump when system sits idle for long periods of time.CAUTION Use only genuine ARO ® replacement parts to assure compatible pressure rating and longest service life. NOTICENOTICE RE-TORQUE ALL FASTENERS BEFORE cause fasteners to loosen. Re-torque all fasteners to insureRupture” pn \ 93122WARNINGCAUTIONOPERATING AND SAFETY PRECAUTIONSREAD, UNDERSTAND, AND FOLLOW THIS INFORMATION TO AVOID INJURY AND PROPERTY DAMAGEPX01X-XXX-XXX-AXXX (en) Page 3 of 12Page 4 of 12 PX01X-XXX-XXX-AXXX (en)y Kynar® is a registered trademark of the Arkema Inc . y Loctite® and 242 are registered trademarks of the Henkel Loctite Corporation yy ARO® is a registered trademark of Ingersoll-Rand Company y Santoprene® is a registered trademark of Monsanto Company, licensed to Advanced Elastomer Systems, L .P . yy Lubriplate® is a registered trademark of Lubriplate Division (Fiske Brothers Refining Company) yGENERAL DESCRIPTIONThe ARO diaphragm pump offers high volume delivery even at low air pressures, easy self priming and the ability to pump various viscosity materials . The pump is designed to corre-spond to the needs of the user by offering a variety of wetted parts configurations to handle almost any application .Air operated double diaphragm pumps utilize a pressure differential in the air chambers to alternately create suction and positive fluid pressure in the fluid chambers . Flat checks insure a positive flow of fluid .Pump cycling will begin as air pressure is applied and it will continue to pump and keep up with the demand . It will build and maintain line pressure and will stop cycling once maxi-mum line pressure is reached (dispensing device closed) and will resume pumping as needed .The Acetal material used in this pump contains stainless steel fibers . It’s conductivity allows it to be connected to a suitable ground . A ground screw is provided for this .AIR AND LUBE REQUIREMENTSWARNING y A filter capable of filtering out particles larger than 50 microns should be used on the air supply . In most ap-plications there is no lubrication required other than the “O” ring lubricant which is applied during assembly or repair . y The pump, when fitted with flex checks, can be rotated 360° to suit the application . It may be mounted upside down or on the wall with no effect on suction lift or op-erating efficiency . The filter and regulator need to be ori-ented in a normal vertical direction to function properly . y If lubricated air is present, make sure that it is compatible with the “O” rings and seals in the air motor section of the pump .INSTALLATIONy Apply PTFE tape or pipe sealant to threads upon assem-bly to prevent leakage .y Secure the diaphragm pump legs to a suitable surface to insure against damage by vibration .y When the diaphragm pump is used in a forced-feed (flooded inlet) situation, it is recommended that a “Check Valve” be installed at the air inlet .OPERATING INSTRUCTIONSy Always flush the pump with a solvent compatible withthe material being pumped if the material being pumped is subject to “setting up” when not in use for a period of time .y Disconnect the air supply from the pump if it is to be in-active for a few hours .y The outlet material volume is governed not only by the air supply, but also by the material supply available at the inlet . The material supply tubing should not be too small or restrictive . Be sure not to use hose which might col-lapse .MAINTENANCEy This product is not intended to be repairable . However, some service items are available .y Provide a clean work surface to protect sensitive internal moving parts from contamination from dirt and foreign matter during service disassembly and reassembly .y Keep good records of service activity and include the pump in preventive maintenance program .y At the end of its service life, please dispose of pump and contents properly .PE01X PUMP OPERATIONy Solenoid control allows the cycle rate of the pump to becontrolled electronically .With Solenoid control, when the solenoid is energized, the pump strokes and dispenses the fluid in one cham-ber . When the solenoid is de-energized, the pump strokes in the opposite direction, dispensing the fluid in the other chamber .By providing continuous ON - OFF signals to the solenoid, the fluid transfer rate may be increased or decreased re-motely .y End of stroke feedback can be used in conjunction with the solenoid valve to cycle the pump based upon com-pletion of each stroke .y The leak detection option incorporates an optical fluid sensor in each air chamber to provide a signal when a diaphragm has failed and fluid is leaking through the pump .PX01X-XXX-XXX-AXXX (en)Page 5 of 12Note: Item (19) O-ring is not used with Flex Check Options.MATERIAL CODE[B] = Nitrile [Co] = Copper [D] = Acetal[E] = E .P .R . / EPDM [G] = Nitrile[GP] = Groundable Polypropylene [H] = Hytrel[K] = Kynar PVDF [N] = Neoprene [P] = Polypropylene [Sp] = Santoprene [SS] = Stainless Steel [T] = PTFE[U] = Polyurethane [V] = VitonPage 6 of 12 PX01X-XXX-XXX-AXXX (en)6112219266010164 (P T F E m o d e l s o n l y )26212167772643656415726(f o r e x c h e c k m o d e l s , 4 p l a c e s )42☞ TORQUE REQUIREMENTS ☜NOTE: DO NOT OVERTIGHTEN FASTENERS.① (26) Screws 51-55 in. lbs (5.8 - 6.2 Nm).② (6) Diaphragm Screw / Washer 60-70 in. lbs (6.8 - 7.9 Nm).LUBRICATION / SEALANTS③ Apply Lubriplate FML-2 grease (94276) to all “O” rings, “U” cups and mating parts.④ Apply Loctite® 242® to threads.PX01X-XXX-XXX-AXXX (en) Page 7 of 12Page 8 of 12 PX01X-XXX-XXX-AXXX (en)PD01X-XXX-XXX-AXXX - Air Section1012612917313213510726 137 111 33311167PE01X-XXX-XXX-AXXX - Air Section42111111071374204192610126 12928313513231334144174034164154184134291673173☞ TORQUE REQUIREMENTS ☜NOTE: DO NOT OVERTIGHTEN FASTENERS.① (26) Screws 25-28 in.lbs (2.8 - 3.2 Nm)LUBRICATION / SEALANTS③ Apply Lubriplate FML-2 grease (94276) to all “O” rings, “U” cups and mating parts.④ Apply Loctite® 242® to threads.PX01X-XXX-XXX-AXXX (en) Page 9 of 12Solenoid Wiring DiagramEnd of Stroke / Cycle Sensor Pinout, M12 ConnectorEnd of Stroke / Cycle Sensor Pinout Wiring Diagram (No Connector)1 BROWN PNP Output L L -+10 TO +30 VDC 0VDCLoad 200 mA MAX 4 BLACK3 BLUEDiaphragm Failure Detector Wiring DiagramTURCK (PICOFAST) CONNECTOR PSW 3M -2/90143BNPIN 1SCHEMATICSENSOR SCHEMATICBLK PIN 4LOAD 40 mA MAX-+BU PIN 324.0 + 10%VDCPINOUT FUNCTION 1 (BN)+ 24 VDC 3 (BU)0 VDC 4 (BLK)SIGNALPage 10 of 12 PX01X-XXX-XXX-AXXX (en)Pumps that will operate in environments defined as “hazardous locations” must only be installed, connected and set-up by qualified personnel with knowledge and understanding of protection classes, regulations and provisions for apparatus in haz-ardous areas, for the region where the pump will operate, because these regulations and provisions, along with the definition of what constitutes hazardous areas vary by location .Make sure the pump and its accessories comply with the specific requirements of the area it will be installed in . ARO Electronic interface Pumps (PE series) and its components are available with the following certifications:y United Statesy Class I, Division 1, Groups A-D, T4 y Class II, Division 1, Groups E-G, T135°C y Class I, Zone 1, Group IIC, T4 y Zone 20, Group IIIC, T135°C y Canaday Class I, Division 1, Groups A-D, T4 y Class II, Division 1, Groups E-G, T135°C y Class I, Zone 1, Group IIC, T4 y Zone 20, Group IIIC, T135°C y ATEX (Europe)y ATEX Category 2 y Zone 1, Group IIC, T4y Zone 21, Group IIIC, T135°C y IECy IEC Category 2y Zone 1, Group IIC, T4y Zone 21, Group IIIC, T135°CINSTALLATION OF ELECTRONIC INTERFACE COMPONENTS FOR HAZARDOUS DUTYAPPLICATIONSPX01X-XXX-XXX-AXXX (en) Page 11 of 12DIMENSIONAL DATADimensions shown are for reference only, they are displayed in inches and millimeters (mm) .DIMENSIONSA - 7 .2” (182 mm)H- 1 .9” (48 .6 mm)Q - 1/4 - 18 PTF SAE Short Z - 1/4 - 18 PTF SAE ShortB - 3 .9” (100 .0 mm)J - 2 .4” (61 mm)R- 3/4-14 NPTFC - 4 .6” (117 .0 mm)K - 3 .9” (99 mm)S - 1/4 NPTF / BSPT HybridD- 6 .8” (173 .0 mm)L - 2 .1” (53 mm)T - 1/4 NPTF / BSPT HybridE- 0 .3” (8 .8 mm)M - 3 .2” (81 mm)U- 3/4-14 NPTFF- 6 .1 ” (156 mm)N - 7 .2” (184 mm)X - 1/4-18 NPTF / BSPT HybridG- 0 .8” (20 .7 mm)P - 6 .0” (153 mm)Y - 1/4 NPTF / BSPT HybridMultiport Options Discharge Manifold has (2) and Inlet Manifold has (3) .。
分子泵的详细介绍
涡轮分子泵的抽气原理分子泵输送气体应满足二个必要条件：1). 涡轮分子泵必须在分子流状态下工作。
因为当将一定容积的容器中所含气体的压力降低时，其中气体分子的平均自由程则随之增加。
在常压下空气分子的平均自由程只有0.06 μm ，即平均看一个气体分子只要在空间运动0.06 μm ，就可能与第二个气体分子相碰。
而在 1.3Pa 时，分子间平均自由程可达 4.4mm 。
若平均自由程增加到大于容器壁间的距离时，气体分子与器壁的碰撞机会将大于气体分子之间的碰撞机会。
在分子流范围内，气体分子的平均自由程长度远大于分子泵叶片之间的间距。
当器壁由不动的定子叶片与运动着的转子叶片组成时，气体分子就会较多地射向转子和定子叶片，为形成气体分子的定向运动打下基础。
2). 分子泵的转子叶片必须具有与气体分子速度相近的线速度。
具有这样的高速度才能使气体分子与动叶片相碰撞后改变随机散射的特性而作定向运动。
分子泵的转速越高，对提高分子泵的抽速越有利。
实践表明，对不同分子量的气体分子其速度越大，泵抽除越困难。
例： H2在空气中含量甚徽，但由于 H2分子具有很大的运动速度 ( 最可几速度为 1557m /s) ，所以分子泵对 H2的抽吸困难。
通过对极限真空中残余气体的分析，可发现氢气比重可达 85 ％，而分子量较大，而运动速度慢的油分子所占的比重几乎为零。
这就是分子泵对油蒸气等高分子量的气体的压缩比很高，抽吸效果好的原因。
现以涡轮分子泵的一个叶片为例说明它的抽气原理。
假设一个轴流式单叶列在分子流范围内以速度 V 运动，如图 21 所示。
图21：涡轮分子泵抽气机理图设 I 侧为吸入侧，Ⅱ侧为排气侧。
从 I 侧向Ⅱ侧运动的气体分子，可分为以下几种情况：有一部分气体分子与叶片的端部相碰返回 I 侧，一部分气体分子直接通过叶片槽到达Ⅱ侧，还有一部分气体分子在叶片槽内与叶片壁相碰，其碰撞结果将使一部分到达Ⅱ侧，而另一部分气体分子返回 I 侧。
具有增强的抽气能力的涡轮分子泵[发明专利]
![具有增强的抽气能力的涡轮分子泵[发明专利]](https://img.taocdn.com/s3/m/97c1de10ba0d4a7303763a10.png)
专利名称：具有增强的抽气能力的涡轮分子泵专利类型：发明专利
发明人：彼得·赖默,丹尼斯·R·史密斯,杰伊·帕特尔申请号：CN01820836.3
申请日：20011213
公开号：CN1529794A
公开日：
20040915
专利内容由知识产权出版社提供
摘要：一方面，本发明提供了一种包括真空处理腔和被放置在真空处理腔上的涡轮分子泵的真空处理系统。
涡轮分子泵包括具有进气口和出气口的壳体、被设置于壳体内壁的定子、被设置于定子内的转子以及与转子共轴设置的马达，其中至少泵的第一级被扩大，而且除了相应的外壳上部之外泵的其它部件没有相应扩大。
申请人：应用材料公司
地址：美国加利福尼亚州
国籍：US
代理机构：北京东方亿思专利代理有限责任公司
代理人：杜娟
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安捷伦涡轮分子泵结构
安捷伦涡轮分子泵结构1. 引言安捷伦涡轮分子泵是一种用于高真空和超高真空环境下的抽真空设备。
它采用了涡轮和分子撞击两种原理，能够快速、高效地将气体抽出真空室，广泛应用于半导体制造、光学薄膜沉积、电子显微镜等领域。
本文将对安捷伦涡轮分子泵的结构进行详细介绍，包括涡轮、分子撞击器、电机、轴承、控制系统等方面。
2. 涡轮安捷伦涡轮分子泵的核心部件是涡轮。
涡轮由多个叶片组成，通常采用钛合金材料制成。
叶片的形状和角度经过精确设计，以实现最佳的气体抽出效果。
涡轮通过电机驱动高速旋转，产生离心力，将气体向外抛出。
涡轮的转速通常可达到数万转/分钟，确保气体能够快速排出真空室。
3. 分子撞击器分子撞击器位于涡轮后部，用于进一步加速气体的排出。
分子撞击器由多个固定的撞击板组成，撞击板上布满了微小的孔，气体通过这些孔进入撞击器。
当气体分子进入撞击器后，由于撞击板上的孔很小，分子之间会发生频繁的碰撞，从而增加气体分子的速度。
随后，气体分子通过撞击器的出口，进一步被排出真空室。
分子撞击器的设计和制造对于提高分子泵的抽真空能力至关重要。
通过优化撞击板的孔径和间距，可以实现更高的抽真空速度。
4. 电机涡轮分子泵的电机是驱动涡轮旋转的关键部件。
电机通常采用无刷直流电机，具有高转速和高效率的特点。
无刷直流电机通过电子控制系统控制转速和转向。
电机通过轴与涡轮连接，将电能转化为机械能，实现涡轮的高速旋转。
电机的设计和制造需要考虑到高真空环境下的使用要求，确保电机的可靠性和稳定性。
5. 轴承涡轮分子泵的轴承用于支撑涡轮和电机，保证其正常运转。
轴承通常采用高精度陶瓷轴承或气体轴承。
高精度陶瓷轴承具有低摩擦、高刚度、耐高温等特点，适用于高速旋转的涡轮分子泵。
气体轴承则通过气体动压的原理，实现对涡轮的支撑和减震。
气体轴承具有低摩擦、无磨损、长寿命等优点。
轴承的选择和设计对于涡轮分子泵的性能和寿命有着重要的影响。
6. 控制系统安捷伦涡轮分子泵配备了先进的控制系统，用于监测和控制泵的运行状态。
涡轮分子泵使用注意事项
涡轮分子泵使用注意事项涡轮分子泵使用注意事项涡轮分子泵是一种高效、低噪音、干净的真空泵，广泛应用于半导体、光学、医疗等领域。
为了保证涡轮分子泵的正常工作和延长使用寿命，以下是一些需要注意的事项：一、安装前准备1. 确认涡轮分子泵的型号和规格是否符合实际需求，同时确认电源电压和频率是否与设备相匹配。
2. 在安装前应先检查涡轮分子泵的外观是否有损坏或变形，并检查各个接口处是否有松动或腐蚀。
3. 在安装前应清洁并擦干所有连接管路和接口，并确保所有连接件已经正确安装。
4. 安装时应将涡轮分子泵放置在平稳的地面上，并确保其与周围环境之间有足够的空间以便进行维护和散热。
二、启动前准备1. 在启动之前，应检查并确认所有电气接线已经正确连接，并检查机械部件是否紧固并无松动。
2. 启动之前必须先打开气体阀门并允许气体进入涡轮分子泵的内部，以避免因过度真空而损坏设备。
3. 启动之前必须先将气体阀门关闭，并检查并确认真空管路已经完全密封。
三、正常使用1. 在正常使用过程中，应每隔一定时间对涡轮分子泵进行清洗和维护，以保证其正常工作和延长使用寿命。
2. 在涡轮分子泵运行时，应确保其温度不超过规定范围，并避免在高温和高压环境下运行。
3. 在使用过程中，应注意避免机械部件的碰撞和损坏，并及时更换磨损严重的零部件。
4. 在停止使用之前，应先关闭所有气体阀门并等待涡轮分子泵内部压力下降到安全范围内后再进行拆卸或维护操作。
四、注意事项1. 涡轮分子泵不能用于抽取有毒、易燃、易爆或腐蚀性气体等危险气体。
2. 涡轮分子泵不能用于抽取粉尘、颗粒物质等易堵塞的气体。
3. 在使用过程中，应避免涡轮分子泵发生过热和过载现象，并及时采取措施降低温度和负载。
4. 在拆卸涡轮分子泵进行维护或清洗时，应先切断电源并等待设备冷却后再进行操作。
5. 在使用过程中，应注意保持涡轮分子泵的清洁，并及时更换油尘滤网和排气滤网等易积尘的部件。
总结：以上内容是关于涡轮分子泵使用注意事项的详细介绍。
质谱仪分子涡轮泵过热报错_解释说明
质谱仪分子涡轮泵过热报错解释说明1. 引言1.1 概述质谱仪作为一种重要的分析仪器，在化学、生物、医疗等领域具有广泛应用。
其中，分子涡轮泵作为质谱仪中的核心部件之一，起到提供真空环境和抽取样品气体的关键作用。
然而，在实际应用中，我们经常会遇到分子涡轮泵过热报错的问题，导致设备无法正常运行。
因此，对于质谱仪分子涡轮泵过热报错问题进行深入研究和解释具有重要意义。
1.2 文章结构本文将以以下几个部分来详细讨论质谱仪分子涡轮泵过热报错的问题及其解决方案。
首先，在第二部分将介绍质谱仪的原理以及涡轮泵的工作原理和作用，为读者提供必要的背景知识。
其次，在第三部分将展示实验验证与结果分析的内容，通过实验数据对过热报错问题进行进一步展开。
接着，在第四部分将探讨该问题的应用前景和发展方向，并提供相关技术创新与改进建议。
最后，在第五部分将总结本文的主要研究成果，并对未来研究的重点和发展方向进行展望。
1.3 目的本文旨在对质谱仪分子涡轮泵过热报错问题进行详细解释和说明，探讨其原因并提供相应的解决方案。
通过此篇文章，读者将能够深入了解该问题的影响和存在的局限性，同时也能够获取到关于技术创新和改进方向的建议和展望。
相信本文内容将为质谱仪领域中涡轮泵过热报错问题的研究提供有益参考，并对相关领域的技术发展产生积极影响。
2. 质谱仪分子涡轮泵过热报错解释说明2.1 质谱仪原理简介质谱仪是一种用于分析样品中化学物质的仪器。
其工作原理基于将样品中的分子通过电离转化为带电粒子，并在外加电场和磁场的作用下，按照其质量-电荷比进行分离和检测。
这一技术广泛应用于化学、生物、环境等领域，在科学研究和工业应用中起着重要作用。
2.2 涡轮泵工作原理及作用涡轮泵是质谱仪中常见的元件之一，主要起到输送气体（一般为氮气或氦气）的作用。
它采用了旋转式泵机构，通过高速旋转叶轮产生离心力，将气体吸入并排出。
涡轮泵具有结构紧凑、体积小、功耗低等优点。
2.3 过热报错原因分析和解决方案提供质谱仪分子涡轮泵过热报错是指在使用过程中，涡轮泵温度超过安全范围，导致仪器出现故障。
莱宝磁悬浮分子泵使用说明
莱宝磁悬浮分子泵使用说明真空技术**的先锋和引导者1850年莱宝公司成立1880年首台商用真空泵1905年*台旋片泵1911年*台分子泵1913年*台扩散泵1975年磁悬浮涡轮分子泵1997年中国天津工厂建立。
全球化的生产、销售及服务莱宝真空在全球拥有真空行业中较完善的销售和售后服务网络。
目前，莱宝真空在世界各地拥有20多家销售公司和30多家维修中心，并在70多个国家设有代表机构4个制造中心：莱宝法国公司，法国瓦朗斯莱宝总部德国科隆莱宝德累斯顿公司人民共和国莱宝（天津）32个销售及服务网点大于50个代理商/分销商1600名员工TURBOVAC 分子泵概述莱宝针对不同应用提供多个系列分子泵：TURBOVAC系列机械轴承分子泵；TURBOVAC MAG系列磁悬浮轴承分子泵；TURBOVAC i/iX 系列半磁悬浮分子泵（半磁悬浮分子泵仅在排气端配置脂润滑油轴承，高真空端配置免维护的永磁轴承）。
莱宝分子泵不采用润滑油轴承，既避免了对腔体产生碳氢化合物污染又能任意角度安装。
产品TURBOVAC系列半磁悬浮分子泵TURBOVAC 90 i/iX、250i/iX、（T）350i/iX和（T）450i/iX集成分子泵典型应用-分析仪器/科研--质谱仪—电子显微镜—表面分析仪—加速器和同步加速器—X射线分析仪—实验室镀膜系统—MBE--*高真空系统-生命科学—放射医疗--伽马射线灭菌--**植入物生产-工业和镀膜应用—PVD镀膜设备--光学镀膜设备—CD/DVD蓝光光碟生产—薄膜太阳能—进样室/转移室/传输室—电子束焊机—检漏/真空绝热技术特点TURBOVAC i-集成变频器，24/48V DC电源供电-切削成型转子和全新复合级设计使分子泵具有较佳性能和较大抽速，对轻质气体尤为**-任意方向安装-*高的可靠性源于**的轴承设计理念-设计灵活，适应性强-市场上一一款无油半磁悬浮分子泵-现场维护（更换轴承），维修成本低，时间短-通讯接口齐全（标配USB，RS485和15针数字I/O）TURBOVAC IX-集成真空系统控制配置灵活的通讯接口和附件控制接口（用于控制冷却单元，阀门，规管和前级泵等）-附件齐全，即插即用-适用性强，适合各类真空工艺TURBOVAC Ti，TIX-标准分子泵（不含复合级）-带气载能力强-耐粉尘-启动时间短客户得益TURBOVAC i-性价比较高-可靠性高-设计灵活性高，易于操作和与系统集成-运行成本低-抽速大，极限低-抽轻质气体（H2，He)的性能尤佳-适合与小前级泵配合使用TURBOVAC IX-配置即插即用的真空控制器-组成真空系统无需额外的控制器TURBOVAC Ti ，TiX -适合大气载应用-适合短节拍抽空应用。
涡轮分子泵极限真空
涡轮分子泵极限真空下载温馨提示:该文档是我店铺精心编制而成，希望大家下载以后，能够帮助大家解决实际的问题。
文档下载后可定制随意修改，请根据实际需要进行相应的调整和使用，谢谢!并且，本店铺为大家提供各种各样类型的实用资料，如教育随笔、日记赏析、句子摘抄、古诗大全、经典美文、话题作文、工作总结、词语解析、文案摘录、其他资料等等，如想了解不同资料格式和写法，敬请关注!Download tips: This document is carefully compiled by theeditor. I hope that after you download them,they can help yousolve practical problems. The document can be customized andmodified after downloading,please adjust and use it according toactual needs, thank you!In addition, our shop provides you with various types ofpractical materials,such as educational essays, diaryappreciation,sentence excerpts,ancient poems,classic articles,topic composition,work summary,word parsing,copy excerpts,other materials and so on,want to know different data formats andwriting methods,please pay attention!标题：涡轮分子泵在极限真空技术中的应用与优势一、引言在科学研究和工业生产中，极限真空环境的创建是一项关键任务，尤其在半导体制造、粒子物理实验、空间模拟、真空镀膜等领域。
电感耦合等离子体质谱仪(ICP-MS)在环境监测领域日常维护及故障排除
电感耦合等离子体质谱仪(ICP-MS)在环境监测领域日常维护及故障排除刘静波;张更宇【摘要】以珀金埃尔默公司(PE)生产的NexION300D为例,基于环境监测系统使用经验,总结了包括进样系统、等离子体源(ICP)、接口、透镜、四级杆分析器、检测器和内置于质谱仪中的真空系统,外连接冷却循环水及空气过滤网等部件日常维护要点,并对容易出现的点火问题、灵敏度低、氧化物高、精密度差、质量数8和220的背景值高、校准曲线异常等故障原因进行分析,并提出解决办法.认为未来电感耦合等离子体质谱仪(ICP-MS)与其它仪器联用技术的相关维护是ICP-MS从业者的挑战和机遇.【期刊名称】《中国无机分析化学》【年(卷),期】2017(007)004【总页数】6页(P102-107)【关键词】ICP-MS;日常维护;故障排除;环境监测【作者】刘静波;张更宇【作者单位】吉林市环境监测站,吉林吉林132012;吉林市环境监测站,吉林吉林132012【正文语种】中文【中图分类】O657.63;TH843前言电感耦合等离子体质谱（ICP-MS）法具有样品制备和进样技术简单、质量扫描速度快、运行周期短、所提供的离子信息受干扰程度小等优点。
对于大多数元素而言，有着极低的检出限。
几乎可以取代传统的元素分析技术，被公认为最理想的无机元素分析方法，已广泛应用于各个检测领域[1]。
近年来，随着国家对环保工作的日益重视，ICP-MS在环境监测领域，尤其环境重金属分析方面发挥着越来越重要的作用[2]。
环境样品种类繁多、复杂，低基体样品包含各类水样，主要有地表水、地下水、生活污水等，高基体样品包含工业废水、土壤、岩石、各类沉积物和工业废气等[3]。
这就对ICP-MS仪使用者提出更高的能力要求，一方面要加强ICP-MS仪日常维护和保养，减少复杂基体对仪器的负面冲击；另一方面要在出现故障时，正确诊断原因，及时解决问题，确保工作持续进行[4]。
笔者以珀金埃尔默（PE）公司生产的NexION300D为例，结合自身经验，对使用过程中日常维护及常见故障进行讨论分析。
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nEXT300D涡轮分子泵
nEXT300D是一款采用混合轴承的新型复合涡轮分子泵，用以代替EXT406PX ISO100涡轮分子泵，其接口法兰有ISO100和CF100两种，对N2的抽速为300l/s。
nEXT 在以前产品的基础上改进轴承技术，下轴承为油润滑陶瓷轴承，上轴承为永久性磁悬浮轴承，使得用户就可以自行维护；同时改进转子设计，增加一个分子拖曳级，提高了泵速和压缩比。
nEXT泵的电机驱动电压为24~48V DC，与DX泵和TIC控制器兼容，这样一台nEXT300D泵、一台TIC控制器、一个空冷或水冷附件，再选用一台合适的前级泵就可以组成一套基本的抽真空系统。
性能特点
●转子设计技术先进，大大提高抽气速率和压缩比。
●日常维护用户就可以进行，无需复杂工具，拆卸简单。
●设计紧凑，性能优越，利于系统集成。
●与Edwards TIC涡轮仪表控制器兼容，可以连接3个真空规，无需再配备其它真空规控制器。
●通过RoHS认证和CSA/UL认证。
性能曲线
安装尺寸
订货信息
技术参数
* 根据应用也可以使用较小的前级泵，可以使用极限真空小于5 mbar的隔膜泵，如XDD1。
† 高于该流速，转速将会下降到额定转速以下。
‡ 功耗80 W
空冷和水冷附件需另购。