硅片不良片判定

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不合格樣品參考圖片/定義

Chips

缺口/崩邊No V-type sharp

chip

Length of edge chip

≦ 5mm,

Depth ≦ 0.5mm,

No. of chip ≦ 3

ICOS PV Wafer

Inspector

Saw mark 切割線痕≦ 15μm (Depth)

1. 目視檢驗

2. 使用SJ-201量測

Crack and pin holes

裂痕與針狀列口None

不可有

ICOS Microcrack

Inspector

Micro-crack

Inclusions

Surface Cleanliness 表面潔淨度

As cut and cleaned,

No stains, scratch,

contamination,

watermark and

fingerprints

表面須清洗乾淨, 無可

見斑點, 玷汙及化學殘

留物Contaminations

ICOS PV Wafer

Inspector Standard Wafer Specification

外觀

檢驗項目檢驗規格檢驗工具

Micro-crack, pitting holes and inclusions 內部微裂痕, 凹陷與內含物Non-penetrating,

None penetrating

micro crack,

inclusions and

holes 不可有

ICOS Microcrack

Inspector

2F-11, No.32, Jiajheng 9th St., Jhubei City, Hsinchu County 302, Taiwan R.O.C.

Page 1 of 3

Angle between

square sides 直角角度90 ± 0.3 deg.-

ICOS PV Wafer

Inspector

Bevel edge

width (hypotenuse)斜邊長1.5 ± 0.5 mm

Bevel edge

angle

斜邊角度

45 ± 10 deg. Length of wafer

edge 邊長156 ± 0.5 mm

ICOS PV Wafer

Inspector

Thickness

厚度

200 ± 20 μm Semilab WLT-5

TTV

厚度變異數

≦ 40 μm Semilab WLT-5

Bow

彎曲度

≦ 50 μm非接觸電容式測試儀

Warp/Warpage

撓曲度

< 100 μm

Dopant 摻雜型態P型-Semilab WLT-5

Resitivity 電阻率0.5 Ω-cm-Semilab WLT-5

Lifetime 少子壽命≧ 1.0μs (wafer-

level)

-Semilab WLT-5

電阻

尺寸

Page 2 of 3

Carbon

concentration 碳含量

≦ 1x 1018 atms/cm 3

-

Oxygen

concentration 氧含量≦ 8 x 1017atms/cm

3

-其他開箱破片

一片換一片

-

Seller

Buyer

Dazz Sun Energy Industry Company Limited

Date: Date: February 4, 2010

Please signed back if agreed above standard specification

電阻Page 3 of 3

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