气体流量计算

1.65 1.65 1.65 1.65 1.65 1.65 2.1 2.1 2.1 2.1 2.8 2.8 2.8
18.4 23.9 30.7 39.4 45.3 57.2 72.1 84.9 97.4 110.1 134.2 159.6 210.7
2.66E-04 4.49E-04 7.40E-04 1.22E-03 1.61E-03 2.57E-03 4.08E-03 5.66E-03 7.45E-03 9.52E-03 1.41E-02 2.00E-02 3.49E-02
4719.97 1641.81 944.60 395.22 202.01 121.90 81.47 58.27 43.73 28.06 19.03 13.75 10.40 8.14 8.14 5.48 3.87 2.22
6031.09 2097.88 1207.00 505.00 258.12 155.76 104.10 74.45 55.88 35.85 24.32 17.57 13.29 10.40 10.40 7.00 4.95 2.84
66791.4 4007.5 5 25 (m/s)
(m/s) LV
(m/s) LV
(m/s) LV
(m/s) LV
(m/s) LV
(m/s) LV
(m/s) LV
(m/s) LV
(m/s) LV
1.49E-05 4.45E-05 8.99E-05 1.96E-04 3.84E-04
268.44 89.58 44.37 20.35 10.40
Note: 1kg/cm2 ≈ 1atm
4070.5 244.2 5 25
5380.9 322.Baidu Nhomakorabea 5 25
8579.2 514.8 5 25
13630.9 817.9 5 25
18900.4 1134.0 5 25
24875.6 1492.5 5 25
31785.5 1907.1 5 25
47223.7 2833.4 5 25
6031.09 2097.88 1207.00 505.00 258.12 155.76 104.10 74.45 55.88 35.85 24.32 17.57 13.29 10.40 10.40 7.00 4.95 2.84
8960.37 3116.81 1793.23 750.28 383.49 231.41 154.66 110.61 83.01 53.26 36.13 26.11 19.74 15.45 15.45 10.40 7.35 4.22
243.00 84.53 48.63 20.35 10.40 6.28 4.19 3.00 2.25 1.44 0.98 0.71 0.54 0.42 0.42 0.28 0.20 0.11
402.70 140.08 80.59 33.72 17.24 10.40 6.95 4.97 3.73 2.39 1.62 1.17 0.89 0.69 0.69 0.47 0.33 0.19
4.572 0.0000164173607136 7.752 0.0000471974380416 10.22 0.00008203377336 15.8 0.000196067 22.1 0.000383597 28.45 0.000635705 34.8 0.000951151 41.15 0.001329935 47.5 0.001772059 59.3 0.002761851 72 0.004071514 84.7 0.00563453 97.4 0.007450901 110.1 0.009520627 110.1 0.009520627 134.2 0.014144771 159.6 0.020005834 210.7 0.034867432
12673.21 4408.30 2536.28 1061.17 542.39 327.29 218.75 156.44 117.41 75.33 51.10 36.93 27.92 21.85 21.85 14.71 10.40 5.97
LV(m / s) =
LPM m3/hr kg/cm2 t Tube 1/4" 3/8" 1/2" 3/4" 1" O.D (mm) 6.35 9.53 12.7 19.1 25.4 Flow(Q) Flow(Q) Pressure(P) Temperature(T) T (mm) 1 1 1 1.65 1.65 I.D (mm) 4.35 7.53 10.7 15.8 22.1 LPM(l/min) m3/hr kg/cm2 ° A(m2)
1122.56 390.47 224.66 94.00 48.04 28.99 19.38 13.86 10.40 6.67 4.53 3.27 2.47 1.94 1.94 1.30 0.92 0.53
1749.57 608.58 350.14 146.50 74.88 45.18 30.20 21.60 16.21 10.40 7.05 5.10 3.86 3.02 3.02 2.03 1.44 0.82
602.53 209.59 120.58 50.45 25.79 15.56 10.40 7.44 5.58 3.58 2.43 1.76 1.33 1.04 1.04 0.70 0.49 0.28
842.48 293.05 168.61 70.54 36.06 21.76 14.54 10.40 7.81 5.01 3.40 2.45 1.86 1.45 1.45 0.98 0.69 0.40
2849.18 950.84 470.90 215.97 110.39
3942.95 1315.86 651.68 298.87 152.76
5214.02 1740.05 861.75 395.22 202.01
6662.38 2223.40 1101.13 505.00 258.12
6662.38 2223.40 1101.13 505.00 258.12
2579.21 897.16 516.17 215.97 110.39 66.61 44.52 31.84 23.90 15.33 10.40 7.52 5.68 4.45 4.45 2.99 2.12 1.21
3569.34 1241.57 714.33 298.87 152.76 92.18 61.61 44.06 33.07 21.22 14.39 10.40 7.86 6.15 6.15 4.14 2.93 1.68
9898.28 3303.30 1635.95 750.28 383.49
13999.76 4672.07 2313.83 1061.17 542.39
15A 20A 25A 32A 40A 50A 65A 80A 90A 100A 125A 150A 200A
21.7 27.2 34 42.7 48.6 60.5 76.3 89.1 101.6 114.3 139.8 165.2 216.3
0.64 0.38 0.23 0.14 0.11 0.07 0.04 0.03 0.02 0.02 0.01 0.01 0.00
1.85 1.09 0.66 0.40 0.30 0.19 0.12 0.09 0.07 0.05 0.03 0.02 0.01
3.21 1.90 1.15 0.70 0.53 0.33 0.21 0.15 0.11 0.09 0.06 0.04 0.02
444.86 148.46 73.52 33.72 17.24
665.60 222.13 110.01 50.45 25.79
930.67 310.59 153.82 70.54 36.06
1240.06 413.84 204.95 94.00 48.04
1932.70 644.99 319.43 146.50 74.88
Q(m3 / hr) 1.033 273+ T * * 2 3600* A(m ) P(atm) + 1.033 273
49.6 3.0 5 25 LV (m/s) 10.40 3.83 1.90 0.87 0.45 LV (m/s) 33.03 10.40 5.46 2.50 1.28 148.7 8.9 5 25 LV (m/s) 57.41 19.16 10.40 4.35 2.22 300.2 18.0 5 25 LV (m/s) 137.20 45.79 22.68 10.40 5.32 654.6 39.3 5 25 LV 1280.7 76.8 5 25 (m/s) LV 887.7 53.3 5 25 (m/s) LV 1497.8 89.9 5 25 (m/s) LV 2471.3 148.3 5 25
1 l/min＝0.06m3/hr
Bulk Gas 一般流速为10m/s (压力7.5kg/cm2); Ar、He < 10~15m/s; SiH4、PH3<5m/s; CO2、NH3<1~5m/s Special Gas : NH3、N2O、HCL、BCL3、HF、HBr、SF6等液态气体，流速应小于1m/s 一般气态钢瓶10m/s，液态钢瓶则蒸汽压愈低，流速要愈慢，否则管件上将生结露现象，影响Regulator的准确性 LPM m3/hr kg/cm2 t Tube 1/4" 3/8" 1/2" 3/4" 1" 1 1/4" 1 1/2" 1 3/4" 2" 2 1/2" 3" 3 1/2" 4" 4 1/2" 100A 125A 150A 200A Flow(Q) Flow(Q) Pressure(P) Temperature(T) O.D (mm) 6.35 9.53 12.7 19.1 25.4 31.75 38.1 44.45 50.8 63.5 76.2 88.9 101.6 114.3 114.3 139.8 165.2 216.3 T (mm) 0.889 0.889 1.24 1.65 1.65 1.65 1.65 1.65 1.65 2.1 2.1 2.1 2.1 2.1 2.1 2.8 2.8 2.8 I.D (mm) LPM(l/min) m3/hr kg/cm2 ° A(m2) LV (m/s) 10.40 3.62 2.08 0.87 0.45 0.27 0.18 0.13 0.10 0.06 0.04 0.03 0.02 0.02 0.02 0.01 0.01 0.00 73.0 4.4 7 25 LV (m/s) 29.90 10.40 5.98 2.50 1.28 0.77 0.52 0.37 0.28 0.18 0.12 0.09 0.07 0.05 0.05 0.03 0.02 0.01 209.8 12.6 7 25 LV (m/s) 51.97 18.08 10.40 4.35 2.22 1.34 0.90 0.64 0.48 0.31 0.21 0.15 0.11 0.09 0.09 0.06 0.04 0.02 364.7 21.9 7 25 LV (m/s) 124.20 43.20 24.86 10.40 5.32 3.21 2.14 1.53 1.15 0.74 0.50 0.36 0.27 0.21 0.21 0.14 0.10 0.06 871.6 52.3 7 25 LV 1705.2 102.3 7 25 (m/s) LV 2825.9 169.6 7 25 (m/s) LV 4228.2 253.7 7 25 (m/s) LV 5912.1 354.7 7 25 (m/s) LV 7877.5 472.6 7 25 (m/s) LV 12277.5 736.6 7 25 (m/s) LV 18099.4 1086.0 7 25 (m/s) LV 25047.6 1502.9 7 25 (m/s) LV 33122.1 1987.3 7 25 (m/s) LV 42322.8 2539.4 7 25 (m/s) LV 42322.8 2539.4 7 25 (m/s) LV 62878.8 3772.7 7 25 (m/s) LV 88933.4 5336.0 7 25 (m/s)