曝光常用系统参数说明

第一部分WAFER EXPOSURE PARAMETERS

如何打开系统参数：

●6型，7型，8型机用命令“Gped sys_ param_file”

●其他曝光机在主界面上选择“SETUP”，再选择“SET SYSTEM PARAMETERS”。

1Judgement for focus shot :on/off

简单说明：

一般情况下，在NIKON曝光程序对应的SHOT MAP 中有两种符号“+”和“* ”。其中

“* ”代表对应的BLOCK的中心在距离圆片边缘3mm以内。曝光时，此BLOCK可以执行AUTO FOCUS 。“+”代表对应的BLOCK的中心在距离圆片边缘3mm以外。曝光时，此BLOCK不可以执行AUTO FOCUS。

“*”对应的SHOT 称为：focus shot。

“+”对应的SHOT 称为：fixed focus shot。

ON:Performs focus shot/fixed focus shot judgment during exposure and determines the shot on the basis of the result.

OFF: Sets all the shots for which”+” has been specified on the shot map data of exposure data as fixed focus shots .However,focus shots are judged again.

此参数功能举例说明：

下图产品SS169的曝光图。在曝光时，最右边一列的红色的“*”是经常发生边缘聚焦的位置。（因为此位置距离边缘太近了，在执行AUTO FOCUS 时，容易得到错误的信息）针对这种情况，我们可以把“*”改成“+”。并且把系统参数设置为Judgement for focus shot :off. （8型机默认“*”和“+”

之间的区别，不用修改系统参数）

* * * *

* * * * * * * +

+ * * * * * * * *

* * * * * * * * * *

* * * * * * * * * *

* * * * * * * * * +

* * * * * * * *

* * * * * *

上述功能NIKON资料："change a focus shot (*)to a fixed focus shot (+) on the shot map and to skip auto focus operation,set the "judgement of focus shot"system parameter to "off".If it isset to "on" the focus shot change on the shot map is ignored.

2 Shift focus position: intrashot/shot shift

简单说明

当一个BLOCK不能执行AUTO FOCUS 功能时，他就会执行SHIFT FOCUS 。此功能就是用来确定在什么位置执行Shift focus

intrashot: Exeuted at a point in the shot where focusing is possible .A new focusing position is set within the area ih the shot where focusing is possible,and then focusing is done there.(After focusing ,the stage retures to the exposure position and exposure the shot is exposed)

Shot shift :Executes at the center of a focusing substitute shot .When the center of the exposure is in an area where focusing cannot be done ,substutute shots in the vicinity are specified ( within a maximum of 24 shots),and focusing is done at the center of the substitute shot.

此参数功能举例说明

当曝光MAP图中BLOCK对应的SHOT为“+”时，就会执行SHIFT FOCUS 。一般情况下，光刻胶并不是理想化的平坦，于是当处于边缘的BLOCK执行SHIFT FOCUS 时，选择INTRASHOT 来执行SHIFT FOCUS 比较容易得到正确的信息。•

•Shift focus position用于定义无法进行Auto-focus的曝光Shot在进行Shift focus的时候是偏移一个曝光Shot进行还是在Shot内偏移到满足Focus条件的位置进行。一般而言，Intra shot偏移的距离较短，更接近真实情况，需要重新评估。

3 No shift focus /shift focu s

简单说明

Shift focus用于定义无法进行Auto-focus的曝光Shot的Focus是沿用上一个曝光Shot的位置还是通过

进行Shift focus确定。

No shift focus :Performs exposure using the focus position of the previous shot .(This is

called a fixed focus shot)

Shift focus: The shift focusing method is determined by the sequence mode “shot shift”

4No leveling/ leveling/shift leveling/ refer to pp

简单说明

此参数用来规定在圆片曝光时采用那种LEVELING方式。

No leveling: Does not execute leveling.

Leveling: Executes leveling on the shots for which leveling can be executed at the exposure position.

Shift leveling: Executes leveling by shift the leveling detection position toward the inside if the shot center is in an area that can be focused .And at which shift leveling can be executed.

Refer to pp: Determines the leveling execution mode according to the apecification in the exposure data.

此参数功能举例说明：

•Leveling用于修正圆片工艺面与Stepper像面的不重合，降低圆片工艺面不平整对工艺产生的影响，一般在关键层次设置为Leveling on或Shift leveling。但对于Metal、VIA、PAD等层次，特别是VIA、PAD 层次，Leveling on时常产生Leveling error的错误，现在均设置为OFF，对于Metal层次需要重新评估。

目前找平开关设置要求如下：

1、0.5um及其以下工艺的TO、BN、GT、PR、RO、W1（共6个层次）程序中找平模式设置为LEVELING

或SHIFT LEVELING，作业时不需要对找平模式进行更改；

2、0.6um的TO、GT程序中找平模式设置为LEVELING或SHIFT LEVELING，作业时不需要对找平模式

进行更改；

3、 0.6um及其以下工艺的M1层次（除在PENKI85作业时按程序默认找平式，即NO LEVELING作业

外）作业时均需要开LEVELING或SHIFT LEVELING；

4、其余的均为NO LEVELING（即作业时不需要修改找平模式，程序已设置为NO LEVELING