PCB行业现场稽查要点

"Is there a pre-startup checklist for the preclean line? Is it

current(completely filled in)?

针对预清洁线是否有建立预先点检表单？是否已经执行（已经填写）？"

"Is there objective evidence that the scrub/preclean chemistries are being analyzed by the laboratory on the documented frequency?

刷磨/预清洁化学药水是否有证据证明其有按照实验室文件规定的频率进行分析？

"

"Are Dump and Remake schedules documented for the preclean line and objective evidence exist that they are being adhered too?

是否有证据证明预清洗倾槽与更曹计划有符合文件要求？"

"Is there an evidence to demonstrate that all chemicals are monitored and controlled as listed in WI?

是否有证据证明所有的化学品与WI上管控的物质有监督并管控？"

"Is all in-process WIP and materials properly identified and controlled in designate area?

所有制程上的WIP与相应制定材料是否管控在制定的工作区内？"

"Is a water break test performed every shift to ensure quality of pre-clean?槽液测试是否每班测试一次以确保预清洁品质良好？"

"Is their positive air pressure from the cleanroom at the preclean line entrance into the cleanroom?

无尘室的预清洁线入口到无尘室是否有良好的压力？"

Imaging 干膜

"Is the cleanroom well controlled by temperature, humidity and particles which meet 10K Max. requirement and out of control notification? Review objective evidence.

无尘室的温度，湿度与尘埃粒子是否按照10K最高要求管控，并且有管控实效通知系统？

审核客观证据."

"Are the resist lamination and exposure areas in the cleanroom utilizing yellow lighting and do all exterior windows have UV blocking film?

无尘室的压膜与曝光区是否用的是黄灯并且所有的外部窗户使用的是UV膜？" "Is there objective evidence to demonstrate that all dry films and/or liquid resist are stored in temperature and humidity control environment? Also, inventoried under FIFO with expired date control?

是否有证据可以证明干膜或是湿膜储存在温度与湿度管控的环境内？并且，到期管控有先进先出目录？"

"Are there tacky roller clean machines in front of the laminator?

在压膜前是否有粘尘滚轮清洁机器？"

"For dry film lamination, is the temperature of the lamination roller checked and verified using an infrared meter?

针对干膜压膜，是否检查了压膜滚轮的温度并使用红外线表进行确认？"

"Is there a documented resist inspection criteria with pass/fail guidelines?

是否有文件规定的干膜检验标准指导书以判定接受或判退？"

"Is all in-process WIP and materials properly identified and

controlled in designate area? Including expiration date on age sensitive material?

所有的制程WIP与材料是否有相应的定义并管控在制定区域？包括老化敏感材

料有效期过期？"

"Is there a documented resist strip/rework procedure with the maximum number of reworks identified?

是否有文件规定干膜剥膜/重工程序有定义最大的重工次数？"

"For dry film lamination, is the temperature of the lamination roller checked and verified using an infrared meter?

对干膜压膜，是否有对压膜滚轮温度进行检验并对红外线表表进行确认？"

"Is there a latest revision control on working film?

是否对工作菲林的最新版本进行管控？"

"Is there an evidence that a maximum number of exposures has been established and the number of exposure times of working film is monitored? 是否有证据表明管控了曝光的最大次数并对工作菲林曝光次数进行监控？"

"Is the artwork cleaned after defined exposure times using tacky roller? Review the condition of the tacky rollers.

在确定曝光次数后，是否使用粘尘滚轮对底片进行清洁？审核粘尘滚轮的状况？"

"Are there tools and procedures with tolerance limits in place for front-to-back registration verification during the artwork setup? Is it identified as a critical SPC parameter?

在底片设计阶段，是否确认了前后对准度的工具/制程最大公差？是否被定义为关键SPC参数？"

" Is the front to back verified during this process?

在这些制程是否对上下对准度进行确认？"

"Is the maximum number of permissible exposures documented with a system to track the number of exposures?

可允许的最大曝光次数是否有文件规定并有相应的系统对其跟踪？"

"Is there an evidence that the number of exposure times of working film is monitored and the artwork is not being used beyond documented useful life?

是否能证明菲林的曝光次数有进行监控并且底片没有超出文件规定的使用期限？"

" Is the max holding time between expose and develop documented and followed?

曝光和显影之间是否文件规定最大的静置时间并有按照此要求执行？"

"Is their a pre-startup checklist for the DES line? Is it

current(completely filled in)?

DES 线是否有预启动点检表？是否已经进行（有完整地填写）？"

"Is there an evidence to demonstrate that all chemicals are monitored and