材料科学中电子显微镜的各种技术介绍
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材料科学中电子显微镜 的各种技术介绍
路漫漫其悠远
2020/7/17
1、Introduction
1.Signals generated in the interaction between the incident high energy electron beam and the thin crystalline specimen 2.How to form a probe 3.Relationship between TEM, SEM and AEM 3.1 TEM
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
3、Microanalysis in AEM
3.1 X-Ray quantitative microanalysis 3.1.1 X-Ray signal generation in TEM thin foil specimens 3.2.2 Identification and elimination of spurious signals 3.2.3 Optimization of the AEM for microanalysis 3.2.4 X-Ray microanalysis 3.2.5 Microanalysis limit
路漫漫其悠远
路漫漫其悠远
3.2 SEM Image mode: SE, BSE, X-Ray Mapping Microanalysis: WDS, EDS
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
3.3 AEM Imaging mode: TEM, STEM, SEM, Mapping (X-Ray + EELS) Diffraction mode: Scanning probe Stationary diffraction pattern Microanalysis: EDS, EELS, Micro-diffraction, Convergent beam diffraction
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
2、Imaging in AEM
2.1.TEM 2.2.STEM - Scanning transmission electron microscopy 2.3.STEM/SEM imaging 2.4.Signal mixing - Hybrid imaging 2.5.X-Ray and EELS mapping
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
How to form a pBaidu Nhomakorabeaobe ?
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
Detectors needed for an AEM
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
Image mode Diffraction mode 3.2 SEM Image mode: SE, BSE, X-Ray Mapping Microanalysis: WDS, EDS 3.3 AEM Imaging mode: TEM, STEM, SEM, Mapping (X-Ray + EELS) Diffraction mode: Scanning probe Stationary diffraction pattern Microanalysis: EDS, EELS, micro-diffraction, convergent beam diffraction
3.Relationship between TEM, SEM and AEM
3.1 TEM Image mode Diffraction mode
3.2 SEM Image mode: SE, BSE, X-Ray Mapping Microanalysis: WDS, EDS
3.3 AEM Imaging mode: TEM, STEM, SEM, Mapping (X-Ray + EELS) Diffraction mode: Scanning probe Stationary diffraction pattern Microanalysis: EDS, EELS, micro-diffraction, convergent beam diffraction
Z ～ 27 (Cobalt L shell) Z ～ 57 (lathanlum M shell)
3.3 Comparison between EDS and EELS
路漫漫其悠远
路漫漫其悠远
X-Ray signal generation in TEM thin foil specimens
Fluorescence yield (w): w = 0 for Z ～ 5 (Boron k shell ionization)
3.2 EELS - Electron Energy Loss Spectroscopy 3.2.1 energy loss process in thin foil TEM specimens 3.2.2 Where to find the energy loss electrons? 3.2.3 Electron energy loss spectrometer 3.2.4 Comparison of the signal generating process for EDS and EELS 3.2.5 The energy loss spectrum 3.2.6 EELS Microanalysis and the limit of analysis 3.2.7 Conclusion remarks
路漫漫其悠远
2020/7/17
1、Introduction
1.Signals generated in the interaction between the incident high energy electron beam and the thin crystalline specimen 2.How to form a probe 3.Relationship between TEM, SEM and AEM 3.1 TEM
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
3、Microanalysis in AEM
3.1 X-Ray quantitative microanalysis 3.1.1 X-Ray signal generation in TEM thin foil specimens 3.2.2 Identification and elimination of spurious signals 3.2.3 Optimization of the AEM for microanalysis 3.2.4 X-Ray microanalysis 3.2.5 Microanalysis limit
路漫漫其悠远
路漫漫其悠远
3.2 SEM Image mode: SE, BSE, X-Ray Mapping Microanalysis: WDS, EDS
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
3.3 AEM Imaging mode: TEM, STEM, SEM, Mapping (X-Ray + EELS) Diffraction mode: Scanning probe Stationary diffraction pattern Microanalysis: EDS, EELS, Micro-diffraction, Convergent beam diffraction
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
2、Imaging in AEM
2.1.TEM 2.2.STEM - Scanning transmission electron microscopy 2.3.STEM/SEM imaging 2.4.Signal mixing - Hybrid imaging 2.5.X-Ray and EELS mapping
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
How to form a pBaidu Nhomakorabeaobe ?
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
Detectors needed for an AEM
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
路漫漫其悠远
Image mode Diffraction mode 3.2 SEM Image mode: SE, BSE, X-Ray Mapping Microanalysis: WDS, EDS 3.3 AEM Imaging mode: TEM, STEM, SEM, Mapping (X-Ray + EELS) Diffraction mode: Scanning probe Stationary diffraction pattern Microanalysis: EDS, EELS, micro-diffraction, convergent beam diffraction
3.Relationship between TEM, SEM and AEM
3.1 TEM Image mode Diffraction mode
3.2 SEM Image mode: SE, BSE, X-Ray Mapping Microanalysis: WDS, EDS
3.3 AEM Imaging mode: TEM, STEM, SEM, Mapping (X-Ray + EELS) Diffraction mode: Scanning probe Stationary diffraction pattern Microanalysis: EDS, EELS, micro-diffraction, convergent beam diffraction
Z ～ 27 (Cobalt L shell) Z ～ 57 (lathanlum M shell)
3.3 Comparison between EDS and EELS
路漫漫其悠远
路漫漫其悠远
X-Ray signal generation in TEM thin foil specimens
Fluorescence yield (w): w = 0 for Z ～ 5 (Boron k shell ionization)
3.2 EELS - Electron Energy Loss Spectroscopy 3.2.1 energy loss process in thin foil TEM specimens 3.2.2 Where to find the energy loss electrons? 3.2.3 Electron energy loss spectrometer 3.2.4 Comparison of the signal generating process for EDS and EELS 3.2.5 The energy loss spectrum 3.2.6 EELS Microanalysis and the limit of analysis 3.2.7 Conclusion remarks