专业英语18.ppt

❖ Figure I shows the relationship between the APC System and Toshiba's computer integrated manufacturing (CIM).The APC System has been designed in response to demands for output of process control parameter calculation results by the equipment control system. So as to allow the control algorຫໍສະໝຸດ Baiduthms described later free access to CIM system data, the APC System supports a Manufacturing Execution System (MES) and an interface for a data server..
at low overhead, all sorts of process controls and to incorporate them rapidly into the production line. The APC System contributes to reduced product development time. quicker development of control expertise and improved yield on the production line.
Advanced Process Control
System
INTRODUCTION
❖ Conventionally, process technology has advanced in tandem with device technology, responding to the requirements for smaller device dimensions. However, the rapid progress in precision technologies has created a problem; namely, that the demands of device design are not being met sufficiently because of performance limitations in newly developed processes.
However, to apply the above control mechanisms to current manufacturing systems requires the development of specific process control programs and associated modifications to the manufacturing system, resulting in huge development overheads (in cost, time and labor). Consequently, there is a certain delay inherent in the introduction of process control programs to the production line. The APC System was developed in order to create functions for developing
❖ The problem is exhibited in narrower process margins and lower product yields. To solve this problem, the following methods can be used:A control method in which, using various types of data obtained during device manufacture (such as test data and data from the production equipment), control values are fed forward and back between each process or item ofequipmentCorrection of control values using the QC data for the production equipment and the methodology
❖ Figure 6 shows the rate at which new recipes for each process are being registered in the production equipment. Table I compares the rate at which new recipes are registered in the production equipment on the trial line with the rate at which APC System process control algorithms are being implemented.
❖ Since the APC System is object-oriented, with its design based on the SEMATECH framework, the function creation facility and the interface are standardized. Thus, the APC System can easily be integrated into various MESS and equipment control systems.