eetop[1].cn_TCAD Sentaurus Tutorial

TCAD Sentaurus Tutorial

These modules are intended as an introduction to using the TCAD Sentaurus tool suite. They are designed specifically for new users and provide examples with which to begin using the tools. Module Description

Tool

Overview

An overview of the TCAD Sentaurus tool suite is presented.

Module Time: 30 minutes

Sentaurus Workbench Sentaurus Workbench is the primary graphical front end that integrates TCAD Sentaurus simulation tools into one environment. It is used to design, organize, and run simulations. Module Time: 2 hours

Ligament Ligament is a generic interface for TCAD process simulation. The Ligament environment is designed to set up and perform TCAD simulations at a high level of abstraction.

Module Time: 1 hour and 40 minutes

Sentaurus Process Sentaurus Process is a complete and highly flexible multidimensional process modeling environment. It constitutes a solid base for process simulation.

Module Time: 5 hours and 50 minutes

Sentaurus Structure Editor Sentaurus Structure Editor is a 2D and 3D device editor, and 3D process emulator. It is based on CAD technology, features a powerful graphical user interface, and is fully scriptable.

Module Time: 4 hours and 10 minutes

Sentaurus Mesh Sentaurus Mesh is a modular Delaunay mesh generator of high-quality spatial discretization grids for complex 2D and 3D devices. It integrates two mesh engines: the axis-aligned mesh generator and the tensor-product mesh generator.

Module Time: 3 hours 30 minutes

Noffset3D Noffset3D is a mesh generator that creates triangles and rectangles in 2D, and tetrahedra in 3D. It is designed for simulators such as Sentaurus Device and Sentaurus Process that

use the box method as a discretization method.

Module Time: 1 hour and 30 minutes

Sentaurus Device Sentaurus Device simulates the electrical, thermal, and optical characteristics of semiconductor devices. It is the leading device simulator and handles 1D, 2D, and 3D geometries, mixed-mode circuit simulation with compact models, and numeric devices. Module Time: 4 hours and 30 minutes

Tecplot SV Tecplot SV is a plotting tool with extensive 2D and 3D capabilities for visualizing data from simulations and experiments.

Module Time: 2 hours

Inspect Inspect is a plotting and analysis tool for xy data such as doping profiles and electrical characteristics of semiconductor devices.

Module Time: 1 hour and 45 minutes

Tool Command Language Several TCAD Sentaurus products use the tool command language (Tcl), and it is advantageous to know some basics about Tcl.

Module Time: 1 hour and 20 minutes

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