晶圆切割刀片技术资料

Blades Type (cont.)
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Blade type and binders: " Sintered:
# These blades are very flat and have an accurate thickness. # Used mainly for PBGA ,TiC, Quartz and glass. # Very brittle binder. # Thickness varies between 5 to 30 mil.
Cut Quality/Throughput Diamond High Low Concentration
Better Cut Quality Better Chipping Size
Better Blade Life Higher Load Affect Cut Quality
Cut Quality/Throughput
Dicing Tools Products
Diamond size Micron Nickel Blade 30,50,70 3-6,10,17 2-4,4-8,10 2-4,3-6 4-8 2-4,3-6 Steel Core Ni Blades 30,50,70 Resinoid Blades 53,88,105 53,63,88 15,20,30 6,9 30,45 Sintered Blades 9,15,25 30,50 9,10,15 Blade Type Product PBGA,PCB Magnetic & Tape Heads Ultrasound Sensors Active Devices (Discreet) SAW Devices IC's MLC (Multi Layer Capacitors) CBGA Ceramic Packages SAW Devices Tape for VTR Ink Jet Print Heads , Fiber Optics Magnetic Heads PBGA Fibers Optics Material FR4, Plastic&BT Resin TiC & Ferrite PZT GaAs LiNbO3,LiTaO3 Silicon Green Ceramic Alumina Alumina Quartz,LiNbO3,LiTaO3 Ferrite Glass,Quartz TiC Plastic&BT Resin Glass,Quartz
Blade Parameters
to be Defined/Optimized
•Binder Type : Nickel , Resin , Sintered , Steel Core •Dimension : OD , ID , Thickness & Thickness tolerance •Edge Geometry : Standard , Serrated (#of serration) , Angled •Abrasive : Diamonds , CBN , Others Grit size , Concentration , Type •Matrix : Hard , Soft
Better Blade Life Better for thick substrates
Cut Quality/Throughput Diamond Grit Coarse Fine Size
Better Cut Quality Smaller Chipping Size
Better Blade Life Affect Cut Quality
Cut Quality/Throughput Process Parameters Blade :
•Diameter •Binder •Matrix Hardness •Thickness •Grit Size •Diamond Concentration •Edge
Cut Quality/Throughput
Higher blade wear Better Cut Quality Better Chipping Size
Better Blade Life Higher Load Affect Cut Quality
Cut Quality/Throughput Blade Thickness
Smaller Kerf Higher throughput/subst.
Dicing Tools August 2001
Dicing Products: Blades & Flanges
Large variety of dicing tools to support every dicing application :
Steel Core Ni Blades Sintered Blades
Cut Quality/Throughput Mounting
Tape , UV Tape ! Lava - abrasive material -> unload blade -magnetic heads ! Crystal bond - strong adhesion -> load bladeceramic packages ! Special designed fixtures -automation ! Wax - good adhesion -> load the blade ! Glass , Ceramic substrates -stiff material - avoid back side chipping ; wear blade->new diamonds layers
"
Nickel:
# Very common for soft materials such as PBGA ,PCB, PZT, Green Ceramic and Silicon. Also for the TiC and Ferrite # The Nickel binder grows together with the diamonds so all the volume of the blade is equally filled with diamonds. # Thickness varies between 0.6 to 15 mil.
"
Resinoid:
# Soft blades that are self dressed. # Can be used for almost all materials with good results. # High blade wear. # Diamond grit size ranges from 3 to 200 mic. # Thickness varies between 3 to 50 mil.
D
d
Cut Quality/Throughput
Diamond / Matrix Binder
Nickel Bond
Hard sharp edge Nickel Diamond
Sintered Bond
Resin Bond
High temperatures Resin
Diamond
Cut Quality/Throughput
Kerf width is not as accurate as on regular blades
Vibrations
Better cooling due to serrations
Longer life Chipping increases
Cut Quality/Throughput
Blade Exposure
Cut Quality/Throughput Spindle Speed
To be optimize per application
Cut Quality/Throughput Spindle Speed
Range of R.P.M. on Main Applications:
TiC, land definition TiC, cutting through Silicon Hard alumina Green ceramic, wet Green ceramic, dry Sapphire, S.O.S. Quartz Ferrites Glass Silicon on 2” saws Nickel blade Nickel blade Nickel blade Resinoid blade Nickel blade T. Carbide blade Resinoid blade Resinoid blade Nickel blade Resinoid blade Resinoid blade Nickel type blade 12-14K R.P.M. 12-15K R.P.M. 18-20K R.P.M. 14K R.P.M. 12-16K R.P.M. 10K R.P.M. 8-10K R.P.M. 8-10K R.P.M. 14-18K R.P.M. 10-14K R.P.M. 12-14K R.P.M. 30-60K R.P.M.
Special Slots are Available
Cut Quality/Throughput
Blade Edge - Serrated Blades
Advantages Disadvantages
Less contact between edge and substrate
Less load during cutting
Maximum Recommended Blade Exposure : ! Nickel Blades : Blade thickness X 30 ! Resin Blades Blade A Exposure Blade thickness X 10 ! Sintered Blades Blade thickness X 20 Minimum Recommended Blade Exposure : ! A = min .300mm (12mil)
Blades Type
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Blade type and binders: " Steel Core:
# The hardest binder in use. # The diamonds on these blades are coated only on the cutting edge of the blade. # These blades are used mainly for soft materials such as Green Ceramic. # Thickness varies between 6.0 to 30 mils
Resin Blades
Nickel Blades
Flanges
Dicing Products: Accessories
•Lapping kit •Special flange design •High Cooling Flanges •Vacuum Tool •Torque meter
Resin grinding wheels
Bronze binder acting as a heat sink
Low wear blade
Bronze and additives for a tough matrix
Self sharpening blade High blade wear
Cut Quality/Throughput Soft Matrix Hardness Hard
Blade Edge Geometry
Special Edge Shape (by Grinding)
4.256” .D 54 slots .040” (1.00 mm) wide .200” (5.08 mm) deep 4.600” O.D 60 slots .050” (1.27 mm) wide .200” (5.08 mm) deep 2.188” O.D 16 slots .020” (0.50 mm) wide .118” (3.00 mm) deep
Blade Diameter
More edge surface Shallower angle of attack Less blade wear Less chipping
O.D -4”
O.D -2”
源自文库
More blade surface in kerf during cutting
Less vibrations Higher cut speed