二次配系统简介

Secondary process system introduction
Working characteristics
1. Wafer factory
2. Fab features and capabilities of the gas required
3. Chemical substances and their properties required for fab
4. Work contents
1. Wafer factory
FAB is a modern plant producing chips, the main workplace for the cleanroom. Clean room is a constant temperature and humidity, temperature is 21 ° c. Relative humidity 65%. Fab clean rooms divided into the diffusion zone (furnace batch), yellow, etching, thin film areas.
2. Fab features and functionality of the gas required
Due to the manufacturing process on the need and use of many kinds of gases in semiconductor factories. We generally are based on gas properties to distinguish words. Specialty gases and gas can be divided into two broad categories. The former to use less gas. Such as SiH4, andNF3 . Which use large amounts of gas. Such as N2, andCDA . Due to a larger amount; General gas often in " bulk gas " call. The Bulk Gas. Specialty gas -Specialty Gas.
2-1 Bulk GasIn the semiconductor manufacturing process, need to provide a variety of high purity gas used in pneumatic equipment power, chemicals or pressure medium is used as an inert environment, or take part in the reaction or to remove impurities, such as different functions.
Because of increasingly sophisticated semiconductor production, its requests for gas purity is ever mentioned. Semiconductor factory will be briefly described below the general quality requirements and the necessary equipment for gas and its functions. 2-1-1Bulk gas products:
Bulk gas Semiconductor plants can use, there are generally CDA 、GN2 、PN2 、PAr 、PO2 、PH2 、PHe 7 Species.
2-1-2 Bulk gas manufacturing:
<1> CDA/ICA(Clean Dry Air)Clean, dry air.
CDASources taken from the air compressed by compressor dehumidifier, then by a filter or activated carbon adsorption to remove dust and hydrocarbons to supply the clean room CDA/ZCD 。

CDA System:Air compressor Buffer storage tank cooling dryer
Filter CDA
<2> GN2
Compressed using compressor cooling gas into liquid gas. Catalytic converter, CO reaction to CO2, H2, reaction to H2O, then sieve absorption of CO2, andH2O And then slip separation O2&CnHm.
N2=°C O2=-183°C
PN2
GN2 Through the Purifier (Purifier) Purification, producing high purity N2 。

Liquid original nitrogen %
After purification for purification of nitrogen %
GN2&PN2 System(See attached map)
<3> PO2
Compressor compressed cooled gas into liquid gas, awarded by second slip 99% Above in purity O2 And then drop N2 、Ar 、CnHm 。

Another by electrolytic dissociationH2&O2
PO2 System(See photos)
<4> PAr
Compressor compressed cooled gas into liquid gas, awarded by second slip % More purity argon. Ar content in the air is only %. Production costs are relatively high. PAr System (See attached map)
<5> PH2
Compressor compressed cooled gas into liquid gas, awarded by second slip % Above
in purity H2 。

Also by H2O electrolytic dissociation H2&O2. High hazard manufacturing cheap but easy to trigger explosions.
PH2 System (See attached map)
<6> PHe
Rare and rich He Extracted from natural gas, its main origin for the United States, and Russia. Air compressors compressed cooled gas in liquid, easily obtained from the slip.
He lium=°C Methane (Methane)= °C
PHe System (See attached map)
2-1-3 Use of bulk gases in semiconductor plants
CDAMain supply FAB Pneumatic device powered air source and blowing (Purge),Local Scurruber Fuel it.
ICAMain facility system pneumatic equipment-powered gas source and blowing.
N2Main supply part of the pneumatic equipment air supply or supply blowing and dilute source of pressure of inert gas and chemical delivery.
O2Supply ETCH -Process oxidizer needed and CPCVD Supplies oxidation process with business routine supply O3 Generator Required O2 Supplies and other processes required.
ArSupply Sputter Manufacturing process and ion sputtering heat transfer media Chamber Dilution and inert gas environment.
H2Feeding tube devices burning mix of oxygen, POLY Manufacturing process H2 BAKE Purposes. W-PLUG manufacturing process as WF6 for the reduction of gas and other processes.
HePressure medium supply chemicals and processing chips cool.
Bulk GasAlthough not as Specialty Gas , Some with highly toxic and corrosive. But we still need to pay attention to safety using a bulk gas. GN2, andPN2, andPAr, andPHe has the danger of suffocating, that gas is colorless and odorless, massive emission of lead in the air contain O2 ( Usually 21%), decreased to 16% below, namely, headaches
and nausea. Dang O2 less to 10% Shi, who will be in a State of the will is not clear,6% , instantly Faints, unable to breathe,6 minutes less than death. PH2 due to leakage or when mixing, concentration of his own as long as the H2 of the blast RADIUS
(4%-75%) (air), if they got the fire burning this gas is mixed. PO2 will make material easily oxidized to yield burning, causing fire mishap. Therefore, our works in the semiconductor, in the design, construction, and how to avoid leaks, and how to protect themselves from, you are one of our hard work.
2-2 Specialty Gas
Used by the semiconductor factory Specialty Gas A wide range of about 40 or 50, according to risks can be divided into the following categories:
2-2-1 Flammable gases
When some leaks gas when mixed with, as long as his own concentration in a certain range (air), if they got the fire, this gas is burning from the mix. This called the explosion of the gas range. Such as:
SiH4 %-100% SiH2CL2 %% PH3 %-100%
2-2-2 Low pressure gas
Some gases under normal for the viscous liquid gas at room temperature of saturated vapor pressure is less than 10Psi , Can also interfere with pipeline blocked, need to pack heat, improving the air vapor pressure can be an adequate supply of gas. For example:DCS, andCLF3, andWF6
2-2-3 Toxic gas
Some gases due to its strong reaction of animals (including humans) respiratory and mucous membranes, skin and other features with a strong impact. Such as:NF3,PH3 2-2-4 Corrosive gases
Some gas and water effects, that is produced by hydrolysis HCL HF Acidic substances such as, the human body (including eyes, nose, skin, respiratory system, etc) and equipment (such as piping and valves) have a corrosive effect. This gas has the following:
<1> HCL、CL2 、SiH2CL2 、BCL3 CL Elements of gas---HCL
<2> BF3、SiF4 、WF6 F Element---HF
<3> NH3---Ammonia water Very irritating
2-2-5 Asphyxiant gases
Such as: CO2 、CF4 、C2F6 Such gases, odorless and tasteless. If a large number of emission of air caused by O2 content reduced to 16% when the headache and nausea. Dang O2 less to 10% Shi, who will be in a State of the will is not clear,6% , instantly Faints, unable to breathe,6 minutes less than death.
2-2-6 Spontaneous combustion gases
Some of the gases, mixed with the air, even without the fire catches fire spontaneously burst into flames. This is called spontaneous combustion gases. Its fire at room temperature. This gas are:
SiH4、PH3 、B2H6
Though we cannot exclude these gases can cause various adverse effects on us. But we working in semiconductor plants, may be included in the design, construction, and stop loss. To avoid leaks, he stressed.
3．Fabs require chemical substances and their properties
3-1 Types of chemicals (solvents)
C260、EKC-270 、NMP 、OK-73 、A515 、IPA In addition to EKC-270 PFA/304 BA Tube, others use 316L EP Tube. Take over the way with VMB outlet and the machine inlet side takes over.
3-2 Chemical species (pH class)
HF1%、HF49% 、H2O2 、NH4OH29% 、DEVELOPER 、M1 、BOE 200:1 、BOE 500:1、BOE 50:1 、HNO3 、HCL 、H3PO4 、H2SO4 。

Used PEA/CLEAR PVC double pipe bend directly, take over the way with VMB outlet and the machine inlet side, inner tube direct expansion tubes. Outer tube using the 40A C-PVC SOKET fixed.
3-3 Chemical characteristics
See table below
Serial number -Chemical name chemical characteristics
1 H2SO4 Sulfuric acid Highly corrosive liquids
2 H3PO4 Phosphoric acid Corrosive liquids
3 HNO3 Nitric acid Highly corrosive liquids
4 HCL Hydrochloric acid Liquid corrosive irritant
5 BOE 50:1 Etching solution The corrosive and toxic liquids
6 BOE 100:1 Etching solution The corrosive and toxic liquids
7 BOE 200:1 Etching solution The corrosive and toxic liquids
8 DEV Developer Corrosive liquids
9 NH4OH Ammonia water Strong irritant liquid
10 H2O2 Hydrogen peroxide solution Irritant, corrosive liquids
11 M1 Nitric acid hydrofluoric acid mixture Highly corrosive liquids
12 49% HF Hydrofluoric acid in aqueous solution Corrosive liquid
13 1% HF Hydrofluoric acid in aqueous solution Corrosive liquid
14 Thinner Crystal cleaning liquid Flammable liquids
15 EKC270 Liquid photoresist removal Corrosive and irritant liquid
16 A515 Developer Flammable, irritant liquid
17 NMP Ka ketone, methyl Flammable, irritant liquid
18 IPA Isopropyl alcohol Flammable, toxic liquids
19 C260 Fountain solution Flammable, irritant liquid
4. Work contents
The work we do is the use of automated tools such as welding, pipe Bender. Air bottle cabinet (or tank) side set up the pipeline to FAB reserved near the machine and open the valve in the TAKE OFF point (this is referred to as a distribution). Then TAKE OFF point preparation pipeline to contact secondary with (HOOK UP). Introduction to semiconductor materials of piping and valves
1. Pipe fittings---Pipe&Tube
2. Connecting accessories---Fittings
3. Valves---Ultra Clean Valves
4. Pressure regulating valve---Pressure Regulator
5. Pressure sensors---Pressure Gauge&Transducer
6. Filter---Gas Filter
7. Selection of materials based on
8. Two-disc set of the form
1．About Pipe&Tube
to material pipe can be divided into:<1>SUS 304 <2>SUS 316 <3>SUS 316L
The difference is that SUS316 Add mo ( Mo ) Metals, improve their mechanical properties.
LSaid material to reduce C Increased nickel ( Ni ).
to specifications classification can be divided into:
<1>Sundials ( JIS ):PIPE SIZE
<2>American Standard ( ASTM ):TUBE SIZE
It should be noted that:
<1>1" PIPE SIZE=25A, Outside diameter OD , TUBE SIZE OD
<2> PIPE SIZE 25A Also known as 1",50A Also known as 2",80A Also known as
3",100A Also known as4 "
<3>TUBE SIZE(Generally used in 1" Gas Piping) , Common sizes 1/8" (A), 2/8" (B), 3/8" (Three points), 4/8" (D), 5/8" (Five points), 6/8" (Six points), 1" 。

1-3．According to the classification of surface treatment methods:
Is generally divided into three
<1>AP( Annealed and pickled ) Level (plain tubes): pickling tube
<2>BA (Bright-annealed)Grade: bright annealed tube
<3>EP (Electrolytic polished)Level: electrolytic polishing pipes
Note: the factors affect the price of pipe is the most important determining factors in surface treatment methods, the height of the price order EP>BA>AP 。

to the differentiated thickness:
General thickness specifications SCH5S 、SCH10S 、SCH20S 、SCH40S 。

manufacturing process can be divided into:
<1>SINGLE MELT
<2>DOUBLE MELT(Aimed at reducing tube impurities and increased corrosivity) example:
VIM+VAR( SUMKIN Patented nicknames)
VIM—VACUUM INDUCTION MELTING
VAR—VACUUM ARC REMELTING
1-6．Welded and seamless pipes can be divided into two types.
2．About Fittings
and pipe fittings.(EP/BA...)
used categories:
<1>Nut+Gland+Gasket <2>Elbow、Tee 、Reducer
<3>Cap、Plug <4>Connector Connector
2-3．Types and specifications:
Can generally be divided into VCR (1/8 ),/SWG (1 ¼ )/Welding/ Screw the
streets/Flange
Size from 1/8"-1"(VCR/SWG) 1/4"—300A(Welding/Flange)
Short connector SCM(micro) or Long connectorSCL(long)&SCF
:
KITZ/HAM-LET/IHARA/SWAGELOK/FUJIKIN
N2O、CO 、O3—Gasket must be SUS
Note: the gas used Gasket Ni Material. CO Ni has eroded, so the CO Gasket must be a SUS series material.
3．About Valves
3-1．Material with tubing
3-2．Commonly used categories:
<1>Manual valve (Manual Valve): Ball valve (Ball Vavle1/4"--3/4") Corrugated pipe valve (Bellows Valve1/4 "- large size, used for high pressure ) Diaphragm valve (Diaphragm Valve1/4 "-1" for low voltage high)
<2>Pneumatic valves (Air Valve) :
the air control valve open or closed source, achieve the purpose of automation, pneumatic valve itself has a long drive ( Normally Open With two more commonly used .
valve actuation forms are divided into:
Diaphragm type pneumatic valve ( Air Operated Diaphragm Valve )
Generally<3000psi
Pneumatic valve of the corrugated pipe ( Pneumatic Actuated Bellows Valve ) Generally>300psi
<3>Check valve (Check Valve): Also known as one-way valves, check valves, main functions for the maintenance of the pipeline gas (liquid) unidirectional flows, preventing the damage caused by upstream.
<4>Pressure relief valve ( Relief Valve ) : Also known as the safety valve, its function is to maintain system pressure, when the pressure exceeds safety when setting pressure, will be via the pressure relief valve.
<5> Voltage regulation method ( Regulator ) : Also known as the reducing valve, main function is to change the gas from high pressure inlet port ( HP ) , Adjusting the working pressure, then the outlet port ( LP ) Flow to the pipe or device.
Voltage regulation method for gas should be used, piping and equipment requirements, and can distinguish between two broad categories:
a. For general industrial use Instrument ( banned oil treatment Oil Free), Applicable gas purity, non-corrosive, non-toxic, non-flammable (such as N2,He,CDA, Ar ...... )
b. Semiconductor High Purity (BA/EP ) Apply to gases with high purity and corrosive, poisonous, flammable (such as H2,HCL,H2/N2...... )
3-3．Label:
KITI/OHNO/IHARA/MOTOYAMA/NUPRO
NH3—Check Valve must be AFLAS type
<1>High pressure valve / Low pressure valve According to different places to choose
<2>Two way valve / The three-way valve / Four-way valve /... According to your demand to select, pay attention to the flow of choice
4．About Regulator
and pipe fittings
material: PCTFE 、SS316L 、Kel-F81
used categories:
<1>High voltage / Low-voltage / General pressure
<2>2PNo header /3P or 4P Single or double headers for the table header
<3>VCR/SWG/Flange
:
<1>Bulk GasGeneral use 316L BA 316L EP /VCR SWG
1/4"—R25Series 3/8"—R35 Series 1/2"—RH1 Series Because of different flow
<2>Specialty Gas
a:Toxicity / Flammability / Noble gases: 316L EP—L25 or R25 Series
b:Corrosive gases: VIM+VAR—L25 SVA Series
c:Low pressure gas: adjustable negative-pressure types should be selected (type)-L96SSA Series
5．About Pressure Gauge & Transducer
categories:
<1>Pressure Gauge(PG)Pressure gauge head pointer type,C122
<2>Pressure Switch (PS)Pressure switches, analog, with transmission lines,IPS122
<3>Digital Pressure Gauge(PID)Electronic pressure gauge
<4>Pressure Tranaducer (PT)Pressure transmitters
5-2．Pressure range can be divided into:
<1>High voltage(0—3000Psi)
<2>Low-voltage(-30"Hg—0—30Psi)
(-30"Hg—0—160Psi)
supply:
24V DC 4—20Ma DC
6．About Gas Filter
: filtering particles in the air(particle)
grade option, that is, filter diameter (particle size), Can be divided into: (Micron)
filter (Medium) Material: PTFE/SS 316L/Ni ( tiefulong / stainless steel / nickel) (Flow Rate) General flow and high flow
30slpm/100slpm/300slpm/1500slpm
type:VCR or SWG or Welding
filter material:
<1>Bulk Gas—PTFE
<2>Specialty Gas:Toxicity / Flammability / Inert gas —PTFE Series
Corrosive gases—PTFE
For CO—PTFE type
Filter effects Leak- capture rates of anti-corrosion performance
PTFE(F) Good Bad > N/A
SS316L(M) Very good Well 6. 2 bad
Nickel(Ni) Very good Very good > good
7. Selection of materials based on
7-1．Types of gases, gas properties:
Effects of material grade:AP/BA/EP/V+V(VIM+VAR)
needs and budgets
Note there is no specified brand or specifications
7-3．According to the dosage required for machine and its own contacts selected material size
Dimensions that affect the materials used: 1/4" 、3/8" 、1/2" 、15A required material pressure and flow different options form
Selection of pressure ranges flow from suitable for valves. (1/4"—3/4")
7-5．Depending on the disc Assembly choose component joint type
VCR—F or M; SWG ; Welding
7-6. Operating temperature, Cost
8. Two-disc set of the form:
In general have the following common forms:
<1>Specialty Gas(No disk group, VMB/VMP Replace)
<2>Bulk Gas
EPLevel by the Diaphragm Valve+Regulator+Gauge+Filter Composition
BALevel by the Ball Valve+Regulator+Gauge Composition
Note: close the secondary disk group when piping Parts Structures will not be finalized after discussions with the owner.
Construction specifications
1. Piping erection
2. Bends tubing specifications
3. Pipe cutting and milling surfaces
4. Installation of pipe joints
5. Specification for welding
6. CHEMICAL HOOK-UP specifications
1. Piping erection
1-1 Prefabrication work environment
To be equipped with a temporary clean Studio (Clean Booth) And all piping work operation within this area basically completed, in order to avoid undue pollution. This clean Studio and control must be maintained in the following environmental conditions:
Temporary clean Studio:
a. Number of dust (static, particles smaller than ) 1um= :
(Human hair100um)
Warehouse : (Disc used for storing materials and prefabricated, fittings, etc)
The cleanliness is Class 10000 。

Class 10000 Clean Booth measured the amount of particles particles above) cannot exceed10000 PCS/
Cutting work areas : Class 1000 For cutting tubes, assembled disc, and so on.
Welding work area : Class 100 For weld, prefabricated pipe fittings.
b. Maintain clean conditions:
Welding work area, the temperature 21°C Relative humidity 65% 。

c. Airflow:
Cycles per hour 5-10
d. The environment:
This Studio to maintain positive pressure environment 30Pa, Enough to block particles, grease and other foreign matter.
e. Work in this area must be dressed in clean clothes, shoes and PVC Gloves.
When the number of particles overweight, should reduce the number of clean room or replace MEPA Filters do test again, until it reaches the standard before starting work.
1-2 Prefabricated (in a simple clean room clean booth )
1-2-1．Rong
<1>Rong solution automatically, if the pipe diameter is greater than 20A According to Rong is required.
<2>Rong occasions, prior to construction to determine persons need to be performed by a qualified BACK SHIELD Compliance gas flow and purity requirements.
<3>Rong is confirming that two sections of piping treatment compliance, and distribution centers.
<4>Rong Shi 镕intake should be less than the thickness of the pipe 1/3 。

<5>Rong interval according to tubing size, but ordinary by equally spaced around the implementation.
<6>Fake film, identified Rong Rong to clean surfaces after acidification with the flat surface of piping.
<7>When using automated Rong Rong, under the same conditions, be in the real Rong samples to determine without any problems.
Rong location 4 Point or 6
1-2-2. Chong-blown gas (Back seal gas)
Using argon gas dew point -80°C Or lower, the oxygen content in the Here, particles ( More) content is zero.
1-2-3. Rush blow tubes for sleeve
Connecting impulse gas pipelines and erecting the pipeline using ( Back seal jig )
As shown in figure (a) shows
Figure (a)
up procedure (figure II)
Will work on the both ends of the pipe sleeve tubing, connect flushing gas and valve
After completing the welding, tube full Ar Gas, and wrapped with plastic dust-free paper at the end of two layers. If the valve is connected at the end of the, wrapping paper with plastic valve.
and handling
Materials must be placed in a special storage, on site or in the material to provide a temporary simple clean room, all material should be placed in order. In-store materials, electronic polished fittings must be separated and without electronic polished fittings. When not using fitting plastic wrappers should not be opened until until the site can be opened only when you want to use, and materials should not be placed directly on the ground.
1-3 Site welding
1-3-1．Spot welding personnel must be trained in identification of high purity piping technique adopted.
<1>Reset the scene intact.
<2>The pipe being welded tube removed and connect Back seal gas 。

<3>Rush blows clean welding pipe end Back seal gas Removed, and start welding.
1-3-2．Pipeline maintenance conditions
Even if weld ends, also want to maintain a small N2 Ar Tube, rushed to prevent air blowing into the tube.
1-4 Pipe fixing
1-4-1．Plumbing fixtures not burden with the construction on the piping. plumbing is not the correct angle in combination is not available to support correct. connecting section (Rong) cannot set support.
of pipe supports must be in accordance with the design basis.
1-4-5. U Shaped-beam fixing pipes, consider piping thermal expansion and contraction and seismic occurrence of such abnormalities, do not bundle too tight, fit piping route construction.
of piping may be affected by the occasion, to be joined with the support structures and piping vibration cushioning material.
piping, must take into account the future needs, to reserve space.
piping and corrosion protection of buried piping shall be in the strategy. (Especially when buried piping shall be discussed in detail with experts)
1-4-9．General plumbing fixed settings in the following figure:
1-4-10．Piping should be considered material even when fixed, corrosion properties selected are compatible.
1-4-11．Support when under the influence of vibration of piping, shall be in the policy response. (Reference design)
1-4-12．Support the manufacture must be taken according to the rules of semiconductors, avoid superficial injuries.
1-4-13．Pipe support materials must also ban oil, wipe with alcohol before
Assembly.
tubing specifications
2-1 Pipe bending operation should pay attention to two principles:
2-1-1．Surface at both ends, from the short side first and begin to bend.
Mark will be relatively short length tubing, this section should be placed in the Bender The left, Set The second place. Bent Latch fixed Pipe, slide the tubing to the top, rotate 90 ° to complete bends.
Piping the scars from above have the following.
<1>LatchParts of the scars
<2>BendingSome scars
Between the two scars, <2> Scars to pay special attention to. Section at the end of tubing, Swage Lok joint rings will produce 100%Leak problems. Latch scars will not occur to some circles this kind of problem.
2-1-2. Ends of side bend 180 °(r- bend), must be 180 ° bending operations. This time,r mark bending dimensions in the plumbing, and this deal Bender left to Set .
2-2 Pipe bend of the actual
2-2-1. 90 ° bend
*Mark size, Set Bender Is to the left (for example, when you start bending some) Stop pim Pressed, as a reference point.
and marking pipe Link Mark superimposed on 90° And then use the Latch Fix. handle 0° Fore Handle 0° Agree together.
handle Rotate to Fore handle 90° Wire, bend the pipe.
5. Score To check if there is at right angles.
*Mark size, Set Bender Right side
Distribution mark crossed and Link Mark R Fit, like any other order.
2-2-2. 180 °(r- bend)
size of the distribution mark, set in the Bender The left side.
and Link 90° Fit.
3. Shoe Handle Fore Handle 0 Points will be Shoe Handle Fore Handle 180° Wire bending.
4. 90° Bent the same way, Sus Pipe bending Spring Back , So bending can bend quite
a bit.
2-2-3．Bending45 °
dash, placed either on the left or right can be. Distribution line Link 45 ° joint.
2. Shoe Handle Fore Handle 0 Points will be Shoe Handle Bending to Fore Handle 45°Line.
a bending angle.
2-2-4. 45 ° bend
the size of the mark, either placed in the Bender Left, right, are both available. Will Link the above scale is divided into 0-45 °, the angle value in purpose be underlined.
2. Shoe Handle Fore Handle 0 , And then Shoe Handle 0 Bending to Fore Handle Scale 30° Quite a line.
a bending angle.
2-2-5. 45 °-75 ° bends
the size of the mark, either placed in the Bender Left, right, are both available. Link Shang 45-R , and r as a 90 ° equal, then use an underscore to make solving the angle value.
2. Shoe Handle Fore Handle 0 Points will be Shoe Handle Bending to Fore Handle Solving the point value on the scale.
a with the angles.
2-2-6. 75 °-89 ° bends
Use formal procedures to be curved 90° Using Vice Distribution point back to ask for. 45°—89° Desire among the bending angle is more difficult at design time, select this angle should be avoided.
3. Pipe cutting and milling surfaces
3-1 Large diameter pipes
principle should cut clean booths within the implementation. But if a customer's clean room completed, can be cut in his clean room. (But if cutting produces chips, not in the clean room implementation of the occasion)
2．Should confirm that no harmful traces on the surface of piping before cutting or destroy it.
3. Piping must be used when cutting stainless steel laser cutting machine (STAINLESS STEEL TUBE CUTTER) slowly cutting, keep the sections at right angles (90 ° ± . 4．Should cross into horizontal fixed in principle, prevent chips from entering the tube.
5. Pipe after cutting is required to AIR GUN with clean gas scavenging, cut face should be in the downstream direction.
6. After cutting the tube attached to the chip or other impurities, dust-free cloth should be used (LINT-FREE CLOTH) to clean.
7．Special section of the processing application is processed after cutting sections. 8．Cut processing, in order to prevent chips from entering the tube, should place the machined surface in nasty, washed clean gas from the upper class. After processing, cut-side down, knock a few times from above, removing impurities of chip.
9. Cut the processing end, confirm that the section dealing with good. If checked, using high purity industrial Ar gas removal pipes appearance.
10．Such as Canal and no impurities or anomalies, in stamped on both ends. 11．If not cutting, decentralized across levels of piping tubes cannot be used.
3-2 Small-diameter piping ( 1/4"—1/2" )
Cutter Vertically with the pipes, so as not to damage the blades.
entry must not be too deep, or you will make incisions into the oval and damage Cutter, Handle rotation angle 30° Can be. When you start cutting must be rotated before and after 3-4 a half weeks, to ensure that the ports on the same level.
is completed, while checking the incision, to tilt the pipe, read from bottom to top, attached to prevent chips from getting holes in it.
cut off diameter shall not give rise to a spiral scratch.
the cut is completed, formation of the cone-shaped cut and raw edges using
end-face finishing cut, to form a flat surface in order to facilitate welding:
<1>End machines never feed too much at one time or speed is too fast, so as to avoid port oxidation due to overheating.
<2>Ensure that the pipe and port into a vertical position.
<3>Chamfer in addition to Flash, chamfering device perpendicular to the port, pipe inclined downwards to prevent filings entering the tube.
Note: piping modifications, the cut should be avoided and must be used when cutting large flow Ar Rush blows.
of pipe joints
4-1 COMPRESSION TYPE1" The following dimensions)
1. COMPRESSION TYPEJoining, usually shown in the following figure.
2．Installation procedures, implemented according to the following steps.
<1>TUBETube is inserted into an interface, determine the pipe firmly embedded in the interface, and then to embedding degree mark.
<2>In order to determine the interface, TUBE Pipes together, and slowly loosen the screw cap, confirmed TUBE Pipe metal ferrule is inserted correctly before and after.
<3>TUBEWhen the tube within the interface, with a special spanner tighten until finger tight ( FINGER TIGHT ), Set this point as the screw starting point, mark.
<4>Interface with a special spanner fixed, rotate the screw cap 1 1/4 Times.
<5>After installation, using Special Inspector to check the gap between the screw and the.
4-2 METAL GASKET TYPE
GASKET TYPEInterface structure is as follows.
2．Installation procedure according to the following steps。