尘埃颗粒计数器的原理 尘埃颗粒计数器 洁净度检测设备
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The World Leader In Particle Counting
7
Remote Counters远程式计数器
Position sensor close to sample point Either OPC or CNC Fixed rather than mobile Constant sample and update Limited operator interface Sample flow generated by external vacuum Dedicated computer/PLC interface
The World Leader In Particle Counting
10
Basic, light scattering sensors. Limit is around 0.3µm. 基本光散射传感器的极限是 大约0.3微米
Collection Optics
聚光
View Volume
可视范 围
标准灵敏度-0,3或0,5微米
1 cfm(28,3 l/min)
每分钟1立方英尺（28,3升/分 钟）
JIS CE
日本工业标准 欧共体
4
The World Leader In Particle Counting
Portable Air Particle Counters 便携式气体颗粒子计数器
Optical Counters (OPC)
Reflector
Light Trap
感应器
光带
11
The World Leader In Particle Counting
Sensitivity
灵敏度
The smallest size particle that the particle counter can detect. For basic, light scattering sensors, the limit is around 0.3µm. Using a HeNelaser we can detect 0.1 µm particles. Particles >10nm can be detected and counted using CNC technology
All international standards such as Federal Standard 209E and ISO 14644-1 are based on particle counters set for 50% counting efficiency … 所有的国际标准，例如联邦标准209E和国际标准14644-1，都以颗粒 计数器为50%计数效率而建立标准为基础。
AIR PARTICLE COUNTER THEORY气体颗粒子计数器的原理
Types of Air Particle counter 气体颗粒子计数器的类型
Handheld Portable Remote 手握式 便携式 远程式
Particle Detection Techniques颗粒子监测技术 Sensitivity 灵敏度 Efficiency 效率 Sampling 取样
Mount near Sample Points
安装在靠近采样点
Permit correlation of particle events to process steps 允许与颗粒子结果和加工工序相关因素 Provide data for both 为以下两者提供数据
Events Trends -结果 -趋势
what does all this mean?
所有这些意味什么？
The World Leader In Particle Counting
15
PSL size = particle counters minimum specified size.
PSL尺寸=颗粒子计数器最小可测量尺寸
Typical 50% 典形 50% JIS limits 30% to 70%
.. to satisfy JIS 9921-1997, the “false counting ” rate must be a one count or less in a 5-minute period when tested with a purge or absolute filter … 如要符合 JIS9921-1997标准 ,必 须在连续 5分钟测 试一个洁净或 过滤器中，得到一个或以下的“ 错误计数”。
2
The World Leader In Particle Counting
Handheld Air Particle Counters 手握式气体颗粒子计数器
Optical Counters (OPC)
光学计数器
0,3 or 0,5 micron
0,3或0,5微米
0,1 cfm(2,83 l/min)
9
The World Leader In Particle Counting
Photodiode 光二极管
Collection Optics 聚光 To pump 到吸气泵 Sensing zone 感应地区 Laser beam 激光束
Laserdiode 激光二极管
Air in 气体入口
Beam stop光站
定位传感器靠近采样点 光学计数器或凝聚核计数器 固定的而不是移动的 恒定的采样和更新 减少与操作者的操作界面 通过外置真空吸气泵产生气体流动 提供计算机或PLC界面
The World Leader In Particle Counting
8
Remote Counters -Key Points
远程式计数器-关键点
Good counter design involves both sensitivity and noise immunity, in particular when counters are used in ultra-clean environments . . .
好的计数器 设计应包括灵敏度 和免 除燥音干扰 ，特别 是当计数器 使用 在超洁净的环境。
每分钟0,1立方英尺（2,83升/分钟）
JIS CE
日本工业标准 欧共体
3
The World Leader In Particle Counting
Portable Air Particle Counters 便携式气体颗粒子计数器
Optical Counters (OPC)
光学计数器
Standard sensitivity -0,3 or 0,5 micron
C
η (%) =
效率
The World Leader In Particle Counting
Co
x 100
14
What is acceptable efficiency?什么是可接受的效率
What does JIS B9921 require?JISB9921 要求什么
5.2.5 “Counting efficiency” The counting efficiency for PSL particles of the minimum measurable particle size value marked in specifications of particle counter shall be within the range from 30% or over up to and including 70%, and for PLS particles of 1.5 times or over up to and including two times the minimum measurable particle size value, shall be 90% or over up to and including 110%” “计数效率” PSL颗粒子计数效率标记在颗粒计数器规格中，是最小 可测量颗粒子数值，范围从30%上升到70%，PSL颗粒子从最小可测量 颗粒子数值的1.5倍到2倍，计数效率将从90%上升到110%，
记忆容量能存储多数采样点
Until recently, AC only 直到最近只用在交流上 Output air filtered to 0.2 or 0.1 µm输出气体过滤到0.2或0.1微米
6
The World Leader In Particle Counting
Portable Air Particle Counters
光学计数器
High sensitivity: 0,1 or 0,2 micron
高灵敏度-0,1或0,2微米
1 cfm(28,3 l/min)
每分钟1立方英尺（28,3升/分钟）
JIS CE
日本工业标准 欧共体
5
The World Leader In Particle Counting
Portable Air Particle Counters
颗粒计数器能监测最小尺寸颗粒 基本光散射传感器极限是大约0.3微米 通过氦氖激光器我能检测0.1微米颗粒 通过使用CNC技术能检测和计数大于 10钠米的颗粒子
12
The World Leader In Particle Counting
Sensitivity and Efficiency灵敏度和效率
便携Leabharlann Baidu气体颗粒子计数器
Two categories
两种类项
标准灵敏度（0.3或0.5微米） 高灵敏度（0.1微米或以下）
Standard Sensitivity (0.3 or 0.5 µm) High Sensitivity (0.1 µm or lower)
Either OPC or CNC光学计数器或凝聚核计数器 Generally AC only通常只用在交流 Used individually or with manifold (specific models)单个或多管道使用（具体模型）
便携式气体颗粒子计数器
Often put onto trolley / cart 经常放在台车（手推车）上 Often used to take multiple samples at one site for extended period
为了扩大范围，过去经常在一个地点采用多点取样
Usually has built-in printer经常有内置打印机 Memory storage for multiple samples.
PSL= between 1.5 x and 2 x the particle counters minimum specified size. PSL=颗粒子计数器最小可测
13
The World Leader In Particle Counting
How does JIS B9921 define efficiency?
日本工业标准B9921是如何定义效率的？
JIS B 9921 : 1997 E 日本工业标准 B 9921：1997E 2(4) “counting efficiency From the ratio of particle concentration (Co) of small particles in sample air absorbed from sample absorptioninlet of particle counter to the particle concentration (C) displayed by particle counter, the counting efficiency (η) is obtained by the following formula:” 2(4)计数效率等于C与C的比率，C是从颗粒子计数器吸气入口吸收来的取样 气体的小粒子浓度，C是颗粒子计数器显示的颗粒子浓度。 计数效率通过下面的公式获得。
1
The World Leader In Particle Counting
Handheld Air Particle Counters 手握式气体颗粒子计数器
battery-operated 2 -8 hours continuous light-weight self-contained output air filtered 电池操作 连续工作2-8小时 重量轻 自我包含的 已过滤输出气体
7
Remote Counters远程式计数器
Position sensor close to sample point Either OPC or CNC Fixed rather than mobile Constant sample and update Limited operator interface Sample flow generated by external vacuum Dedicated computer/PLC interface
The World Leader In Particle Counting
10
Basic, light scattering sensors. Limit is around 0.3µm. 基本光散射传感器的极限是 大约0.3微米
Collection Optics
聚光
View Volume
可视范 围
标准灵敏度-0,3或0,5微米
1 cfm(28,3 l/min)
每分钟1立方英尺（28,3升/分 钟）
JIS CE
日本工业标准 欧共体
4
The World Leader In Particle Counting
Portable Air Particle Counters 便携式气体颗粒子计数器
Optical Counters (OPC)
Reflector
Light Trap
感应器
光带
11
The World Leader In Particle Counting
Sensitivity
灵敏度
The smallest size particle that the particle counter can detect. For basic, light scattering sensors, the limit is around 0.3µm. Using a HeNelaser we can detect 0.1 µm particles. Particles >10nm can be detected and counted using CNC technology
All international standards such as Federal Standard 209E and ISO 14644-1 are based on particle counters set for 50% counting efficiency … 所有的国际标准，例如联邦标准209E和国际标准14644-1，都以颗粒 计数器为50%计数效率而建立标准为基础。
AIR PARTICLE COUNTER THEORY气体颗粒子计数器的原理
Types of Air Particle counter 气体颗粒子计数器的类型
Handheld Portable Remote 手握式 便携式 远程式
Particle Detection Techniques颗粒子监测技术 Sensitivity 灵敏度 Efficiency 效率 Sampling 取样
Mount near Sample Points
安装在靠近采样点
Permit correlation of particle events to process steps 允许与颗粒子结果和加工工序相关因素 Provide data for both 为以下两者提供数据
Events Trends -结果 -趋势
what does all this mean?
所有这些意味什么？
The World Leader In Particle Counting
15
PSL size = particle counters minimum specified size.
PSL尺寸=颗粒子计数器最小可测量尺寸
Typical 50% 典形 50% JIS limits 30% to 70%
.. to satisfy JIS 9921-1997, the “false counting ” rate must be a one count or less in a 5-minute period when tested with a purge or absolute filter … 如要符合 JIS9921-1997标准 ,必 须在连续 5分钟测 试一个洁净或 过滤器中，得到一个或以下的“ 错误计数”。
2
The World Leader In Particle Counting
Handheld Air Particle Counters 手握式气体颗粒子计数器
Optical Counters (OPC)
光学计数器
0,3 or 0,5 micron
0,3或0,5微米
0,1 cfm(2,83 l/min)
9
The World Leader In Particle Counting
Photodiode 光二极管
Collection Optics 聚光 To pump 到吸气泵 Sensing zone 感应地区 Laser beam 激光束
Laserdiode 激光二极管
Air in 气体入口
Beam stop光站
定位传感器靠近采样点 光学计数器或凝聚核计数器 固定的而不是移动的 恒定的采样和更新 减少与操作者的操作界面 通过外置真空吸气泵产生气体流动 提供计算机或PLC界面
The World Leader In Particle Counting
8
Remote Counters -Key Points
远程式计数器-关键点
Good counter design involves both sensitivity and noise immunity, in particular when counters are used in ultra-clean environments . . .
好的计数器 设计应包括灵敏度 和免 除燥音干扰 ，特别 是当计数器 使用 在超洁净的环境。
每分钟0,1立方英尺（2,83升/分钟）
JIS CE
日本工业标准 欧共体
3
The World Leader In Particle Counting
Portable Air Particle Counters 便携式气体颗粒子计数器
Optical Counters (OPC)
光学计数器
Standard sensitivity -0,3 or 0,5 micron
C
η (%) =
效率
The World Leader In Particle Counting
Co
x 100
14
What is acceptable efficiency?什么是可接受的效率
What does JIS B9921 require?JISB9921 要求什么
5.2.5 “Counting efficiency” The counting efficiency for PSL particles of the minimum measurable particle size value marked in specifications of particle counter shall be within the range from 30% or over up to and including 70%, and for PLS particles of 1.5 times or over up to and including two times the minimum measurable particle size value, shall be 90% or over up to and including 110%” “计数效率” PSL颗粒子计数效率标记在颗粒计数器规格中，是最小 可测量颗粒子数值，范围从30%上升到70%，PSL颗粒子从最小可测量 颗粒子数值的1.5倍到2倍，计数效率将从90%上升到110%，
记忆容量能存储多数采样点
Until recently, AC only 直到最近只用在交流上 Output air filtered to 0.2 or 0.1 µm输出气体过滤到0.2或0.1微米
6
The World Leader In Particle Counting
Portable Air Particle Counters
光学计数器
High sensitivity: 0,1 or 0,2 micron
高灵敏度-0,1或0,2微米
1 cfm(28,3 l/min)
每分钟1立方英尺（28,3升/分钟）
JIS CE
日本工业标准 欧共体
5
The World Leader In Particle Counting
Portable Air Particle Counters
颗粒计数器能监测最小尺寸颗粒 基本光散射传感器极限是大约0.3微米 通过氦氖激光器我能检测0.1微米颗粒 通过使用CNC技术能检测和计数大于 10钠米的颗粒子
12
The World Leader In Particle Counting
Sensitivity and Efficiency灵敏度和效率
便携Leabharlann Baidu气体颗粒子计数器
Two categories
两种类项
标准灵敏度（0.3或0.5微米） 高灵敏度（0.1微米或以下）
Standard Sensitivity (0.3 or 0.5 µm) High Sensitivity (0.1 µm or lower)
Either OPC or CNC光学计数器或凝聚核计数器 Generally AC only通常只用在交流 Used individually or with manifold (specific models)单个或多管道使用（具体模型）
便携式气体颗粒子计数器
Often put onto trolley / cart 经常放在台车（手推车）上 Often used to take multiple samples at one site for extended period
为了扩大范围，过去经常在一个地点采用多点取样
Usually has built-in printer经常有内置打印机 Memory storage for multiple samples.
PSL= between 1.5 x and 2 x the particle counters minimum specified size. PSL=颗粒子计数器最小可测
13
The World Leader In Particle Counting
How does JIS B9921 define efficiency?
日本工业标准B9921是如何定义效率的？
JIS B 9921 : 1997 E 日本工业标准 B 9921：1997E 2(4) “counting efficiency From the ratio of particle concentration (Co) of small particles in sample air absorbed from sample absorptioninlet of particle counter to the particle concentration (C) displayed by particle counter, the counting efficiency (η) is obtained by the following formula:” 2(4)计数效率等于C与C的比率，C是从颗粒子计数器吸气入口吸收来的取样 气体的小粒子浓度，C是颗粒子计数器显示的颗粒子浓度。 计数效率通过下面的公式获得。
1
The World Leader In Particle Counting
Handheld Air Particle Counters 手握式气体颗粒子计数器
battery-operated 2 -8 hours continuous light-weight self-contained output air filtered 电池操作 连续工作2-8小时 重量轻 自我包含的 已过滤输出气体