PCMR体声波谐振器多物理场仿真及芯片制作研究

PCMR体声波谐振器多物理场仿真及芯片制作研究PCMR体声波谐振器多物理场仿真及芯片制作研究

摘要

随着现代电子技术的不断发展，电子器件的性能需求越来越高，对于体声波谐振器的应用也越来越广泛。然而，目前市场上大部分的声波谐振器仍然以晶体谐振器（TCXO）为主，而PCMR体声波谐振器作为一种全新的声波谐振器，具有体积小、功耗低的特点，能够满足更多的应用需求。本文采用COMSOL多物理场仿真软件，对PCMR体声波谐振器进行了

仿真分析，并进行了芯片制作。

通过理论分析，可以得出PCMR体声波谐振器的特点：1）具

有低重复性温度漂移性能；2）具有高品质因数；3）具有良好的抗震性能。对于一般的温度变化和机械震动干扰，PCMR体声波谐振器的性能变化很小，能够满足高精度时钟和振荡电路的要求。

在仿真分析过程中，为了保证仿真结果的准确性，需要同时考虑力学、电磁、热学等多物理场的相互作用。COMSOL多物

理场仿真软件是目前商业软件中功能最齐全、最专业的多物理场仿真软件之一，它能够有效地解决不同物理场之间的相互作用问题。通过该软件，可以实现对PCMR体声波谐振器的建模、仿真分析、结果可视化等步骤。

通过仿真分析，得出了PCMR体声波谐振器的谐振频率与谐

振角、品质因数等关键性能参数之间的关系，并进行了参数优化，使其性能更加优越。在该基础上，设计了PCMR体声波

谐振器的电路和芯片，进行了工艺流程的优化和优化，得到了优秀的实验结果。

关键词：PCMR体声波谐振器，COMSOL多物理场仿真，芯片制作，谐振频率，品质因数

Abstract

With the continuous development of modern electronic technology, the performance requirements of electronic devices are becoming higher and higher, and the application of acoustic wave resonators is becoming more and more widespread. However, most of the acoustic wave resonators on the market are still crystal resonators (TCXO), while PCMR piezoelectric composite material resonator as a new acoustic wave resonator, has the characteristics of small size and low power consumption, which can meet more application needs. In this paper, COMSOL multiphysics simulation software is used to analyze PCMR piezoelectric composite material resonator, and chip production is carried out.

Through theoretical analysis, the characteristics of PCMR piezoelectric composite material resonator can be obtained: 1) Low repeatability temperature drift performance; 2) High quality factor;

3) Good seismic performance. For general temperature changes and mechanical vibration interference, the performance of PCMR piezoelectric composite material resonator changes very little, which can meet the requirements of high-precision clocks and

oscillation circuits.

In the process of simulation analysis, in order to ensure the accuracy of simulation results, it is necessary to consider the interaction of multiple physical fields such as mechanics, electromagnetics, and thermodynamics at the same time. COMSOL multiphysics simulation software is one of the most complete and professional multiphysics simulation software in commercial software at present. It can effectively solve the interaction problems between different physical fields. Through this software, modeling, simulation analysis, and result visualization of PCMR piezoelectric composite material resonator is realized.

Through simulation analysis, the relationship between the resonance frequency, resonance angle, quality factor and other key performance parameters of PCMR piezoelectric composite material resonator is obtained, and parameter optimization is carried out to make its performance more superior. Based on this, the circuit and chip design of PCMR piezoelectric composite material resonator are designed, and the process flow is optimized to obtain excellent experimental results.

Keywords: PCMR piezoelectric composite material resonator, COMSOL multiphysics simulation, chip production, resonance frequency, quality factor.PCMR体声波谐振器与晶体谐振器相比，具有更高的品质因数，更好的零件参数稳定性以及更广泛的频率范围。同时，在二次效应的影响下，PCMR体声波谐振器也表现出更好的抗机械震动性能，更适合在高振动环境下使用，并具有更低的功耗和更小的体积。由于其优良性能，已经