UL 03 08 1 NTC04 008-3 Issue 3 05 1 1 04

ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-3 ULIS ProprietaryUL 03 08 1 384 × 288 LWIR UNCOOLED MICROBOLOMETER DETECTOR TECHNICAL SPECIFICATIONUlis reserves the right to modify this specification at any time1/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-3Table of contents 1. 2. GENERAL ................................................................................................................................ 4 PRODUCT DESCRIPTION..................................................................................................... 4 2.1 2.2Information contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.General ............................................................................................................................ 4 Focal plane array topology ............................................................................................. 52.3 Readout integrated circuit description ............................................................................ 5 2.3.1 Readout integrated circuit architecture ...................................................................... 5 2.3.2 Operating modes.......................................................................................................... 5 2.3.3 Signal voltage conversion............................................................................................ 5 2.3.4 Output stage................................................................................................................. 5 2.3.5 FPA Size ...................................................................................................................... 6 2.3.6 Sequencer..................................................................................................................... 7 2.3.7 Dynamic range ............................................................................................................ 7 3. 4. MECHANICAL INTERFACES .............................................................................................. 10 THERMAL INTERFACE........................................................................................................ 11 4.1 4.2 5. 6. On-chip thermometer..................................................................................................... 11 Thermo-Electric Cooler description.............................................................................. 11OPTICAL INTERFACES ....................................................................................................... 12 ELECTRICAL INTERFACES ................................................................................................ 12 6.1 Input interfaces .............................................................................................................. 12 6.1.1 General ...................................................................................................................... 12 6.1.2 Bias voltages.............................................................................................................. 12 6.1.3 Pulsed voltages .......................................................................................................... 13 6.2 Output signal characteristics......................................................................................... 13 Delivery description....................................................................................................... 15 Marking.......................................................................................................................... 15 Packaging ...................................................................................................................... 15 General recommendations............................................................................................. 157.DELIVERY ............................................................................................................................. 15 7.1 7.2 7.3 7.42/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-38.PERFORMANCE SPECIFICATION ..................................................................................... 16 8.1 General .......................................................................................................................... 16 8.2 Electro-optical performance.......................................................................................... 16 8.2.1 Operating conditions ................................................................................................. 16 8.2.2 Temporal NETD ........................................................................................................ 16 8.2.3 Responsivity ............................................................................................................... 16 8.2.4 Crosstalk.................................................................................................................... 16 8.2.5 Spectral response....................................................................................................... 16 8.2.6 Operability................................................................................................................. 17 8.2.7 Frame rate ................................................................................................................. 17 8.3 Mechanical and thermal characterization..................................................................... 17 8.3.1 Weight........................................................................................................................ 17 8.3.2 Total power consumption .......................................................................................... 17 8.3.3 Vacuum integrity........................................................................................................ 17 8.4 Environmental conditions .............................................................................................. 18 8.4.1 Temperature............................................................................................................... 18 8.4.2 Vibration.................................................................................................................... 18Information contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.9.QUALITY ASSURANCE ........................................................................................................ 19 9.1 9.2 Manufacturing process .................................................................................................. 19 Specific test report (STR)............................................................................................... 19ANNEX ........................................................................................................................................... 20 GLOSSARY..................................................................................................................................... 263/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-31. GENERAL The purpose of this document is to describe the main features, performance and specifications of the 384 × 288 LW IRCMOS uncooled integrated microbolometer detector referenced as UL 03 08 1. UL 03 08 1 is an advanced, high reliability, small and lightweight, low input power Integrated Detector Assembly (IDA) adapted to uncooled thermal imaging, for military applications (weapon and vehicle sights, low cost goggles,…) and civilian applications (surveillance, non destructive test, process control, hazard warning for vehicle,…).Information contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.2. PRODUCT DESCRIPTION 2.1 General UL 03 08 1 is an infrared opto-electronic device sensitive to radiation in the Long Wave (8 to 14 micrometers) spectral region. It includes a microbolometer focal plane array (FPA) comprised of a 384 × 288 elements two dimensional detector array made from amorphous Silicon resistive bolometer connected to a silicon ReadOut Integrated Circuit (ROIC) by the mean of micro-bridges, and a thermoelectric stabilizer integrated into a miniaturized metal packaging. This device could be switched from 320 x 240 to 384 x 288 pixels format.Pictures not contractualFigure 1 UL 03 08 1 Detector4/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-32.2 Focal plane array topology The focal plane array is composed of 384 columns × 288 rows of pixels with a pixel pitch of 35 µm in both directions.The sensitive area is 13.44 mm × 10.08 mm.The fill factor is greater than 80 %. The typical thermal time constant is about 7 ms (-3 dB cut-off) and the Temperature Coefficient of Resistance (TCR) of the bolometer material is about 2.3 %/K. 2.3 Readout integrated circuit descriptionInformation contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.2.3.1 Readout integrated circuit architecture The readout circuit enables to extract a low signal from an important background current. Its design is based on a Silicon CMOS technology. The organization of the readout integrated circuit allows integrating the information from the microbolometer, to subtract the background current, to multiplex this information per row and to sample and hold the information. 2.3.2 Operating modes The detector operation is a ripple operation mode (electronics scanning). The microbolometers are pulse-voltage biased and the information is read out thanks to the current variation due to the microbolometer temperature change generated by the IR scene flux absorption. 2.3.3 Signal voltage conversion The current is sequentially integrated in a current-voltage conversion stage at the end of each column. The current-voltage conversion is performed by amplifiers. The signal voltage conversion stage is controlled by internally generated biases. 2.3.4 Output stage There is one output for the video signal, named “VIDEO”. After the signal voltage conversion, a multiplexer (384 to 1) allows the transfer of the signals from the amplifiers to the output. The master clock frequency (SYP) of the readout circuit (and then the output rate) is adjusted with respect to the desired frame rate. Typical frame rates are 30 Hz or 60 Hz for US standard (320 x 240), or 25 Hz or 50 Hz for European standard (384 x 288). For optimum output rate (6.4 MHz, 50 Hz), the output signal stability range is about 40 ns for being sampled.5/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-3 OUTPUT / VIDEO C1R1 C2R1 .... .... C384R1 C1R2 C2R2 .... .... C384R2 C1R3 C2R3 .... C384 R288 C = column, R = Row Table 1 : Output sequence 2.3.5 FPA Size Two different sizes are available: 384 x 288 or 320 x 240. The choice of the size is done by changing the value of the bit SIZE (pin 2 of the package) and also the timing diagram. By default the size is 384 x 288 and the value of SIZE is 3.3 V. To change the size to 320 x 240, the bit SIZE must be set to ground (see next figure). 384Information contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.288Center of the active area240320 Figure 2 : FPA Size6/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-3Eight lines have been added at the end of each frame, for both formats, to implement new functionalities in the future. For a “classical” clocks working, it’s not necessary to address these lines. However they can be read by increasing the SYT period around 512µs (8 x 64µs) as mentioned by dots line on the second part of the timing diagram: SYT clocks (figures 3 and 4). As mentioned on the previous figure, optical center is preserved when changing size bias. 2.3.6 SequencerInformation contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.The sequencer generates all internal necessary signals for the readout integrated circuit operation from the different external clocks and bias voltages. The readout integrated circuit operation is totally asynchronous. Not all the pulses generated internally are multiple integers of the master clock. The clocks necessary to operate the sequencer are SYT, SYL and SYP (cf. 6.1.3). 2.3.7 Dynamic range The useful scene temperature dynamic range at the detector window level is greater than 100°C. The dynamic range can be shifted up or down when changing VSKIMMING bias value, (according to bias indication given in table 2). The dynamic range can be increased when decreasing VFID bias value (according to bias indication given in table 2) from the recommended value in the STR, but consequently, will reduce the NETD performance. VFID and VSKIMMING are given in the STR for information only. The VIDEO electrical output dynamic range corresponds to a 2.8 V output voltage swing, between about 0.4 V and 3.2 V.7/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-3SYT (RESET) T1 T2 64µs Tint = 59.3 µs SYL T5Information contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.Integration of row 1 T3 384 x SYP T4Integration of row 2Integration of row 3Pixel 1 VIDEO Readout of row 1 Readout of row 2T1 > TSYL ; T2 ≥ 0 ; T3 ≥ 1.5 µs; T4 ≥ 1.5 µs; T5 = 4.7 µs +/- 30 % and T6 ≥ 1.5 µsT6 SYT (RESET) Integration of row 288 SYL Integration of row 289 Integration of row 296 No integration T6SYPVIDEO Readout of row 287 Readout of row 288 Readout of row 295 Readout of row 296Figure 3 : Example of clock diagram for 384 x 288 configuration8/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-3SYT (RESET) T1 T2 64µs Tint = 59.3 µs SYL T5Information contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.Integration of row 2Integration of row 3T3 SYP320 x SYPT4Pixel 1 VIDEO Readout of row 1 Readout of row 2T1 > TSYL ; T2 ≥ 0 ; T3 ≥ 1.5 µs; T4 ≥ 1.5 µs; T5 = 4.7 µs +/- 30 % and T6 ≥ 1.5 µsT6 SYT (RESET) Integration of row 240 SYL Integration of row 289 Integration of row 296 No integration T6SYPVIDEO Readout of row 239 Readout of row 240 Readout of row 295 Readout of row 296Figure 4 : Example of clock diagram for 320 x 240 configuration9/26ULIS PROPRIETARYULIS UL 03 08 1/05.11.04/UP/DRD/NTC04008-3VFIDActive PEL row 1VDETActive PEL row 1Information contained in this document is the property of ULIS and is communicated confidentially for a specific matter. The receiver is in charge of this document and ensures that it will not be either copied or reproduced in all or part, and that the content will not be disclosed in any way to anybody except for its proper use.Active PEL row 288Active PEL row 288Warning : see bias voltage switching procedure caution on chapter 6.1.2VEBVEBBlind bolometers Common per column VSKIMMING TIA VSKIMMING INTEGRATIONSAMPLINGMULTIPLEXER VS Column 1Column 384Figure 5 : Readout circuit architecture 3. MECHANICAL INTERFACES The packaging is based on the following features : vacuum sealed metal packaging, use of getter for long vacuum life, temperature sensors at the level of the FPA, thermoelectric stabilizer, mechanical references located on the front side of the packaging base plate and electrical connections located on the rear side of the packaging base plate. The general mechanical description and the outline dimensions of the IDA are presented in the annex. All dimensions are given in millimeters at room temperature.10/2611/26I n f o r m a t i o n c o n t a i n e d i n t h i s d o c u m e n t i s t h e p r o p e r t y o f U L I S a n d i s c o m m u n i c a t e d c o n f i d e n t i a l l y f o r a s p e c i f i c m a t t e r . T h e r e c e i v e r i s i n c h a r g e o f t h i s d o c u m e n t a n d e n s u r e s t h a t i t w i l l n o t b e e i t h e r c o p i e d o r r e p r o d u c e d i n a l l o r p a r t , a n d t h a t t h e c o n t e n t w i l l n o t b e d i s c l o s e d i n a n y w a y t o a n y b o d y e x c e p t f o r i t s p r o p e r u s e .4. THERMAL INTERFACEThe FPA temperature must be regulated at a given temperature (like 30°C) by using an on-chipthermometer.4.1 On-chip thermometerAn on-chip thermometer provides an analog output voltage V TEMP related to FPA temperature. V TEMP output is provided on one pin of the detector (see pin out interface in annex) and its sensitivity is around - 6.45 mV/K.V TEMP is around 1.73 V (exact voltage is given in Specific Test Report) for an FPA temperature of 30°C. The relation between V TEMP and the FPA temperature is defined on next figure.Figure 6 : Typical temperature sensor characteristic4.2 Thermo-Electric Cooler descriptionThermo-electric stabilizers are low power miniature heat pumps or heat generators (depending on the necessity to cool down or to heat up the microbolometer detector) that are small enough to be easily integrated into compact systems. Thermo-electric stabilizer can efficiently stabilize the detector chips to temperature around 30°C, and can provide temperature control to better than 10 mK, ensuring stable detector performance.For the thermo-electric stabilizer, two pins provide the electrical interface and the nominal current is less than 250 mA for a 4 V bias (see pin out interface in the annex).Depending on the operating conditions requirements, these nominal values can be optimized.12/26I n f o r m a t i o n c o n t a i n e d i n t h i s d o c u m e n t i s t h e p r o p e r t y o f U L I S a n d i s c o m m u n i c a t e d c o n f i d e n t i a l l y f o r a s p e c i f i c m a t t e r . T h e r e c e i v e r i s i n c h a r g e o f t h i s d o c u m e n t a n d e n s u r e s t h a t i t w i l l n o t b e e i t h e r c o p i e d o r r e p r o d u c e d i n a l l o r p a r t , a n d t h a t t h e c o n t e n t w i l l n o t b e d i s c l o s e d i n a n y w a y t o a n y b o d y e x c e p t f o r i t s p r o p e r u s e .5. OPTICAL INTERFACESThe optical interfaces consist of an antireflective high pass filter coated infrared window in orderto optimize the incident radiation. The Maximum f-number is defined for the whole array by the window clear aperture and is compatible with f/0.7 optics.It is made from Germanium (refractive index = 4) with a thickness of 1 mm.The optical interface description is presented in the annex “OPTICAL INTERFACE” Sheet 03/05.6. ELECTRICAL INTERFACES 6.1 Input interfaces 6.1.1 GeneralThe adjustments of all inputs are defined by the bias voltage values, their possible adaptation range, the bias noise and the maximum current. The nominal bias mode is a pulsed mode. 6.1.2 Bias voltagesThe bias voltages necessary to operate the CMOS processor are : – VDDA : Analog power supply. – VDDL : Digital power supply. – VSSA : Analog ground. – VSSL : Digital ground.–VBUS: This voltage is the reference voltage of the integrated circuit. Decoupling capacitor, typically 1µF should be placed as closely as possible to VBUS pin.The other bias voltages are : – VEB : This voltage biases the blind microbolometers.– VSKIMMING: This voltage biases the blind microbolometers. VSKIMMING has to beadjusted to bias the microbolometers and to place the video signal in the electrical dynamic range.– FID : This voltage biases the microbolometers, FID can be adjusted to optimise thedetector operation– VDET : This voltage biases the microbolometers.13/26I n f o r m a t i o n c o n t a i n e d i n t h i s d o c u m e n t i s t h e p r o p e r t y o f U L I S a n d i s c o m m u n i c a t e d c o n f i d e n t i a l l y f o r a s p e c i f i c m a t t e r . T h e r e c e i v e r i s i n c h a r g e o f t h i s d o c u m e n t a n d e n s u r e s t h a t i t w i l l n o t b e e i t h e r c o p i e d o r r e p r o d u c e d i n a l l o r p a r t , a n d t h a t t h e c o n t e n t w i l l n o t b e d i s c l o s e d i n a n y w a y t o a n y b o d y e x c e p t f o r i t s p r o p e r u s e .VFID and V SKIMMING can be adjusted for IRFPA temperature other that +30°C in case of ambient operating temperature range far from +30°C. This enables lower power consumption of the thermo-electric cooler for extreme ambient temperatures for instance.In order to safely use the microbolometer, you should respect the following procedure:− When switching on the device, VFID should be the last applied bias.− When switching off the device, VFID should be the first bias set to zero.WARNINGNon-respect of the above procedure could severely damage the device6.1.3 Pulsed voltagesSee table 3 for pulse voltages levels.Three pulsed voltages (SYP, SYL and SYT) are necessary to operate the sequencer of the IRCMOS microprocessor (see 2.3.6).The rise and fall times of these voltages shall be less than 10 ns.Integration time is equal to the time duration of the low level of SYL. The integration of the first row is triggered by the second SYL falling edge that follows a SYT falling edge. 6.2 Output signal characteristicsThe analog output VIDEO swings between about 0.4 V and 3.2 V. A signal increase corresponds to an output voltage increase. The period of the information output is the SYP period.VIDEO can be loaded by a resistance R ≥ 10 k Ω in parallel with a capacitance C ≤ 25 pF external to the packaging.Figure 7 : Configuration of the output « VIDEO »14/26I n f o r m a t i o n c o n t a i n e d i n t h i s d o c u m e n t i s t h e p r o p e r t y o f U L I S a n d i s c o m m u n i c a t e d c o n f i d e n t i a l l y f o r a s p e c i f i c m a t t e r . T h e r e c e i v e r i s i n c h a r g e o f t h i s d o c u m e n t a n d e n s u r e s t h a t i t w i l l n o t b e e i t h e r c o p i e d o r r e p r o d u c e d i n a l l o r p a r t , a n d t h a t t h e c o n t e n t w i l l n o t b e d i s c l o s e d i n a n y w a y t o a n y b o d y e x c e p t f o r i t s p r o p e r u s e .Electrical function nameBias type Optimum value@ 300KRange valueMaximum current Maximum RMS noise V DDA (analog supply)Fixed5 V ±25 mV35 mA2 µV (1 Hz to 1KHz) 5 µV (1 Hz to 10 KHz) 100 µV (1 Hz to 10 MHz) V DDL (digital supply)Fixed 3.3 V ± 300 mV 5 mA 10 mV (1 Hz to 10 MHz) V BUS (microbolometer biasing) Fixed 3.2 V ±25 mV 1 mA 100 µV (1 Hz to 10 MHz) VFID (microbolometer biasing)TunableGiven in Acceptance TestReport 0.65 to 5 V, tol.=±5mV 100 µA2 µV (1 Hz to 1KHz) 5 µV (1 Hz to 10 KHz) 100 µV (1 Hz to 10 MHz) V SKIMMING (blind microbolometer biasing) Tunable Given in Acceptance TestReport2.0 to 5.5 V, tol.=±5mV1 mA2 µV (1 Hz to 1KHz) 5 µV (1 Hz to 10 KHz) 100 µV (1 Hz to 10 MHz)V SSA (analog electrical ground) Fixed 0 V (ground) 50 mA - V SSL (digital electrical ground) Fixed 0 V (ground) 5 mA - V DET (microbolometer biasing)Fixed = V SSA0 V (ground)2 mAVEB (microbolometer biasing) Fixed 2.2V 0.1mA2 µV (1 Hz to 1KHz) 5 µV (1 Hz to 10 KHz) 100 µV (1 Hz to 10 MHz)Table 2 : Bias voltagesLow levelHigh levelElectrical function name Typical Required Typical requiredSYP : Pixel synchronization 0 V < 0.3 V > 3 V 3 to 3.3V SYL : Line synchronization 0 V < 0.3 V > 3 V 3 to 3.3V SYT : Frame synchronization0 V< 0.3 V> 3 V3 to 3.3VTable 3 : Pulsed voltagesLow levelHigh levelElectrical function nameTypical Required Typical required VIDEO (analog output)≥ 0.4 V≤ 3.2 VTable 4 : Outputs15/26I n f o r m a t i o n c o n t a i n e d i n t h i s d o c u m e n t i s t h e p r o p e r t y o f U L I S a n d i s c o m m u n i c a t e d c o n f i d e n t i a l l y f o r a s p e c i f i c m a t t e r . T h e r e c e i v e r i s i n c h a r g e o f t h i s d o c u m e n t a n d e n s u r e s t h a t i t w i l l n o t b e e i t h e r c o p i e d o r r e p r o d u c e d i n a l l o r p a r t , a n d t h a t t h e c o n t e n t w i l l n o t b e d i s c l o s e d i n a n y w a y t o a n y b o d y e x c e p t f o r i t s p r o p e r u s e .7. DELIVERY7.1 Delivery descriptionThe hardware delivery consists of the IDA including the IRFPA integrated in its miniaturizedpackaging.The IDA is delivered with its Specific Test Report (STR).As the IRFPA and TE stabilizer Command and Control Electronics are not part of the delivery, the equipment user needs to supply all bias and pulsed voltages necessary to operate the complete IDA. 7.2 MarkingThe IDA is clearly marked with the commercial reference and manufacturer’s serial number. 7.3 PackagingDuring transportation, the IDA is sealed in a plastic bag and placed into a box made out of conductive plastic.7.4 General recommendationsSpecific care must be taken for the handling of the IDA, mainly regarding electrostatic discharge (ESD) protection, limitation for maximum voltages and currents to be applied and handling ofoptical parts.Specific care must be taken for the handling of the IDA, mainly regarding electrostatic discharge (ESD) protection, limitation for maximum voltages and currents to be appliedTo avoid looking at the sun : In case the detector is directly illuminated by the sun, the involved pixels will momentarily be bloomed. This is a non destructive phenomenon and pixels will retrieve a regular behaviour after a certain time depending of the exposure.Ulis provides along with the detector order a “Technical Data Package” document in which the following issues are also addressed: recommendation for assembling and disassembling of a Command and Control Electronic, and getter activation procedure.。