电浆反应器与原理

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H h A H o F A

p l T A s

s y A p w

C t l u V A p

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z F P s y F u F H u H u i

A z A n A H o o

o i v T C H z z A A w

I n A e

C

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(¤)¡H

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l t l A e A

H a a”µl”A a q lØP a t q

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A A o s b t A A

B N t z A H q A s b

C

q O a I A a q l b q[t o A I

l l N q L h C]q l l l p A H I y

G O W[A O C o N n t

l u b(³s a y)¤W A a y](°)¡A u O F A i o(¦)¡C q l A

y l q l E A p G F q l A l

M q l A o O p G

e- + Ar Ar+ + 2 e- (1)

q l A g q[t i A O q l

A A p H W[A y C q

l n o A q p I W v

= ¹q q l n

= F × d (§O

× )

= q • ε • λ q l a q q F ε λ q O T w A H n q l n q W [q W [C H A q b q M C C

l ØF w q A P q l I v W [A p G

l P q l A l q l b P O I C q l -Âl t v P t v A y ØA C b w A q A q l -Âl w A o Øw q l -Âl Ø

(¿)»P Øw q l (Degree of Ionization)¡C P q l ]P A p 0.1%¨100%³A q A b PECVD q v p 1%¡A ~n D V A p a e B W n D A [W b u N K q o A PECVD l h C

q F (2)¦H ~A i A q n l h q l D E ~h y D A O E o A l A o ØE o A w A e A M l C

K v T F l A ]v T C O p 1 torr ®É¡A

q l i H n A l h ]n q l h A p A o (q • ε • λi )»p q l (q • ε • λe )¡A l A i g G

= 1/2mv 2 = 3/2kT

H C A l C q l A a q l B l A

L L k q [t A B b C P q l l I W v C A (·)»P C H C q O B O A A O ]t T ØP B P l w A C b (>100 torr)«h q l B

l M l I W c A l q i H A o T Øl A ]i F K¡C

C q N O i b C i

D q s ~i C q J q q A A W D

E o l B l B l M l A P i b

e - + Ar

Ar + h ν (3)

Ar*

e - + Ar +

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CVD k h s o S C PECVD k S b O q A l B l A

]i H b C C Thermal CVD k O b s A h

S w A PECVD k i b C A l A P

A]i b D W C q O W R A

M o A t v w C A q A i P i A b O W H o

i A p i s q L s A p

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Townsend ©

)¡A H p q p M q y A o s

Townsend Discharge¡C q~W[600V¡A W zγ-Ray q l b q

[t A l l I A q l q W[y e A

o s Avalanche Discharge¡C S q q A i J

q(Normal Glow Discharge)¡C i H N q e y A q y K

O A C q D A u o q D A y q T

w G O A y q W[~C C e A G C q

O q O W q y K T w(©H q T w)¡A q y W[O q

n W[C o q H C q n q O A n

q y h A q i J q(Abnormal Glow Discharge)ªC

s b A]q n B q A B q q y

u A A H q]H I q(Glow Discharge)¡C A~W[q y K A A H o g q l(Thermal Emission Electron, O w O g[A q l e o q

A q l)®A q y C o O c A q y y

W o g q l A A y q y W[D D D D A q

F H o e t q H C s q q(Arc Discharge)¡C