二次配

重大故障
轻微故障
应急处理后，下一 个工作日处理
厂务/设备/厂商 立刻处理故障
4. Common Issue
4.6 Usage of gas regulator
Open/Increase:Turn head clockwise 开启/增加：顺时针旋转阀帽 Facility hook up panel 厂务气体盘面 Close/Decrease: Turn head anticlockwise 关闭/减小：逆时针旋转阀帽
4. Common Issue
4.5.3 Trouble shooting of Hook up
设备故障—与动力有关，或FAB内动力系统异常 EE 联络厂务值班 EE 联络Hook Up 人员
厂务主系统故 障
厂务值班人员 联络主系统
水/气 /电/机械
动力Hookup故障
Work day 17:30~next day8:30 Holiday 0:00~24:00 Work day 8:00~17:30
1. Definition
Exhaust Power
Tool Raised Floor PCW Chemical PV CW UPW
Foundation
Gas
Drain
Pumping Line
Hook-up: 以设备机台为服务对象，按其具体技术要求, 在合理时间 内，将动力主系统的各种动力源安全/优质地衔接到机台，并保证机 台长期持续正常运作.
HOOKUP MEETING (EE/Hook Up Eng./Vendor)
会勘(EE/Hook Up Eng./Vendor)
HOOKUP MEETING (EE/Hook Up Eng./Vendor)
Turn on (EE/Hook Up Eng./Vendor)
开始配管(Hook Up Team)
1.1 服务对象
制造部所有设备机台为动力 Hook up 服务对象. 具体技术要求为Utility Matrix。 设备机台包括： Array tool, C/F tool, Cell tool, QRA tool, PI module tool, Develop Lab tool etc。 相关的设备工程师包括： Array, C/F, Cell, QRA, Develop engineer 机台的具体技术要求全部体现在Utility Matrix中，并且 在现场会勘时作最后确认。
16:30pm ~ 17:30pm every work day
To propose the due time for the utility turn on, To communicate with hook up engineer or vendor in any detail issue before meeting, Don’t argue during the meeting.
Average Fully Release : 5 Days
Given above should complete onsite survey before hookup.
1.4 Organization（Hook-up Team)
Hook-up Team
Bulk gas/Special gas/Exhaust PCW/CW/PV /drain /UPW Liu jiang
4.2 Common Issue
4.4 About Hookup meeting
Hookup meeting invitation : Time : From Location :
Note :
1. You must attend the hookup meeting: • 2. 3. During hook up (to confirm the hook up status)
S.Q.C.D.S
Safety
Quality Schedule Cost
Hookup 驗收要項
Space
* Electrical,HVAC,... * DI, PCW,CW,... * B-Gas,S-Gas,CDA,... * Chemical,Solvent,...
安全
Local Regulation Semi S2-0200 FM / FM 7-7 NFPA / NFPA-318 UL, CE,... HPM/ERT/First Aid Tool
功能
符合規格/設計圖 容量
. Sizing ( Filter, Valve, Regulator, CV, Tubing, Fitting, etc. )
品質
微污染,雜質. 含氧量/含水量
Baseline Spec. . Benchmark data
其它
維修保養 . 空間/路徑 . 方便性 竣工圖 防止回流及滲漏 . 上端,側面插管 . 回流收集裝置 VCR Gasket 必須鎖好 (耐壓/漏率/接頭Torque) 電力, 信號接點必須鎖緊 (接點溫度/接頭Torque) 高電壓/高壓力耐壓規格 (絕緣與耐壓測試)
Isolation valve
Regulator
手动阀
调压阀
在为厂务气体管路抽真空到盘面之前，现确定关闭手动阀，然后将调压阀顺时针调到最大，同时请不要用力过度。之后 ，方可开始抽真空。抽完真空之后，万万不可快速打开手动阀，否则瞬间的压力冲击可能会立即损伤调压阀隔膜片。正 确的送气方法是：在真空状态下，将调压阀逆时针关闭，然后缓慢开启手动阀，建议在30秒左右时间转动90度，然后再 顺时针缓慢开启调压阀，直到所需要的压力。
2.6.2 WASTE CHEMICAL
2.7.1 POWER
2.7.2 POWER
2.8.1 CHEMICAL
2.8.2 CHEMICAL
2.8.3 CHEMICAL
3. Procedure
HOOKUP MEETING(EE/Hook Up Eng./Vendor)
Finish installing piping 设备进场和定位 (EE)
1.1 服务对象
BOE UT Main System
UT Hook up
机台Utility Matrix
ARRAY
C/F
CELL
Ｅtc
1.2 合理的进度
Hook up 工程进度从2009-3-15开始严格按照：
Array, C/F、Cell、 etc. , should complete leveling and assembling .
Pump Down hook up gas panel (unless necessarily)
抽真空到二次配管气体盘面/送气： （一般机台抽真空到机台侧第一颗阀即可；除非特别要求 ，才抽真空到厂务气体盘面。） Before pumping down the gas panel&line, close the isolation valve, increase the regulator to Max, then pump down gas line to vacuum. You must Decrease the regulator before turn on the gas, otherwise you will damage the diaphragm at once.The right way to turn on gas is: At fist open the isolation valve slowly,then increase the regulator slowly to needed pressure.
2. The equipment vendor/manufacturer shall be responsible to supply complete set of both male and female fittings of the same type .
3. The EQ vendor/manufacturer shall provide the required clamps for anchoring all footings of the equipment and fixed onto raised floor or ground(for sub-Fab) to prevent shifting of equipment in event of earth quake or incidental vibration. 4. The equipment vendor/manufacturer shall have the responsibility to perform the interfacing connection and signal testing to sure proper functioning.
Power / Gas / Chemical Turn on Procedure
聯接正確 . Line by Line
. Point to Point
疏散/逃生/救護空間 消防/防火材/防火填縫 地震防護 /固定 / 錨定 標籤/標示/危害警示 銳角/毛邊/收邊處理 縫隙/護欄處理 安全接地 / 防爆Βιβλιοθήκη Baidu施
Chemical
Cheng Qiang
POWER
Li guohai
厂商
厂商
厂商
2 Job description
2.1.1 Gas
The connection from take-off point to P.O.U. of equipment shall be the responsibility of SMIC Hook Up project. Whereas the connection between the components of equipment shall be the responsibility of the equipment vendor/manufacturer.
2.1.2 Gas
2.2.1 PCW
2.2.2 PCW
PCW
2.2.3 PCW
PCW
2.3.1 UPW
2.3.2 UPW
2.4.1 PUMPING LINE
2.4.2 PUMPING LINE
2.5.1 VEX
2.5.2 SCX
2.5.3 GEX
2.5.4 TEX
2.6.1 FWW
EMO Test
特殊操作模擬測試 規格 / Log . 抗酸 / 耐蝕 / . 防漏 / 防滴 / 防塵 機械強度 夾表/掛牌/開度記號 符合原設計材料 . 管材,管件,… . 標準施工法 . 制式化
B2 PJT Utility
CHENGDU, CHINA
Contents 目录
1. 2. 3. 4. 5. Hook Up Function Job description Procedure Common issue Final acceptance 二次配职责 工作描述 流程 注意点 验收要点
1. Definition
Hook-up 二次配
以设备机台为服务对象，按其具体技术要求, 在合理时 间内，按既定的价格，将动力主系统的各种动力源安全/优 质地衔接到机台，并保证机台长期持续正常运作。 提供的种类包括：电、基础、排风（含新风） 、工 艺水、自来水、 真空管、泵管、纯水、化学品、排放水、 大宗气体、特殊气体。（power、foundation、EXH、PCW、 CW、PV 、 PUMPLINE、UPW、CHEMICAL、DRAIN、 BULK GAS、Special gas）
完成
4. 1 Common Issue
Hook-up Scope/Definition
1. The hook-up scope shall be defined as follows: The connection from take-off point of facility main system to Eq P.O.U shall be the responsibility of hookup, whereas the connection between Eq. Components of one equipment vendor/manufacturer shall be the responsibility of the vendor/manufacturer.