日本精工SPI 3800N SPA300HV VE AFM操作手册

Code: 0903-A VV-013E/0312-Rev.2

N

Contents

This manual guides you a basic illustrations on doing VE-AFM determination under the vacuum state at the SPI3800N Probe Station + SPA300HV unit system.

Wiring layout

Start up the system

Breaking vacuum

Installing the scanner, sample and cantilever

Vacuating

Aligning the laser axis

Approach

Imaging

Saving the image data

End

Wiring layout To carry out VE-AFM determination, please affirm the wiring layouts for SPI 3800 N electric part,MM power board （PCB 6）and SMM controller according to the following diagrams.When using MM power board The wiring layout for VE-AFM determination (1) of SPI3800N electric part (abstract)

→For details of each terminal please see the [Hardware guide E-1] in the operation manual of SPI 3800N referring to the [Rear Panel].To computer

To HV Adapter box

To HV Adapter Box

When using SMM controller

To computer

To HV Adapter Box

To HV Adapter Box

The wiring layout for VE-AFM determination (2)

[Up：SMM controller Down：SPI 3800N electric part (abstract)]

Start up the system

(1)If the main switch at the lower part of the rear panel of the electrical part of SPI 3800 N is in the OFF position, set it to the ON position.

The electrical part of SPI 3800 N (the rear panel)

(2)Set the power switch at the center of the front panel of the electrical part of SPI 3800 N to the ON position. When using the SMM controller, set the power switch at right lower corner of the front panel of the SMM controller to the ON position, too.

(When it is in the ON position, its indicator will be on)

The electrical part of SPI3800N (the front panel)

Step (1)step(2)

SMM controller (the front panel)

(3)Switch on the computer and the display. Windows starts.]

Setting Windows environment

When using SPI Win, set Windows environment according to the following:

h Image resolution ：1024 × 768 dot

h Chromatic number ：Full color (16.70 million colors)

→Refer to the [Specification] of computers of the [Instruction E-1 on hardware] of

SPI 3800 N Manual.

(4)Double click the [Spisel32] icon

Applying the " SPISelect " to start the scanning probe program. Under the following window,the"SPI3800N program selector dialog box]shall be jumped.

[SPI3800N program selector] dialog box

Step (5)

Step (5)

SMM CONTROLLER METER 1METER 2

ω

Acos(A)2ω(ωr)3A POWER

Asin

Step (2)