Glow Discharge Atomic Emission Spectrometry - Analytical 辉光放电原子发射光谱分析
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• However, unlike most other emission sources it is also a sputtering source and it thus removes material form the sample in a uniform layer-bylayer manner.
• The GD lamp provides a low pressure argon environment between these electrodes.
• A discharge forms in this gaseous environment when a high voltage is applied across the electrodes. (This discharge glows providing glow discharge with it’s name.)
• Anodizing • Coatings on glass
So What Is Glow Discharge?
• How does it work? • What are it’s features? • What can it do?
A Generic Spectrometric Source
• Tin, Copper, Nickel, Chrome, Anodizing
• Complex Multi-layered Systems
– Paint
• Automotive and building products
– Hard coatings – PVD and CVD – Non-conductive coatings and Substrates
The dc glow discharge is almost this simple!
power
light
DC Glow Discharge
What is a Glow Discharge?
• The glow discharge is a plasma source used for atomic emission spectroscopy (AES).
• “Glow Discharge” gets its name from the fact that the plasma is luminous (it glows).
• Both direct current (dc) and radio frequency (rf) sources can be utilized in glow discharge spectrometry (GDS).
Glow Discharge Atomic Emission Spectrometry
The Methodology, Calibration and Analytical Performance for Bulk and Quantitative Depth Profile Analysis
Charles L. Maul LECO Corporation
ILAP Conference, Vail CO, October 2008
GD-AES Applications
Bulk Analysis
Depth Profiling
Weight %
Cr
Ni
Fe
Px5 N
Cr
Depth (Micrometers)
Bulk Applications
Glow discharge can be utilized in all bulk matrices
GD Sputter Spot
The glow discharge sputtering process removes material uniformly providing both outstanding bulk and in-depth material characterization.
• Conductive and non-conductive • Wide range of depths
– Nanometer to micrometer
QDP Applications
• Simple dual systems
Baidu Nhomakorabea– Zinc coatings
• Galvanizing
– Metal platings
QDP - Quantitative Depth Profiling
• Glow Discharge is incredibly useful as a surface analytical tool
• Glow Discharge is a comprehensive technique capable of analyzing many different coating systems
• Because of it’s relative simplicity we will first describe dc glow discharge.
The dc Glow Discharge
• The dc glow discharge source is composed of only two electrodes and a power supply.
– Ferrous – Copper base – Aluminum – Nickel base – Monel – Magnesium Alloys
– Cobalt Base – Tin – Lead – Titanium – Zinc – Solders
Common bulk applications
The dc Glow Discharge
• The glow discharge has several unique characteristics that makes it an outstanding spectroscopic emission source.
• Like all emission sources it provides atomic line spectra which is characteristic of the sample’s composition.
• The GD lamp provides a low pressure argon environment between these electrodes.
• A discharge forms in this gaseous environment when a high voltage is applied across the electrodes. (This discharge glows providing glow discharge with it’s name.)
• Anodizing • Coatings on glass
So What Is Glow Discharge?
• How does it work? • What are it’s features? • What can it do?
A Generic Spectrometric Source
• Tin, Copper, Nickel, Chrome, Anodizing
• Complex Multi-layered Systems
– Paint
• Automotive and building products
– Hard coatings – PVD and CVD – Non-conductive coatings and Substrates
The dc glow discharge is almost this simple!
power
light
DC Glow Discharge
What is a Glow Discharge?
• The glow discharge is a plasma source used for atomic emission spectroscopy (AES).
• “Glow Discharge” gets its name from the fact that the plasma is luminous (it glows).
• Both direct current (dc) and radio frequency (rf) sources can be utilized in glow discharge spectrometry (GDS).
Glow Discharge Atomic Emission Spectrometry
The Methodology, Calibration and Analytical Performance for Bulk and Quantitative Depth Profile Analysis
Charles L. Maul LECO Corporation
ILAP Conference, Vail CO, October 2008
GD-AES Applications
Bulk Analysis
Depth Profiling
Weight %
Cr
Ni
Fe
Px5 N
Cr
Depth (Micrometers)
Bulk Applications
Glow discharge can be utilized in all bulk matrices
GD Sputter Spot
The glow discharge sputtering process removes material uniformly providing both outstanding bulk and in-depth material characterization.
• Conductive and non-conductive • Wide range of depths
– Nanometer to micrometer
QDP Applications
• Simple dual systems
Baidu Nhomakorabea– Zinc coatings
• Galvanizing
– Metal platings
QDP - Quantitative Depth Profiling
• Glow Discharge is incredibly useful as a surface analytical tool
• Glow Discharge is a comprehensive technique capable of analyzing many different coating systems
• Because of it’s relative simplicity we will first describe dc glow discharge.
The dc Glow Discharge
• The dc glow discharge source is composed of only two electrodes and a power supply.
– Ferrous – Copper base – Aluminum – Nickel base – Monel – Magnesium Alloys
– Cobalt Base – Tin – Lead – Titanium – Zinc – Solders
Common bulk applications
The dc Glow Discharge
• The glow discharge has several unique characteristics that makes it an outstanding spectroscopic emission source.
• Like all emission sources it provides atomic line spectra which is characteristic of the sample’s composition.